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热词
    • 4. 发明授权
    • Surface analyzer
    • 表面分析仪
    • US4829179A
    • 1989-05-09
    • US70252
    • 1987-07-06
    • Masahiko AokiMasashi KonishiYasuhiro MatsudaNaoto Okazaki
    • Masahiko AokiMasashi KonishiYasuhiro MatsudaNaoto Okazaki
    • G01N23/20G01Q30/04G21K1/093H01J49/02H01J49/14H01J49/30
    • H01J49/30G01N23/20G21K1/093H01J49/025H01J49/142
    • A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.
    • 用于通过PELS(质子能量损失光谱法)分析样品表面的物理性质的表面分析仪,其中质子束等加速离子束在垂直方向上撞击在样品的表面上并且离子束散射 从样品减速,然后由分析仪检测,以分析离子束的能量损失。 表面分析仪包括用于产生离子束的离子束源,用于偏转来自离子束源的离子束的偏转装置,用垂直方向的离子束源的离子束照射样品的表面 采样和偏转来自样品的散射离子束,加速和减速装置,用于在离子束照射在样品上并加速散射的离子束之前加速离子束,以及分析装置,用于检测散射光束并分析离子的能量损失 梁。