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    • 8. 发明申请
    • WIRING FOR MICROMIRROR ARRAY LENS
    • 接线用于微镜阵列镜头
    • WO2006096594A3
    • 2007-04-05
    • PCT/US2006007815
    • 2006-03-03
    • STEREO DISPLAY INCANGSTROM INCBAEK SANG HYUNECHO GYOUNG ILSEO CHEONG SOO
    • BAEK SANG HYUNECHO GYOUNG ILSEO CHEONG SOO
    • G02B26/00
    • G02B26/0841
    • A mircromirror array lens includes a micromirror (301) lying in a micromirror layer, an electrode (302) configured to displace the micromirror by electrostatic force, and a control wire (303) coupled to the electrode and configured to supply voltage to the electrode to generate electrostatic force. In one embodiment, the control wire lies in a gap between the micromirror and another micromirror in the micromirror layer. In another embodiment, the control wires lie beneath the micromirror layer, such that the fill-factor of the micromirror array lens is optimized. In another embodiment, the micromirror array lens includes a passivation layer (405) configured to provide electrical isolation between the electrode and the control wire. The advantages of the present invention include improved optical efficiency and accuracy by minimizing the voltage variation of electrode and control wire by each other and electrostatic force between control wire and micromirror.
    • 微镜阵列透镜包括位于微反射镜层中的微反射镜(301),被配置为通过静电力移动微反射镜的电极(302)和耦合到电极的配置成向电极施加电压的控制线(303) 产生静电力。 在一个实施例中,控制线位于微镜层中的微反射镜和另一微反射镜之间的间隙中。 在另一个实施例中,控制线位于微镜层之下,使得微镜阵列透镜的填充因子被优化。 在另一个实施例中,微镜阵列透镜包括被配置为在电极和控制线之间提供电隔离的钝化层(405)。 本发明的优点包括通过使电极和控制线彼此的电压变化和控制线和微反射镜之间的静电力最小化来提高光学效率和精度。