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    • 6. 发明公开
    • DURCH FELDEFFEKT STEUERBARES HALBLEITERBAUELEMENT
    • EP0913000A1
    • 1999-05-06
    • EP98906848.0
    • 1998-01-27
    • SIEMENS AKTIENGESELLSCHAFT
    • PFIRSCH, FrankWERNER, WolfgangHIRLER, Franz
    • H01L29
    • H01L29/0847H01L29/0619H01L29/0623H01L29/7395
    • Disclosed is a new planar technology IGBT, wherein minority charge carrier density on the cathode side of the IGBT is increased by introducing a shielding zone (13) which is arranged around a base zone (5), thereby leading to reduced conducting-state voltage (VCESat). As a result of the drift field arising from the concentration gradient between the shielding zone (13) and the base zone (6), the inner zone (2) no longer acts as a drain for the minority charge carriers. In order to prevent a reduction in the IGBT breakdown voltage by introducing the shielding zone (13), an unconnected, floating, high-conductivity area is provided in the inner zone, wherein the lower edge (16) of said area is located further inside the inner zone(2) than the upper edge (14) of the shielding zone (13). The unconnected floating area provides a different type of conduction from the shielding zone and the inner zone (2).
    • 公开了一种新的平面技术IGBT,其中通过引入布置在基极区(5)周围的屏蔽区(13)来增加IGBT的阴极侧上的少数电荷载流子密度,由此导致减小的导电状态电压( VCESAT)。 由于屏蔽区(13)和基极区(6)之间的浓度梯度引起的漂移场,内部区(2)不再作为少数电荷载流子的漏极。 为了防止通过引入屏蔽区域(13)降低IGBT击穿电压,在内区域中提供未连接的浮动的高导电率区域,其中所述区域的下边缘(16)进一步位于内部区域 内区(2)比屏蔽区(13)的上边缘(14)更小。 未连接的浮动区域为屏蔽区和内区(2)提供了不同类型的传导。