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1. 发明专利

JPS57195753A BATCH-WISE CONTINUOUS TYPE VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195753A
公开(公告)日：1982-12-01
申请号：JP8235881
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： UENO SUSUMU , KAMATA HIDEAKI , IMADA KIYOSHI , HATA YOSHITADA , TOUKAI MASAYA , KATOU KENICHI
IPC分类号： C23C14/20 , C08J7/00 , C08J7/04 , C23C14/56
摘要： PURPOSE:To make the titled apparatus for performing a plasma treatment, sputtering treatment, etc. on a plastics possible to conduct a batch-wise continuous vacuum treatment, by arranging, before and after vacuum treatment tanks, preliminary vacuum chambers each having a sealing mechanism, and further arranging, before these apparatus, a vacuum chamber including a payoff, and after said apparatuses, a vacuum chamber including a winder. CONSTITUTION:A preliminary vacuum chamber 2 having a pair of upper and lower sealing rolls is positioned before the vacuum treatment tank 101 for continuously performing a surface treatment on a flexible workpiece F under a vacuum, and a preliminary vacuum chamber 3 similar to the chamber 2 is positioned after the vacuum treatment tank 102 having the same function as that of the tank 101, both the tanks 101, 102 being evacuated via exhaust pipes 5, 6. After the completion of treatment, the vacuum in the vacuum chamber 103 including a payoff and the vacuum chamber 104 including a winding is released, the treated workpiece is taken out from the chamber 104 while a next workpiece is put into the chamber 103. Then again the both chambers are evacuated to be prepared for the next treatment. In this arrangement, since the vacuum treatment tanks 101, 102 are kept vacuum, batches can be continuously treated with less waiting period.

2. 发明专利

JPS57195743A SEALING DEVICE IN CONTINUOUS VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195743A
公开(公告)日：1982-12-01
申请号：JP8089781
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： F16C13/00 , B29C37/00 , B29C59/14 , C08J7/00 , C23C14/56
摘要： PURPOSE:To improve service durability of seal roll and ripple members, by using a pair of seal rolls made of metal in a sealing device for preliminary vacuum chamber. CONSTITUTION:The sealing device consists of a pair of seal rolls 16, 17 installed in preliminary vacuum chambers 2, 3 located in front and in the rear of vacuum treating chambers 1 and ripple members 19 abutted in the axial direction on both sides of the rolls (F indicates workpiece such as plastic film) and the seal rolls are made of metal (e.g. nickel/chrome steel, nickel/molybdenum steel). Thus frictional force between the seal roll and the ripple member is reduced and service durability of both component parts is improved.

3. 发明专利

JPS57199749A MEANDERING CORRECTION DEVICE OF WORK OBJECT 失效
公开(公告)号：JPS57199749A
公开(公告)日：1982-12-07
申请号：JP8089281
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： B65H23/038 , B65H23/02
摘要： PURPOSE:To correct meandering without stopping operations by supporting one end of the shaft of a conveyance roller as rotatable and fitting an eccentric bearing cartridge to the other end of the shaft. CONSTITUTION:In a vacuum process chamber 1 of a flexible work object (not shown in the figure), one end side of a guide roller 18 guiding the work object is supported as rotatable by means of a spherical bearing 20 fixed to the process chamber 1, and the other end side is supported to an eccentric bearing cartridge 24 inserted into a side plate 21 by means of a spherical bearing 23. At this time, the center position A of the cartridge 24 is off-centered in relation to the center position B of the roller 18 so that the roller 18 is capable of moving in all directions. If the work object moves in zigzag, the cartridge 24 is rotated with an operation lever (not shown in the figure), and the roller 18 is moved toward the correct direction, then the cartridge 24 is rotated in the reverse direction, bringing the roller 18 to a fixed position.

4. 发明专利

JPS57195755A CONTINUOUS ULTRAVIOLET TREATMENT APPARATUS 失效
公开(公告)号：JPS57195755A
公开(公告)日：1982-12-01
申请号：JP8235981
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： UENO SUSUMU , KAMATA HIDEAKI , IMADA KIYOSHI , HATA YOSHITADA , TOUKAI MASAYA , KATOU KENICHI
IPC分类号： C08J7/00
摘要： PURPOSE:To make possible various continuous treatments to be varied stepwise so that an elongated item can be continuously and efficiently treated, by providing sealing mechanisms and spare chambers, in said spare chambers the atmospheres can be arbitrarily chosen, before and after an ultraviolet treatment tank. CONSTITUTION:The titled apparatus includes an ultraviolet treatment tank 101 including ultraviolet lamps 104 therein and spare chambers 2, 3 positioned before and after the tank 101 and each comprising sealing mechanisms including housings and pairs of upper and lower rolls. The ultraviolet lamps 104 in the ultraviolet treatment tank 101 that irradiate with ultraviolet light a workpiece that has been introduced onto a rotating drum 102 by guide rolls 103 have cooling jackets therein, whose cooling action prevents the properties of the workpiece from being changed. The spare chamber is provided with upper and lower rolls 13, 14 which are integrally covered with a rubber elastomer 12, upper and lower cases 15, 16 covering them, and resilient ripple members 17, 18 that deliver the workpiece forward while retaining the atmosphere in the system.

5. 发明专利

JPS57195750A VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195750A
公开(公告)日：1982-12-01
申请号：JP8090481
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： H05H1/24 , B29C59/14 , C08J7/00
摘要： PURPOSE:To prevent a workpiece from being distorted by heat and the treatment effect from being scattered in the titled apparatus for subjecting a plastic to a plasma treatment, by arranging, in a vacuum treatment chamber, rod- like anodes and a drum cathode provided with passages for a medium for adjusting temperature so that the temperature of the drum cathode is kept constant. CONSTITUTION:In the titled apparatus equipped with the drum cathode 16 and the rod-like anodes 17 in the vacuum treatment chamber 1, the cathode 16 is formed into a cylinder having a thick wall where the medium passages 21 for adjusting temperature are drilled to extend axially. The cathode 16 is cooled by a medium, for example, water supplied into the medium passages 21 from outside. After the vacuum treatment chamber 1 is held at a prescribed vacuum, when plasma discharge is generated between the cathode 16 and the anodes 17, plasma treatment is carried out onto the surface of a workpiece F. As the temperature of the cathode 16 is kept constant, uneven treatment of the workpiece F can be avoided.

6. 发明专利

JPS57195748A CONTINUOUS VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195748A
公开(公告)日：1982-12-01
申请号：JP8090281
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： F16C13/00 , B29C37/00 , B29C59/14 , C08J7/00 , C23C14/56
摘要： PURPOSE:To prevent thermal deformation of workpiece and eliminate variability of the processing effect, by providing a flow path for a temperature controlling medium extending in the axial direction through one of a pair of seal rolls arranged in the direction of passage of the workpiece. CONSTITUTION:Sealing between upper and lower seal rolls 10, 11 is accomplished by pressing the upper roll 10 against the lower roll 11 with the workpiece interposed between them. Sealing between the rolls and ripple members 13 is done by pressing the ripple members against the rolls. Sealing between the rolls and side pieces 14 is effected by pressing the side pieces against casing 12 by means of spring, etc. Thus generation of heat due to friction of seal rolls is prevented, for the roll 11 is constanly supplied with water through rotary joint 18 and flow path 16 for temperature controlling medium.

7. 发明专利

JPS57195744A SEALING DEVICE IN CONTINUOUS VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195744A
公开(公告)日：1982-12-01
申请号：JP8089881
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： F16C13/00 , B01J3/02 , B29C37/00 , B29C59/14 , B29C71/04 , C08J7/00 , C23C14/56
摘要： PURPOSE:To improve service durability of seal rolls and ripple members constituting a sealing device for preliminary vacuum chambers, by affixing the ripple members in such a manner that they may be readily separated from the seal rolls by the difference between pressures within and outside the unit. CONSTITUTION:The sealing device consists of a pair of seal rolls 16, 17 and ripple members 20, 21 affixed in the axial direction on both sides of the seal rolls (F indicates workpiece such as plastic film). The ripple members are made of elastomer (e.g. urethane rubber) and are bent at the end for higher elasticity (18 and 19 indicate casing of preliminary vacuum chamber). They are affixed in such a manner that they may be readily separated from seal rolls 16, 17 by the difference in pressure between atmosphere side and vacuum side (i.e. pressure A-C or C-B). Thus excessive pressing force is removed and frictional resistance is lowered between the seal roll and the ripple member, resulting in improved service durability of the both component parts.

8. 发明专利

JPS57195742A VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195742A
公开(公告)日：1982-12-01
申请号：JP8089681
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： C23F4/00 , B29C59/14 , C08J7/00 , C23C14/56 , H01J37/32
摘要： PURPOSE:To provide a compact vacuum treatment apparatus capable of effecting simultaneous double-side treatment of workpiece in a single vacuum treating chamber, by installing two sets of pairs of electrodes consisting of an anode and at least two cathodes in said vacuum chamber. CONSTITUTION:A workpiece F (e.g. plastic film) delivered from feeding device 8 is processed in a vacuum treating chamber 1 before it is taken up onto wind- up device 9 (2 and 3 indicate preliminary vacuum chambers). Pairs of electrodes consisting of a drum-shaped anode 16 and at least two cathodes 18 are installed in the vacuum chamber 1. (20 and 21 indicate guide rolls.) The workpiece F led into the vacuum chamber 1 undergoes plasma discharge treatment on one side with lower pairs of electrodes and then on the other side with lower pairs of electrodes. Thus double-sides treatment is accomplished effectively in a single process.

9. 发明专利

JPS57195740A CONTINUOUS VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195740A
公开(公告)日：1982-12-01
申请号：JP8089481
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： F16C13/00 , B29C37/00 , B29C59/14 , C08J7/00 , C23C14/56
摘要： PURPOSE:To improve service durability of seal rolls and ripple members for preliminary vacuum chamber, using highly abrasion-resistant materials as ripple seals to be abutted to the rolls in serial positions in the axial direction. CONSTITUTION:The titled apparatus is a vacuum plasma treating equipment for plastic molding consisting of a vacuum treating chamber 1 and preliminary vacuum chambers 2, 3 equipped with at least two pairs of seal rolls 16, 17 in the direction of passage of molding, with the ripple members 19 abutted to the rolls in the axial direction. The rolls 16, 17 are made of metal and the upper roll 16 is covered with an elastomer body 20 such as silicone rubber. Sealing is accomplished by pressing the elastomeric covering 20 of the upper roll 16 against the lower roll 17 with a workpiece F interposed between them. Thus good sealing of the two rolls is insured and frictional force and consequently frictional resistance between the seal roll 16 and the ripple members 19 are reduced, leading to improved service durability of the seal roll 16 and the ripple members 19.

10. 发明专利

JPS57195736A VACUUM TREATMENT APPARATUS 失效
公开(公告)号：JPS57195736A
公开(公告)日：1982-12-01
申请号：JP8088981
申请日：1981-05-29
申请人： SHINETSU CHEM IND CO , HITACHI LTD
发明人： IMADA KIYOSHI , UENO SUSUMU , KAMATA HIDEAKI , TOUKAI MASAYA , HATA YOSHITADA , KATOU KENICHI
IPC分类号： H05H1/24 , C08J7/00 , H05H1/22
摘要： PURPOSE:To reduce the time for attaining a required degree of vacuum of a vacuum treating chamber, by providing a by-pass circuit for using a main pump at an initial evacuating stage and using both main and booster vacuum pumps when approaching to the required degree of vacuum. CONSTITUTION:In an apparatus by which a plastic molded product, e.g., vinyl chloride resin film, is treated by plasma in a vacuum chamber, at initial stage evacuation is carried out by a pump 4 through a by-pass circuit 22 by opening a valve 23 in the circuit 22. When a degree of vacuum of the chamber 1 approaches to the required value, a booster pump 21 begins to operate and the valve 23 in the by-pass circuit 22 is closed. When a degree of vacuum of the chamber 1 reached required value and ready for treating the molded product, both main and booster pumps are allowed to operate for evacuation, thus reducing the time of evacuation remarkably.

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