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1. 发明申请

WO2009104871A3 DARK-FIELD EXAMINATION DEVICE 审中-公开
标题翻译：暗场检测装置
公开(公告)号：WO2009104871A3
公开(公告)日：2009-10-22
申请号：PCT/KR2009000249
申请日：2009-01-16
申请人： SNU PRECISION CO LTD , KIM TAI WOOK , PARK HEUI JAE , LEE IL HWAN
发明人： KIM TAI WOOK , PARK HEUI JAE , LEE IL HWAN
IPC分类号： G02F1/13
CPC分类号： G01N21/956 , G01N2021/8822 , G01N2021/9513 , G02F1/1303
摘要： The present invention relates to a dark-field examination device. The dark-field examination device according to the present invention is characterised in that it comprises: an illumination unit for irradiating light towards an examination object on a base; a reflection unit for reflecting, back towards the examination object, incident light which has been reflected by means of the examination object or incident light which has passed through the base; and an imaging unit for imaging the examination object by receiving light which has been scattered by means of the examination object, and in that the illumination unit, the reflection unit and the imaging unit are arranged in such a way that part of the light which has been irradiated from the illumination unit is scattered by means of the examination object and falls incident upon the imaging unit while another part of the light which has been irradiated from the illumination unit falls incident upon the reflection unit, and the light reflected back towards the examination object by means of the reflection unit is scattered by means of the examination object and falls incident upon the imaging unit.
摘要翻译：本发明涉及一种暗视野检查装置。根据本发明的暗视野检查装置的特征在于，它包括：照明单元，用于向基座上的检查对象照射光; 反射单元，用于向检查对象反射已经通过检查对象反射的入射光或已经穿过基座的入射光; 以及成像单元，用于通过接收通过检查对象散射的光来对检查对象进行成像，并且照明单元，反射单元和成像单元被布置成使得具有从照明单元照射的照射单元通过检查对象物散射并入射到成像单元上，而从照明单元照射的另一部分光入射到反射单元上，并且将光反射回检查通过反射单元的物体通过检查对象散射并落在成像单元上。

2. 发明申请

WO2009104876A3 OPTICAL INSPECTION SYSTEM, AND AN INSPECTION METHOD FOR INSPECTING OBJECTS IN WHICH THE SAID SYSTEM IS USED 审中-公开
标题翻译：光学检测系统和用于检查使用该系统的对象的检查方法
公开(公告)号：WO2009104876A3
公开(公告)日：2009-11-05
申请号：PCT/KR2009000602
申请日：2009-02-10
申请人： SNU PRECISION CO LTD , PARK HEUI JAE , LEE IL HWAN , KANG SUNG BUM
发明人： PARK HEUI JAE , LEE IL HWAN , KANG SUNG BUM
IPC分类号： G01B11/24
CPC分类号： G01B11/245 , G01N21/89
摘要： The present invention concerns an optical inspection system for inspecting diverse inspection objects, and it concerns an inspection method for inspection objects in which the said system is used. The system of the present invention comprises: a work-piece stage having a table on which is placed an inspection object; a plurality of linescan cameras; and a computer for processing scanned images of inspection objects. The upper surface of the table is provided with a plurality of markings having marking stage coordinate values in such a way as to allow the acquisition of a scanned image by means of the linescan cameras. Among the markings, two markings which are adjacent to each other are located within the respective fields of vision of the linescan cameras. Among the markings, the markings between the first marking and the final marking are respectively located in such a way as to overlap within the fields of vision of two linescan cameras which are adjacent to each other among the plurality of linescan cameras. When the inspection method of the present invention is employed, markings image coordinate values and work-piece image coordinate values are used to calculate work-piece image - stage coordinate values from work-piece image coordinate values, and a decision is made that the inspection object is acceptable if the work-piece image - stage coordinate values satisfy the permissible error with respect to the work-piece stage coordinate values.
摘要翻译：本发明涉及用于检查各种检查对象的光学检查系统，并且涉及其中使用所述系统的检查对象的检查方法。本发明的系统包括：工件台，具有在其上放置检查对象的工作台; 多个线扫描相机; 和用于处理检查对象的扫描图像的计算机。桌子的上表面设置有多个具有标记台坐标值的标记，以允许借助线扫描相机获取扫描图像。在这些标记中，彼此相邻的两个标记位于线扫描相机的相应视野内。在这些标记中，第一标记和最终标记之间的标记分别位于在多个线扫描相机中彼此相邻的两个线扫描相机的视场内重叠的位置。当采用本发明的检查方法时，使用标记图像坐标值和工件图像坐标值从工件图像坐标值计算工件图像阶段坐标值，并且做出检查如果工件图像 - 阶段坐标值满足相对于工件阶段坐标值的允许误差，则该目标是可接受的。

3. 发明申请

WO2009028811A8 APPARATUS FOR MEASURING THREE-DIMENSIONAL PROFILE USING LCD 审中-公开
标题翻译：用于使用LCD测量三维轮廓的装置
公开(公告)号：WO2009028811A8
公开(公告)日：2010-04-08
申请号：PCT/KR2008004652
申请日：2008-08-11
申请人： SNU PRECISION CO LTD , PARK HEUI JAE , LEE IL HWAN , CHOI SOON MIN , LEE JEONG HO
发明人： PARK HEUI JAE , LEE IL HWAN , CHOI SOON MIN , LEE JEONG HO
IPC分类号： G01B11/24
CPC分类号： G01B11/2518
摘要： Provided is an apparatus for measuring a three-dimensional profile using a LCD in which a sine wave pattern is formed on a measurement object, whereby image information of the measurement object is obtained using the sine wave pattern and a camera, and the image information is analyzed to measure a profile of the measurement object, the apparatus including a LCD projector including: a light source irradiating light forward; a LCD panel disposed at a front side of the light source, generating a sine wave pattern having a plurality of phases and a plurality of periods; polarization plates respectively disposed on front and rear sides of the LCD panel; a first focusing lens disposed apart from a front side of the LCD panel, focusing the sine wave pattern generated by the LCD panel on the measurement object; and a housing supporting the light source, the LCD panel, the polarization plates and the first focusing lens.
摘要翻译：本发明提供一种使用在测量对象上形成正弦波图案的LCD来测量三维轮廓的装置，由此利用正弦波图形和照相机获得测量对象的图像信息，并且图像信息是分析以测量测量对象的轮廓，该装置包括一个LCD投影仪，其包括：向前照射光的光源; 设置在所述光源的前侧的LCD面板，产生具有多个相位和多个周期的正弦波图案; 分别设置在LCD面板的前侧和后侧的偏振板; 第一聚焦透镜，其与LCD面板的前侧分离，将由LCD面板产生的正弦波图案聚焦在测量对象上; 以及支撑光源，LCD面板，偏振板和第一聚焦透镜的壳体。

4. 发明申请

WO2009102126A3 ULTRA-HIGH PRECISION POSITIONING DEVICE AND A METHOD THEREFOR 审中-公开
标题翻译：超高精度定位装置及其方法
公开(公告)号：WO2009102126A3
公开(公告)日：2009-10-22
申请号：PCT/KR2009000584
申请日：2009-02-06
申请人： SNU PRECISION CO LTD , PARK HEUI JAE , AHN WOO JUNG , KIM SOUK
发明人： PARK HEUI JAE , AHN WOO JUNG , KIM SOUK
IPC分类号： G05D3/12
CPC分类号： G01Q10/04 , B82Y35/00 , G05B2219/41105 , G05B2219/45182
摘要： The invention discloses an ultra-high precision positioning device capable of controlling a micro-movement of micrometres or less with a dual system comprising coarse and fine controls, and a method therefor. The ultra-high precision positioning device according to the invention comprises a micro-actuator, a controller, a first DAC, a second DAC and an adder. The micro-actuator actuates, under the coarse control, a coarse control range between the start point and the end point, and actuates, under the fine control, a fine control range included in the coarse control range. The controller outputs a first digital signal for the coarse control of the micro-actuator and a second digital signal for the fine control of the micro-actuator. The first DAC converts the first digital signal by a first resolution to output a first analog signal, and the second DAC converts the second digital signal by a second resolution to output a second analog signal. The adder outputs a third analog signal for actuating the micro-actuator, and inputs the third analog signal to the micro-actuator.
摘要翻译：本发明公开了一种超高精度定位装置及其方法，该超高精度定位装置能够通过包括粗细和精细控制的双重系统来控制微米或更小的微移动。根据本发明的超高精度定位装置包括微致动器，控制器，第一DAC，第二DAC和加法器。微型致动器在粗略控制下致动起始点和终点之间的粗略控制范围，并且在精细控制下致动包括在粗调控制范围内的精细控制范围。控制器输出用于微致动器的粗略控制的第一数字信号和用于微致动器的精细控制的第二数字信号。第一DAC将第一数字信号转换为第一分辨率以输出第一模拟信号，并且第二DAC将第二数字信号转换为第二分辨率以输出第二模拟信号。加法器输出用于致动微致动器的第三模拟信号，并将第三模拟信号输入到微致动器。

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