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1. 发明授权

US09403620B2 Silica container and method for producing the same 有权
标题翻译：二氧化硅容器及其制造方法
公开(公告)号：US09403620B2
公开(公告)日：2016-08-02
申请号：US13861700
申请日：2013-04-12
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata , Tomomi Usui
IPC分类号： B65D13/02 , C03B19/09 , C30B15/10 , C30B29/06 , C30B35/00
CPC分类号： B65D13/02 , C03B19/095 , C03B2201/54 , C03C3/06 , C03C2201/54 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57
摘要： A silica container contains a substrate having a rotational symmetry, containing mainly a silica, and gaseous bubbles in a peripheral part of the substrate; a transparent silica glass in an inner peripheral part of the substrate; and an inner layer, formed on an inner surface of the substrate and containing a transparent silica glass; wherein the substrate contains Li, Na, and K in a total concentration of 50 or less ppm by weight; the substrate has a linear light transmittance of 91.8% to 93.2% at a light wavelength of 600 nm; the inner layer contains Li, Na, and K in a total concentration of 100 or less ppb by weight and at least one of Ca, Sr, and Ba in a total concentration of 50 to 2000 ppm by weight; and the inner layer has a linear light transmittance of 91.8% to 93.2% at a light wavelength of 600 nm.
摘要翻译：二氧化硅容器包含具有旋转对称性的基材，主要含有二氧化硅，并且在基板的周边部分含有气泡; 在基板的内周部分中的透明石英玻璃; 以及形成在所述基板的内表面上并且包含透明石英玻璃的内层; 其中所述基材含有总重量为50重量％以下的Li，Na和K; 基板在600nm的光波长下的线性透光率为91.8％〜93.2％内层含有总重量为100重量％以下的Li，Na和K，总重量为50〜2000重量ppm的Ca，Sr，Ba中的至少一种。并且内层在600nm的光波长下的线性透光率为91.8％〜93.2％。

2. 发明授权

US09145325B2 Silica container and method for producing the same 有权
标题翻译：二氧化硅容器及其制造方法
公开(公告)号：US09145325B2
公开(公告)日：2015-09-29
申请号：US14304530
申请日：2014-06-13
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata , Tomomi Usui
IPC分类号： C03B19/09 , C30B15/10 , C30B29/06 , C30B35/00
CPC分类号： C03B19/095 , C03B2201/07 , C03B2201/075 , C03B2201/32 , C30B15/10 , C30B29/06 , C30B35/002 , Y10T428/131 , Y10T428/1317 , Y10T428/2982
摘要： A method for producing a silica container having a rotational symmetry includes forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.
摘要翻译：制造具有旋转对称性的二氧化硅容器的方法包括通过将粉末状基材的原料供给到具有旋转框架的具有抽吸孔的外框架的内壁，并形成二氧化硅基板来形成预成型品。从外周侧抽吸预成型品，通过从外部框架内部充填从O 2气体和惰性气体构成的气体混合物从外部框架内的气体通风来控制外框内的湿度，通过除湿规定的露点温度，同时用碳电极通过放电加热熔融法从预成型体内部加热，由此使预成型体的外周部分成为烧结体，而内部周边部分为熔融玻璃体。

3. 发明申请

US20130248408A1 SILICA CONTAINER AND METHOD FOR PRODUCING THE SAME 审中-公开
标题翻译：二氧化硅容器及其制造方法
公开(公告)号：US20130248408A1
公开(公告)日：2013-09-26
申请号：US13861700
申请日：2013-04-12
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata , Tomomi Usui
IPC分类号： B65D13/02
CPC分类号： B65D13/02 , C03B19/095 , C03B2201/54 , C03C3/06 , C03C2201/54 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57
摘要： A silica container contains a substrate having a rotational symmetry, containing mainly a silica, and gaseous bubbles in a peripheral part of the substrate; a transparent silica glass in an inner peripheral part of the substrate; and an inner layer, formed on an inner surface of the substrate and containing a transparent silica glass; wherein the substrate contains Li, Na, and K in a total concentration of 50 or less ppm by weight; the substrate has a linear light transmittance of 91.8% to 93.2% at a light wavelength of 600 nm; the inner layer contains Li, Na, and K in a total concentration of 100 or less ppb by weight and at least one of Ca, Sr, and Ba in a total concentration of 50 to 2000 ppm by weight; and the inner layer has a linear light transmittance of 91.8% to 93.2% at a light wavelength of 600 nm.
摘要翻译：二氧化硅容器包含具有旋转对称性的基材，主要含有二氧化硅，并且在基板的周边部分含有气泡; 在基板的内周部分中的透明石英玻璃; 以及形成在所述基板的内表面上并且包含透明石英玻璃的内层; 其中所述基材含有总重量为50重量％以下的Li，Na和K; 基板在600nm的光波长下的线性透光率为91.8％〜93.2％内层含有总重量为100重量％以下的Li，Na和K，总重量为50〜2000重量ppm的Ca，Sr，Ba中的至少一种。并且内层在600nm的光波长下的线性透光率为91.8％〜93.2％。

4. 发明授权

US09382640B2 Single crystal silicon pulling silica container and manufacturing method thereof 有权
标题翻译：单晶硅拉硅胶容器及其制造方法
公开(公告)号：US09382640B2
公开(公告)日：2016-07-05
申请号：US14004085
申请日：2012-10-02
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata
IPC分类号： C30B15/10 , C03C3/06 , C03B19/09 , C03C17/00 , C03C17/02 , C30B15/02 , C30B29/06
CPC分类号： C30B15/10 , C03B19/095 , C03C3/06 , C03C17/004 , C03C17/02 , C03C2201/30 , C03C2203/10 , C30B15/02 , C30B29/06 , Y02P40/57 , Y10T117/1032
摘要： The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.
摘要翻译：本发明提供一种单晶硅拉硅石容器，其包括由含有气泡的不透明石英玻璃制成的外层和由实质上不含有气泡的透明石英玻璃制成的内层; 所述容器还包括：底部，弯曲部分和直体部分，其中在所述内层的表面上从所述底部的至少一部分到所述直体部分的至少一部分通过所述内部部分形成连续的凹槽弯曲部分。结果，提供了可以减少拉制的单晶硅中的称为空洞或针孔的缺陷的单晶硅拉硅
石容器以及这种二氧化硅容器的制造方法。

5. 发明申请

US20150114284A1 SILICA CONTAINER FOR PULLING SINGLE CRYSTAL SILICON AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：用于拉伸单晶硅的硅砂容器及其制造方法
公开(公告)号：US20150114284A1
公开(公告)日：2015-04-30
申请号：US14398880
申请日：2014-03-25
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata
IPC分类号： C03B19/09 , C30B15/10
CPC分类号： C03B19/095 , C03B2201/03 , C03B2201/04 , C30B15/10 , C30B29/06 , C30B35/002 , Y10T117/1032
摘要： The present invention provides a silica container for pulling single crystal, the container having a straight body portion, a curved portion, and a bottom portion, wherein an outer side of the container is made of opaque silica glass containing bubbles, and an inner side of the container is made of transparent silica glass, and a mixed silica layer in which a phase in which a crystalline silica powder is fused and a phase in which an amorphous silica powder is fused are mixed in a granular texture is provided on at least an inner surface layer portion of the straight body portion. As a result, there is provided the silica container for pulling single crystal silicon which can suppress melt surface vibration of a silicon melt in the silica container at a high temperature.
摘要翻译：本发明提供一种用于牵引单晶的二氧化硅容器，容器具有直的主体部分，弯曲部分和底部，其中容器的外侧由含有气泡的不透明的石英玻璃制成，内侧该容器由透明的二氧化硅玻璃制成，并且在至少一个内部的内部设置混合二氧化硅层的混合二氧化硅层，其中结晶二氧化硅粉末熔融的相和熔融无定形二氧化硅粉末的相混合在一起，直体部的表层部。结果，提供了可以抑制二氧化硅容器中的硅熔体在高温下的熔融表面振动的用于拉出单晶硅的二氧化硅容器。

6. 发明授权

US09376761B2 Single-crystal silicon pulling silica container and method for producing the same 有权
标题翻译：单晶硅拉硅胶容器及其制造方法
公开(公告)号：US09376761B2
公开(公告)日：2016-06-28
申请号：US14006169
申请日：2012-11-08
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata
IPC分类号： C30B15/10 , C30B35/00 , C30B11/00 , C30B29/18 , C30B29/06 , C03B19/09
CPC分类号： C30B15/10 , C03B19/095 , C30B11/002 , C30B29/06 , C30B29/18 , C30B35/002 , Y02P40/57 , Y10T117/1032
摘要： The present invention is directed to a single-crystal silicon pulling silica container, the silica container including a straight body portion, a curved portion, and a bottom portion, wherein the OH group concentration in the straight body portion is 30 to 300 ppm by mass, the OH group concentration in the bottom portion is 30 ppm by mass or less, and the difference in the OH group concentration between the straight body portion and the bottom portion is 30 ppm by mass or more. As a result, a low-cost single-crystal silicon pulling silica container, the silica container that can reduce cavity defects called voids and pinholes in pulled single crystal silicon, is provided.
摘要翻译：本发明涉及一种单晶硅拉硅石容器，该二氧化硅容器包括直体部分，弯曲部分和底部，其中直体部分中的OH基浓度为30〜300质量ppm ，底部的OH基浓度为30质量ppm以下，直体部与底部之间的OH基浓度的差为30质量ppm以上。结果，提供了一种低成本的单晶硅拉硅石容器，可以减少被称为空穴的凹陷的二氧化硅容器和拉制的单晶硅中的针孔。

7. 发明授权

US08915097B2 Silica container and method for producing the same 有权
标题翻译：二氧化硅容器及其制造方法
公开(公告)号：US08915097B2
公开(公告)日：2014-12-23
申请号：US13797028
申请日：2013-03-12
申请人： Shin-Etsu Quartz Products Co., Ltd.
发明人： Shigeru Yamagata , Tomomi Usui
IPC分类号： C03B19/00 , C03B19/06 , C03C17/02 , B32B1/02 , C03B19/09 , C30B15/10 , C30B29/06 , C30B35/00
CPC分类号： C03B19/09 , C03B19/095 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57 , Y10T428/13 , Y10T428/131 , Y10T428/1317
摘要： Producing a silica container includes forming a powder mixture by adding an Al compound or a crystal nucleating agent into a first powdered raw material; preliminarily molding to an intended shape by feeding the powder mixture to an inner wall of an outer frame while rotating the outer frame having aspiration holes; forming a silica substrate; and forming a transparent silica glass layer on an inner surface of the silica substrate, wherein the preliminarily molded article is degassed by aspiration from a peripheral side and heated from inside the preliminarily molded article at high temperature making a peripheral part of the preliminarily molded article to a sintered body while an inner part to a fused glass body, and a second powdered raw material having a higher silica purity than the first powdered raw material is spread from inside the silica substrate and heated from the inside at high temperature.
摘要翻译：生产二氧化硅容器包括通过向第一粉末原料中加入Al化合物或晶体成核剂来形成粉末混合物; 通过在将具有抽吸孔的外框架旋转的同时将粉末混合物进料到外框的内壁，预先成型为预期的形状; 形成二氧化硅基板; 在二氧化硅基板的内表面上形成透明的二氧化硅玻璃层，其中预成型品通过从外周侧抽吸脱气并在高温下从预成型品内部加热，使预成型品的周边部分被加热至将熔融玻璃体的内部部分的烧结体和比第一粉末状原料高的二氧化硅纯度的第二粉末原料从二氧化硅基板的内部扩散并在高温下从内部加热。

8. 发明申请

US20140150715A1 SINGLE-CRYSTAL SILICON PULLING SILICA CONTAINER AND PRODUCING METHOD THEREOF 审中-公开
标题翻译：单晶硅拉丝二氧化硅容器及其制造方法
公开(公告)号：US20140150715A1
公开(公告)日：2014-06-05
申请号：US14234588
申请日：2013-03-18
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD.
发明人： Shigeru Yamagata
IPC分类号： C30B15/10 , C03B11/10 , C03B11/02
CPC分类号： C30B15/10 , C03B11/02 , C03B11/10 , C03B19/095 , C30B29/06 , Y02P40/57 , Y10T117/1032
摘要： A single-crystal silicon pulling silica container includes: a transparent layer made of transparent silica glass in an inner side of the silica container, and an opaque layer made of opaque silica glass containing gaseous bubbles in an outer side of the silica container, wherein the transparent layer is constituted of a high-OH group layer that is placed in an inner surface side of the silica container and contains the OH group at a concentration of 200 to 2000 ppm by mass and a low-OH group layer that has the OH group concentration lower than that of the high-OH group layer, and Ba is applied to the inner surface of the high-OH group layer at a concentration of 25 to 1000 μg/cm2.
摘要翻译：单晶硅拉硅石容器包括：在二氧化硅容器的内侧由透明石英玻璃制成的透明层和在二氧化硅容器的外侧含有气泡的不透明石英玻璃制成的不透明层，其中，透明层由置于二氧化硅容器的内表面侧且含有浓度为200〜2000质量ppm的OH基和具有OH基的低-OH基层构成的高OH基层构成浓度低于高-OH基团的浓度，Ba以25〜1000μg/ cm 2的浓度施加到高-OH基层的内表面。

9. 发明申请

US20140053772A1 SINGLE-CRYSTAL SILICON PULLING SILICA CONTAINER AND MANUFACTURING METHOD THEREOF 有权
标题翻译：单晶硅拉丝二氧化硅容器及其制造方法
公开(公告)号：US20140053772A1
公开(公告)日：2014-02-27
申请号：US14004085
申请日：2012-10-02
申请人： Shin-Etsu Quartz Products Co., Ltd.
发明人： Shigeru Yamagata
IPC分类号： C30B15/10
CPC分类号： C30B15/10 , C03B19/095 , C03C3/06 , C03C17/004 , C03C17/02 , C03C2201/30 , C03C2203/10 , C30B15/02 , C30B29/06 , Y02P40/57 , Y10T117/1032
摘要： The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.
摘要翻译：本发明提供一种单晶硅拉硅石容器，其包括由含有气泡的不透明石英玻璃制成的外层和由实质上不含有气泡的透明石英玻璃制成的内层; 所述容器还包括：底部，弯曲部分和直体部分，其中在所述内层的表面上从所述底部的至少一部分到所述直体部分的至少一部分通过所述内部部分形成连续的凹槽弯曲部分。结果，提供了可以减少拉制的单晶硅中的称为空隙或针孔的缺陷的单晶硅拉硅
石容器以及这种二氧化硅容器的制造方法。

10. 发明授权

US08915096B2 Silica container and method for producing the same 有权
标题翻译：二氧化硅容器及其制造方法
公开(公告)号：US08915096B2
公开(公告)日：2014-12-23
申请号：US13793948
申请日：2013-03-11
申请人： Shin-Etsu Quartz Products Co., Ltd.
发明人： Shigeru Yamagata , Tomomi Usui
IPC分类号： C03B19/00 , C03B19/06 , C03C17/02 , B32B1/02 , C03B19/09 , C30B15/10 , C30B29/06 , C30B35/00
CPC分类号： C03B19/09 , C03B19/095 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57 , Y10T428/13 , Y10T428/131 , Y10T428/1317
摘要： A method for producing a silica container includes forming a preliminarily molded substrate, wherein a first powdered raw material is fed to an inner wall of an outer frame having aspiration holes while rotating the outer frame; forming a preliminarily molded intermediate layer, wherein a second powdered raw material added with an aluminum compound or a crystal nucleating agent as an additive is fed to an inner wall of the preliminarily molded substrate; and forming an inner layer, wherein the preliminarily molded substrate and the preliminarily molded intermediate layer are degassed by aspiration from a peripheral side with heating from an inside forming a substrate and an intermediate layer, and a third powdered raw material having a high silica purity is spread from inside the substrate having the formed intermediate layer with heating from the inside forming an inner layer on an inner surface of the intermediate layer.
摘要翻译：一种二氧化硅容器的制造方法，其特征在于，形成预成型基板，在将外框旋转的同时，将第一粉末原料供给到具有抽吸孔的外框的内壁上; 形成预先模塑的中间层，其中添加有铝化合物或晶体成核剂作为添加剂的第二粉末原料被供给到预成型基材的内壁; 并且形成内层，其中预成型基板和预成型中间层通过从形成基板和中间层的内部的加热从外周侧抽吸而脱气，并且具有高二氧化硅纯度的第三粉末原料是从具有形成的中间层的基板的内部从内部扩散，形成中间层的内表面上的内层。

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