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    • 6. 发明申请
    • AQUEOUS DETERGENT SOLUBLE COATING AND ADHESIVE AND METHODS OF TEMPORARY BONDING FOR MANUFACTURING
    • 水性洗涤剂可溶涂料和胶粘剂及其制造方法
    • WO2014164206A1
    • 2014-10-09
    • PCT/US2014/021212
    • 2014-03-06
    • MOORE, John
    • MOORE, JohnPETTIT, Jared
    • C09D5/20
    • C09J11/06C08K3/08C08K3/40C08K7/02C08K7/20C09D5/008C09J133/26C09J183/04H01L21/02118
    • Compositions and methods are described for a temporary coating and adhesive with adjustable acidity for use in coating work units as a planarization coating over high topography and also for affixing thin units onto a carrier whereby such compositions provide sufficient properties to support a manufacturing process, and upon completion, the compositions are removed by an aqueous detergent that dissolves and releases the work unit within a rapid time frame without harm to its integrity. The temporary adhesive provides a tunable acidity based upon Lewis acid represented as its acid dissociative constant, K a , where it is preferred to have K a ≥1 X 10 -6 (pK a ≤6), more preferred K a ≥1X 10 -5 (pK a ≤5), and most preferred K a ≥1 X 10 -4 (pK a ≤4). The temporary coating and adhesive may be applied and cured in a variety of ways that meet the needs of the work unit and objectives of the manufacturing process. The invention provides benefits of flexibility and reduced cost when establishing practices to handle difficult work units in the manufacture of semiconductors and flat panel displays.
    • 描述了用于临时涂层和粘合剂的组合物和粘合剂,其具有可调节的酸度,用于在高形貌下作为平面化涂层涂覆工作单元,并且还用于将薄单元粘附到载体上,由此这些组合物提供足够的性质以支持制造过程, 完成后,通过在快速时间范围内溶解和释放工作单元的水性洗涤剂除去组合物而不损害其完整性。 临时粘合剂提供基于以酸解离常数Ka表示的路易斯酸的可调酸度,其中优选具有Ka≥1×10 -6(pKa≤6),更优选Ka≥1X10-5(pKa≤ 5),最优选Ka≥1×10-4(pKa≤4)。 临时涂层和粘合剂可以以满足工作单元和制造过程目标的各种方式施加和固化。 本发明在制造半导体和平板显示器的制造中处理困难的工作单元的实践中提供灵活性和降低成本的优点。