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    • 3. 发明授权
    • MEMS-based pellicle beamsplitter
    • 基于MEMS的防护薄膜分束器
    • US08767301B2
    • 2014-07-01
    • US12864214
    • 2008-01-31
    • Michael Renne Ty TanShih-Yuan (SY) WangWei Wu
    • Michael Renne Ty TanShih-Yuan (SY) WangWei Wu
    • G02B1/10G02B27/14
    • G02B27/142G02B6/125G02B6/4214G02B6/43G02B27/14
    • A method of forming a non-polarizing pellicle beamsplitter having a desired power-tap ratio. The method includes the operation of forming a base layer having a base refractive index on a substrate and arranging a plurality of alternating layers having relatively high and low indexes of refraction respectively over the base layer. The thickness of each of the high index and low index layers is selected to substantially eliminate polarization of the optical beam. The method further includes the operation of removing a selected area of the substrate to create an optical pathway comprised of both the base layer and the plurality of alternating layers, and where the optical pathway is configured to transmit and reflect a selected amount of light in the optical beam.
    • 一种形成具有期望的电力抽头比的非偏振薄膜分束器的方法。 该方法包括在基底上形成具有基底折射率的基底层的操作,并且在基底层上分别布置具有相对较高和较低折射率的多个交替层。 选择每个高折射率层和低折射率层的厚度以基本上消除光束的偏振。 该方法还包括去除衬底的选定区域以创建由基底层和多个交替层两者组成的光学路径的操作,并且其中光学路径被配置为透射和反射所选择的光量 光束。