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    • 3. 发明专利
    • OPTICAL NONCONTACT-TYPE THICKNESS MEASURING APPARATUS
    • JPH0518716A
    • 1993-01-26
    • JP19578291
    • 1991-07-10
    • SEIDENSHA ELECTRONICS
    • YONETANI KAZUYUKIASADA YASUSHI
    • G01B11/06
    • PURPOSE:To measure the thickness of a transparent measurement object only by operation from one side with no contact. CONSTITUTION:A first converging lens 4, a second converging lens 5, and a half mirror 6 are put on an optical axis L2 to compose a co-focal point optical system. A measurement object 7 is put vertically to the optical axis L2. When laser beam is emitted from a He-Ne laser oscillator 2 of a light source 1, the laser beam is reflected by the half mirror 6 and led into the first converging lens 4 and converged to the light focusing point F4. When the converging lens 4 moves close to the measurement object 7, the light focusing point F4 moves from the obverse side H side to the reverse side B side of the measurement object 7. The reflected light, reflected by the measurement object 7, passes the first converting lens 4 and the half mirror 6 and is converged by the second converging lens 5 and in this case only the reflected light from the light focusing point F4 is converged to the light focusing point F5. Then, it passes a pin hole 8a of a light selecting plate 8 and is received by a photosensor 9. The reflected light from other points is cut by the light selecting plate 8.