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    • 3. 发明专利
    • Confocal displacement sensor
    • JP2004101532A
    • 2004-04-02
    • JP2003320137
    • 2003-09-11
    • Siemens Agシーメンス アクチエンゲゼルシヤフトSiemens Aktiengesellschaft
    • SCHICK ANTON
    • G01B11/00G01B11/02G01C3/06
    • G01B11/026G01B2210/50G02B21/0064
    • PROBLEM TO BE SOLVED: To eliminate the necessity for relative movement between a sensor and a surface spot and for mechanical movement of an optical element of the sensor, for the interval measurement between the sensor and the surface spot, in the sensor for high-speed optical displacement measurement according to the confocal imaging principle.
      SOLUTION: The confocal sensor has a light source for emitting illumination light having various spectral components and an imaging optical system. The illumination light is oriented on the surface of an object to be measured by the imaging optical system. It is constituted so that different spectral components of the illumination light converge at various different intervals from the imaging optical system, on the basis of chromatic aberration of the imaging optical system. The confocal displacement sensor has a beam splitter so that the measurement light at least partly reflected from the surface is spatially separated from the beam route of the illumination light and a light receiver for detecting the measurement light spatially separated from the beam route of the illumination light, using spectrum resolution. Further, the confocal displacement sensor has an evaluation unit, and is constituted so that the interval between the sensor and the surface is obtained, from the light intensity of the measurement light detected per each different spectral component.
      COPYRIGHT: (C)2004,JPO
    • 4. 发明申请
    • MEASURING DEPTH OF A SURFACE OF A TEST OBJECT
    • DEEP确定表面检查对象
    • WO2015155000A2
    • 2015-10-15
    • PCT/EP2015056322
    • 2015-03-25
    • SIEMENS AG
    • SCHICK ANTONRENTSCHLER PETER
    • G01B11/25
    • G01B11/2509G01B11/22
    • The invention relates to a method for measuring the depth of a surface of a test object. According to said method, a colored fringe pattern formed by a sequence of colored fringes (4) is projected onto a surface of the test object, and a fringe pattern (7) reflected by the surface of the test object is detected and evaluated by means of an evaluation device, the colored fringe pattern and the evaluation device being designed such that the depth of the surface of the test object is measured based on the sequence of colored fringes (4) of the reflected fringe pattern (7) and based on a sequence of fringe (5) widths of the reflected fringe pattern (7).
    • 它提出了一种用于在其中的彩色条纹的序列(4)形成的着色条纹图案被投射到测试对象的表面上的测试对象的表面的深度确定的方法,其中,检测光从所述测试对象的条纹图案的表面反射的(7)和 由评估装置,其中,所述彩色条纹图案,并且所述评估装置被设计成来评价由反射条纹图案(7)的彩色条纹(4)序列的装置和由所述条带的宽度的序列的装置的深度确定所述测试对象的表面(5)的 进行反射的条纹图案(7)的。
    • 8. 发明申请
    • SENSOR DEVICE FOR PERFORMING RAPID OPTICAL MEASUREMENT OF DISTANCES ACCORDING TO THE CONFOCAL OPTICAL IMAGING PRINCIPLE
    • 传感器装置用于快速光学距离测量之后共焦光学图像原理
    • WO02097364A8
    • 2003-02-27
    • PCT/DE0201748
    • 2002-05-15
    • SIEMENS AGSCHICK ANTON
    • SCHICK ANTON
    • G01B11/00G01B11/02G01B11/06G01B11/24G02B21/00
    • G01B11/026G01B11/0608
    • The invention relates to a sensor device for performing rapid optical measurement of distances according to the confocal optical imaging principle in order to determine distance values and/or height values of a surface. The sensor device comprises a point-shaped light-emitting element that is arranged on an optical axis, a reflector, which is arranged perpendicular to the optical axis and which can be displaced along the optical axis, imaging optics centered with regard to the optical axis, and a point-shaped light-receiving element that is situated at the same location as the light-emitting element. The components of the sensor device are arranged in such a manner that: light emitted by the light-emitting element is reflected by the reflector; while the reflector is displaced, the imaging optics focus the light reflected by the reflector at least once onto the surface to be measured; the focussed light is at least partially backscattered by the surface to be measured, and; while the reflector is displaced, the imaging optics focus, via the reflector, the backscattered light at least once onto the light-receiving element.
    • 根据用来确定一个表面的距离和/或高度值,包括设置在光轴的点状发光元件上的阀的共焦成像原理为快速光学距离测量传感器装置,一个竖直地布置于反射器的光轴,其为沿光轴移动, 居中于光轴布置的成像光学器件和一个点状的受光元件,其位于同一地点作为发光元件。 所述传感器装置的部件被布置为使得从所述发光元件发射的光被反射器反射,使得由反射器反射的光至少一次聚焦由所述摄像光学系统到所述表面的反射器,所述聚焦的移动的过程中被测量 光被散射从表面背面进行测量时,至少部分地,并且所述反向散射光由成像光学系统通过所述反射器的光接收元件上的反射器的运动过程中集中,至少一次。