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    • 2. 发明申请
    • AN INTERFEROMETRIC MICROSCOPY ARRANGEMENT WITH A POINT-LIKE BEAM SPLITTING LAYER
    • 具有点状束分裂层的干涉仪显微镜安排
    • WO2018007101A1
    • 2018-01-11
    • PCT/EP2017/064213
    • 2017-06-12
    • SIEMENS HEALTHCARE GMBH
    • SCHICK, AntonHAYDEN, OliverSCHMIDT, Oliver
    • G03H1/04G01B9/021G01B9/02G01N21/45G02B21/36G02B21/00G01B9/04G03H1/00
    • G01B9/04G01B9/02001G01B9/02034G02B21/0056G02B21/361G02B27/108G03H1/0443G03H1/0493G03H2001/005G03H2001/0445
    • An interfere) metric microscopy arrangement (1) is presented having an objective lens (20) that receives a light beam (9) emerging after sample interaction, wherefrom the light beam (9) is received by a beam splitter unit (30), positioned at a focal length (22) of the objective lens (20), the beam splitter unit (30) having a transparent substrate (32) and a point-like beam-splitting layer (34) that splits a part of the light beam (9) into a spatially filtered reference beam (40) and an object beam (50). Thereafter, a reference beam tube lens (60) and an object beam tube lens (70) receive the reference (40) and the object (50) beams, respectively. A beam combiner unit (80) having a transparent substrate (82) and a beam-combining layer (84) receives the reference (40) and the object (50) beams from the reference (60) and the object (70) beam tube lenses, respectively, and combines the reference (40) and the object (50) beams to form pattern-generating beam (99) directed towards the optical detector (90) to form an interference pattern thereon.
    • 提供具有物镜(20)的干涉)度量显微镜装置(1),所述物镜(20)接收在样品相互作用之后出现的光束(9),其中光束(9) (30),所述分束器单元(30)具有透明衬底(32)和点状分束层(34),所述点分束器单元(30)位于所述物镜(20)的焦距(22) 将光束(9)的一部分分成空间滤波的参考光束(40)和物体光束(50)。 之后,参考光束管透镜(60)和物镜光管透镜(70)分别接收参考光束(40)和物体(50)光束。 具有透明衬底(82)和光束组合层(84)的光束组合器单元(80)接收来自参考(60)和物体(70)光束管的参考物体(40)和物体(50) (40)和物体(50)光束组合以形成指向光学检测器(90)的图案生成光束(99)以在其上形成干涉图案。
    • 6. 发明申请
    • AN INTERFEROMETRIC MICROSCOPY ARRANGEMENT FOR INSPECTING A SAMPLE USING TWO ILLUMINATION SOURCES
    • 用于使用两个照明源检查样品的干涉显微镜装置
    • WO2017041841A1
    • 2017-03-16
    • PCT/EP2015/070627
    • 2015-09-09
    • SIEMENS HEALTHCARE GMBH
    • SCHICK, AntonHAYDEN, OliverSCHMIDT, Oliver
    • G02B21/16G02B21/18G01B9/02
    • G02B21/18G01B9/02007G01B9/02024G01B9/02027G01B9/02097G02B21/16
    • An interferometric microscopy arrangement for inspecting a sample includes a first illumination source providing a collimated first light beam, a second illumination source providing a second light beam focused onto the sample, a selection filter, an interferometric unit and an optical detector system. The selection filter directs the first and the second light beam towards the sample. The first and the second light beams after sample interaction are received by the interferometric unit. The interferometric unit generates from the first light beam a first object beam and a first reference beam, filters out object information from the first reference beam. The interferometric unit directs the first object beam, the first reference beam, and the second light beam towards the optical detector system. The optical detector assembly detects an interference pattern formed from the first light beam and also detects an optical pattern formed from the second light beam.
    • 用于检查样本的干涉式显微镜装置包括提供准直的第一光束的第一照明源,提供聚焦到样本上的第二光束的第二照明源,选择滤光器,干涉测量单元和光学检测器系统。 选择滤波器将第一和第二光束导向样品。 样品相互作用后的第一和第二光束被干涉仪接收。 该干涉单元从第一光束产生第一物体光束和第一参考光束,从第一参考光束滤出物体信息。 干涉测量单元将第一物体光束,第一参考光束和第二光束引导到光学检测器系统。 光检测器组件检测由第一光束形成的干涉图案,并且还检测由第二光束形成的光学图案。
    • 10. 发明申请
    • A TECHNIQUE FOR ILLUMINATING A SAMPLE TO BE INSPECTED BY INTERFEROMETRIC MICROSCOPY
    • 用于通过干涉显微镜检查样品的技术
    • WO2017041843A1
    • 2017-03-16
    • PCT/EP2015/070630
    • 2015-09-09
    • SIEMENS HEALTHCARE GMBH
    • SCHICK, AntonHAYDEN, OliverSCHMIDT, Oliver
    • G02B21/08G02B21/14G01B9/02G01B9/04
    • G02B21/08G01B9/04G02B21/14
    • A condenser lens, and an interferometric microscopy arrangement based on the condenser lens and a method based on the condenser lens are presented. The condenser lens shines a light beam from an illumination source onto a sample that is to be inspected by an interferometric microscopy device. The light beam from the illumination source has a first wavefront. The condenser lens includes a non-condensing region and a condensing region. The non-condensing region receives a first part of the light beam from the illumination source and transmits the first part towards the sample. The first part of the light beam so transmitted has the first wavefront. The condensing region receives a second part of the light beam from the illumination source and transmits the second part towards the sample. The second part of the light beam so transmitted has a second wavefront. The first wavefront is different from the second wavefront.
    • 提出了一种聚光透镜,以及基于聚光透镜的干涉式显微镜装置以及基于聚光透镜的方法。 聚光镜将来自照明源的光束照射到由干涉式显微镜装置检查的样品上。 来自照明源的光束具有第一波前。 聚光透镜包括非冷凝区域和冷凝区域。 非冷凝区域接收来自照明源的光束的第一部分,并将第一部分朝向样品传送。 所传输的光束的第一部分具有第一波前。 聚光区域接收来自照明源的光束的第二部分,并将第二部分透射到样品。 所传输的光束的第二部分具有第二波前。 第一个波前与第二个波阵面不同。