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    • 7. 发明申请
    • AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK
    • 在高速旋转切割系统中的空气流量管理
    • WO2013022713A2
    • 2013-02-14
    • PCT/US2012049369
    • 2012-08-02
    • KLA TENCOR CORPKREN GEORGEDOYLE PAULBELYAEV ALEXANDER
    • KREN GEORGEDOYLE PAULBELYAEV ALEXANDER
    • H01L21/687H01L21/66
    • H01L21/68735Y10T279/11Y10T279/21Y10T279/34
    • The present invention is directed to a high speed, spinning chuck for use in a semiconductor wafer inspection system. The chuck of the present disclosure is configured with a turbulence-reducing lip. Spinning of the chuck produces radial airflows proximal to a surface of the wafer and proximal to the bottom of the chuck. The turbulence-reducing lip of the chuck of the present disclosure directs the radial airflows off of the top surface of the wafer and the bottom surface of the chuck in a manner that minimizes the size of the low pressure zone formed between these radial airflows. The minimization of the low pressure zone reduces air turbulence about the periphery of the chuck and substrate, thereby reducing the possibility of contaminants in the system being directed onto the surface of the substrate by such air turbulence.
    • 本发明涉及一种用于半导体晶片检查系统的高速纺丝卡盘。 本公开的卡盘配置有减少湍流的唇部。 卡盘的旋转产生靠近晶片表面并靠近卡盘底部的径向气流。 本公开的卡盘的减少湍流的唇部以使得在这些径向气流之间形成的低压区域的尺寸最小化的方式引导径向气流离开晶片的顶表面和卡盘的底表面。 低压区域的最小化减小了卡盘和基板周边的空气湍流,从而降低了系统中的污染物通过这种空气湍流被引导到基板的表面上的可能性。
    • 8. 发明申请
    • REFERENCED INSPECTION DEVICE
    • 参考检验设备
    • WO2009151984A3
    • 2010-03-18
    • PCT/US2009045704
    • 2009-05-29
    • KLA TENCOR CORPDOYLE PAULZHAO GUOHENGBELYAEV ALEXANDERRUNYON J REX
    • DOYLE PAULZHAO GUOHENGBELYAEV ALEXANDERRUNYON J REX
    • H01L21/66
    • H01L21/6838
    • A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
    • 一种用于调查基板的工具,其中该工具具有用于检查基板的工具头,用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源,其中真空源将基板拉向空气轴承,并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作,将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分,基板相对于基板的上表面而不是基板的背面完成对准工具头。
    • 10. 发明申请
    • ANALYTE DETECTION ASSAYS
    • 分析检测分析
    • WO2009012220A2
    • 2009-01-22
    • PCT/US2008069975
    • 2008-07-14
    • AGILENT TECHNOLOGIES INCBELYAEV ALEXANDERMONELL CRAIGSORGE JOSEPH
    • BELYAEV ALEXANDERMONELL CRAIGSORGE JOSEPH
    • G01N33/543C12Q1/68
    • G01N33/58C12Q1/6804C12Q1/6853G01N33/543C12Q2563/179C12Q2525/117C12Q2521/101C12Q2525/186C12Q2521/543
    • The present invention provides methods, kits and compositions for the detection of an analyte. In the methods of the invention, a binding molecule coupled to a first polymerase is incubated with a modified polynucleotide template to form a copy of the modified polynucleotide template without any modified nucleotides. The unmodified copy is detected in a second amplification/primer extension reaction using a second polymerase that is unable to amplify the modified polynucleotide template. Detection of the unmodified copy is indicative of the presence and/or amount of the analyte in the sample. In place of the binding molecule coupled to a first polymerase, a pair of analyte-specific probes can also be used. The first analyte specific probe comprises a first binding moiety and a first portion of a first polymerase and the second analyte specific probe comprises a second binding moiety and a second portion of the first polymerase. When the binding moieties are bound to the analyte the first and second portions of the polymerase interact to form a functional polymerase complex that is used to form a copy of the modified polynucleotide template without any modified nucleotides.
    • 本发明提供了用于检测分析物的方法,试剂盒和组合物。 在本发明的方法中,将与第一聚合酶偶联的结合分子与修饰的多核苷酸模板一起温育以形成修饰的多核苷酸模板的拷贝,而不用任何修饰的核苷酸。 使用不能扩增修饰的多核苷酸模板的第二聚合酶在第二扩增/引物延伸反应中检测未修饰的拷贝。 未修饰拷贝的检测表明样品中分析物的存在和/或量。 代替与第一聚合酶偶联的结合分子,也可以使用一对分析物特异性探针。 第一分析物特异性探针包含第一聚合酶的第一结合部分和第一部分,第二分析物特异性探针包含第一聚合酶的第二结合部分和第二部分。 当结合部分与分析物结合时,聚合酶的第一和第二部分相互作用以形成功能性聚合酶复合物,其用于形成修饰的多核苷酸模板的拷贝而没有任何修饰的核苷酸。