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1. 发明公开

EP3018237A1 METHOD FOR INSPECTING SILICA GLASS CRUCIBLE 审中-公开
标题翻译：方法进行检查石英玻璃坩埚
公开(公告)号：EP3018237A1
公开(公告)日：2016-05-11
申请号：EP13888584.3
申请日：2013-06-30
申请人： SUMCO Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , OHARA Masami
IPC分类号： C30B29/06 , C03B20/00 , C30B15/10
CPC分类号： H01J37/32935 , C30B15/00 , C30B15/10 , C30B15/14 , C30B29/06 , C30B35/002 , G01N21/3563 , G01N21/65 , G01N21/68 , G01N21/95 , G01N2021/8477 , G01N2201/105 , G01N2201/12
摘要： An inspection method of vitreous silica crucibles, includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.

2. 发明授权

EP3018236B1 SILICA GLASS CRUCIBLE 有权
公开(公告)号：EP3018236B1
公开(公告)日：2018-08-08
申请号：EP13888681.7
申请日：2013-06-30
申请人： SUMCO Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , KITAHARA Eriko
IPC分类号： C30B15/10 , C30B29/06 , C03B19/09
CPC分类号： C30B29/06 , C03B19/095 , C30B15/10 , Y02P40/57
摘要： A vitreous silica crucible, comprising a substantially cylindrical straight body portion having an opening on top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is larger than that of the bottom portion, wherein, an inner surface of the crucible has a concavo-convex structure in which a groove-shaped valley is interposed between ridges, and an average interval of the ridges is 5 - 100 µm.

3. 发明公开

EP3015574A1 SILICON SINGLE CRYSTAL PULLING METHOD 有权
标题翻译： VERFAHREN ZUMZÜCHTENEINES SILICIUMEINKRISTALLS
公开(公告)号：EP3015574A1
公开(公告)日：2016-05-04
申请号：EP13887931.7
申请日：2013-06-29
申请人： Sumco Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , KITAHARA Eriko
IPC分类号： C30B15/10 , C30B29/06
CPC分类号： C30B15/10 , C30B29/06
摘要： A pulling-up method of silicon single crystal comprises a process of laying a molded body between a susceptor's inner surface and a crucible's outer surface. The molded body is formed based on three-dimensional data of inner surface shape of the susceptor which can hold the vitreous silica crucible and three-dimensional data of the crucible so as to make the susceptor's central axis and the crucible's central axis substantially aligned when it is laid between the susceptor's inner surface and the crucible's outer surface.
摘要翻译：硅单晶的提拉方法包括在基座的内表面和坩埚的外表面之间铺设成型体的工艺。模制体是基于能够容纳玻璃状石英坩埚的基座的内表面形状和坩埚的三维数据的三维数据形成的，以便使得基座的中心轴和坩埚的中心轴基本对准被放置在基座的内表面和坩埚的外表面之间。

4. 发明授权

EP3015574B1 SILICON SINGLE CRYSTAL PULLING METHOD 有权
标题翻译：硅单晶的拉晶方法
公开(公告)号：EP3015574B1
公开(公告)日：2018-03-21
申请号：EP13887931.7
申请日：2013-06-29
申请人： Sumco Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , KITAHARA Eriko
IPC分类号： C30B15/10 , C30B29/06
CPC分类号： C30B15/10 , C30B29/06
摘要： A pulling-up method of silicon single crystal comprises a process of laying a molded body between a susceptor's inner surface and a crucible's outer surface. The molded body is formed based on three-dimensional data of inner surface shape of the susceptor which can hold the vitreous silica crucible and three-dimensional data of the crucible so as to make the susceptor's central axis and the crucible's central axis substantially aligned when it is laid between the susceptor's inner surface and the crucible's outer surface.

5. 发明公开

EP3199669A1 DESTRUCTIVE EXAMINATION METHOD AND QUALITY ASSESSMENT METHOD FOR QUARTZ GLASS CRUCIBLE 有权
标题翻译：石英玻璃坩埚破坏性检测方法及质量评价方法
公开(公告)号：EP3199669A1
公开(公告)日：2017-08-02
申请号：EP15844371.3
申请日：2015-09-24
申请人： SUMCO Corporation
发明人： KITAHARA Ken , SATO Tadahiro , SUDO Toshiaki , KITAHARA Eriko , WATANABE Takashi
IPC分类号： C30B29/06 , C30B15/10
CPC分类号： G01N3/307 , C03B19/095 , C30B15/10 , C30B29/06 , C30B35/002 , G01N2203/001 , G01N2203/0035 , G01N2203/0064
摘要： Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use.
The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.
摘要翻译：提供了一种能够在尽可能接近实际使用状态的条件下进行检查的氧化硅玻璃坩埚的破坏性检查方法和质量确定方法。根据本公开的氧化硅玻璃坩埚的破坏性检查方法评估当负载瞬时施加到石墨基座2的一点时用于拉拽由石墨基座2支撑的硅单晶的氧化硅玻璃坩埚1的内表面的开裂状态同时通过自动中心冲头10在内表面上推动自动中心冲头10的尖端部分抵靠内表面。

6. 发明公开

EP3088573A1 QUARTZ GLASS CRUCIBLE AND STRAIN MEASUREMENT DEVICE THEREFOR 有权
标题翻译：德意志银行（DEHNUNGSMESSUNGSVORRICHTUNGDAFÜR）的QUARZGLASTIEGEL
公开(公告)号：EP3088573A1
公开(公告)日：2016-11-02
申请号：EP14874952.6
申请日：2014-12-25
申请人： SUMCO Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , KITAHARA Eriko
IPC分类号： C30B29/06 , C03B20/00 , C30B15/10 , G01N21/23
摘要： A distortion distribution of an entire vitreous silica crucible is measured in a non-destructive way.
A distortion-measuring apparatus comprises: a light source 11 which irradiates the vitreous silica crucible 1 from outside; a first polarizer 12 and a first quarter-wave plate 13 disposed between the light source 11 and an outer surface of the vitreous silica crucible 1 wall; a camera 14 disposed inside of the vitreous silica crucible 1; a camera control mechanism 15 configured to control a photographing direction of the camera 14; a second polarizer 16 and a second quarter-wave plate 17 disposed between the camera 14 and an inner surface of the vitreous silica crucible 1's wall. An optical axis of the second quarter-wave plate 17 inclines 90 degrees with respect to the first quarter-wave plate 13. The camera 14 conducts photographing of a light which is emitted from the light source 11 and passes through the first polarizer 12, the first quarter-wave plate 13, the wall of the vitreous silica crucible 1, the second quarter-wave plate 17, and the second polarizer 16.
摘要翻译：以非破坏性方式测量整个石英玻璃坩埚的失真分布。变形测量装置包括：从外部照射石英玻璃坩埚1的光源11; 设置在光源11和石英玻璃坩埚1壁的外表面之间的第一偏振器12和第一四分之一波长板13; 设置在石英玻璃坩埚1内的照相机14; 被配置为控制相机14的拍摄方向的相机控制机构15; 设置在照相机14和石英坩埚1的壁的内表面之间的第二偏振片16和第二四分之一波片17。第二四分之一波片17的光轴相对于第一四分之一波片13倾斜90度。照相机14进行从光源11发射并穿过第一偏振器12的光的拍摄，第一四分之一波片13，石英玻璃坩埚1的壁，第二四分之一波片17和第二偏振器16。

7. 发明公开

EP3088572A1 QUARTZ GLASS CRUCIBLE AND MANUFACTURING METHOD THEREFOR 有权
标题翻译： QUARZGLASTIEGEL UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP3088572A1
公开(公告)日：2016-11-02
申请号：EP14873978.2
申请日：2014-12-25
申请人： SUMCO Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , KITAHARA Eriko
IPC分类号： C30B15/10 , C03B20/00
CPC分类号： C30B15/10 , C03B19/095 , C30B29/06 , C30B35/002 , Y02P40/57
摘要： Provided is a vitreous silica crucible suppressing deformation under high temperature, and a method for manufacturing the same. A vitreous silica crucible 1 includes a cylindrical straight body portion 10a, a corner portion 10c formed at lower end of the straight body portion 10a, and a bottom portion 10b connected with the straight body portion 10a via the corner portion 10c. Moreover, the vitreous silica crucible 1 includes a bubble-containing opaque layer 11 constituting an outer layer, and a bubble-free transparent layer 12 constituting an inner layer. A boundary surface, between the opaque layer 11 and the transparent layer 12 in at least the straight body portion 10a, forms a periodic wave surface in a vertical direction.
摘要翻译：提供一种抑制高温下的变形的石英玻璃坩埚及其制造方法。石英玻璃坩埚1包括圆柱形直体部分10a，形成在直体部分10a的下端的拐角部分10c，以及经由拐角部分10c与直体部分10a连接的底部10b。此外，石英玻璃坩埚1包括构成外层的含气泡的不透明层11和构成内层的无气泡透明层12。至少在直体部分10a中的不透明层11和透明层12之间的边界表面在垂直方向上形成周期波表面。

8. 发明授权

EP3088573B1 QUARTZ GLASS CRUCIBLE AND STRAIN MEASUREMENT DEVICE THEREFOR 有权
公开(公告)号：EP3088573B1
公开(公告)日：2020-07-15
申请号：EP14874952.6
申请日：2014-12-25
申请人： SUMCO Corporation
发明人： SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , KITAHARA Eriko
IPC分类号： C30B29/06 , C03B20/00 , C30B15/10 , G01N21/23 , C03C3/04 , G01L1/24 , G01L5/00 , H04N5/232

9. 发明授权

EP3199668B1 MANUFACTURING METHOD FOR SILICON SINGLE CRYSTAL 有权
公开(公告)号：EP3199668B1
公开(公告)日：2019-07-17
申请号：EP15844603.9
申请日：2015-09-24
申请人： SUMCO Corporation
发明人： SATO Tadahiro , KITAHARA Eriko , SUDO Toshiaki , KITAHARA Ken
IPC分类号： C30B15/00 , C30B29/06 , C30B35/00 , C30B15/10 , C30B15/20

10. 发明授权

EP3199669B1 DESTRUCTIVE EXAMINATION METHOD AND QUALITY ASSESSMENT METHOD FOR QUARTZ GLASS CRUCIBLE 有权
公开(公告)号：EP3199669B1
公开(公告)日：2018-09-19
申请号：EP15844371.3
申请日：2015-09-24
申请人： SUMCO Corporation
发明人： KITAHARA Ken , SATO Tadahiro , SUDO Toshiaki , KITAHARA Eriko , WATANABE Takashi
IPC分类号： C30B15/10 , C30B35/00 , G01N3/307 , C30B29/06 , C03B19/09
CPC分类号： G01N3/307 , C03B19/095 , C30B15/10 , C30B29/06 , C30B35/002 , G01N2203/001 , G01N2203/0035 , G01N2203/0064
摘要： Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use. The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.

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