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    • 3. 发明专利
    • VACUUM HEATING DEVICE
    • JP2001343290A
    • 2001-12-14
    • JP2000167365
    • 2000-06-05
    • ULVAC CORP
    • YAMAMOTO KENROTORIKAI FUTOSHINAKATSUKA ATSUSHI
    • G01K7/02B22F3/10F27B17/00F27B21/14F27D1/00F27D21/04G01K1/14
    • PROBLEM TO BE SOLVED: To provide a vacuum heating device capable of preventing any operation rate from being deteriorated, and preventing any heating defective from being manufactured by facilitating countermeasures to the omen of the deterioration of a thermo-couple for measuring a high heating temperature in a heating block. SOLUTION: When the measured temperature of a heating block 27 of a first sintering chamber 2 of a vacuum heating device 10 obtained by a thermo- couple 31 reaches the set temperature of heating, and oscillates beyond the fixed temperature range, a process is controlled so that the deterioration signal of the thermo-couple can be issued, and that the heating can be automatically stopped. Also, carbon materials sintered in a temperature 3000 deg.C is used for heat insulating materials 28 of the heating block 27, and the part in the heating block 27 of a high purity aluminum insulating tube 32 of the W.Re system thermo-couple 31 for measuring the heating temperature is covered with a heat insulating material 28' for heat barrier for protecting it from the emitted heat of a bar-shaped heater 22. Also, W.Re system wires 31' and 31" are loosely bounded and fixed to a W supporting tool 35 with a Ta wire 36.