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1. 发明专利

JPH08210678A TUNNEL TYPE CLEAN ROOM AIR-CONDITIONING SYSTEM 失效
公开(公告)号：JPH08210678A
公开(公告)日：1996-08-20
申请号：JP31059795
申请日：1995-11-29
申请人： SANKI ENG CO LTD
发明人： MIZUSHIMA SHIGERU , YOSHIZAKI SEISHIROU , SUGAFUJI KAZUNORI
IPC分类号： F24F7/06
摘要： PURPOSE: To permit coping with a thermal load generated locally in a tunnel type clean room by a method wherein a coil, through which refrigerant flows, is arranged in a fan filter unit, in which production facilities are positioned, while a heat exchanging unit is arranged at the outside of the tunnel type clean room. CONSTITUTION: A coil 90, through which the refrigerant of a refrigerant circulating multi-system, whose phase is changed between gas and liquid, flows, is arranged on the upper surface of a fan filter unit 30, in which production facilities 29 in a tunnel type clean room 21 are positioned On the other hand, the heat exchanging unit 92 of the refrigerant circulating multi-system or a heat exchanging unit 93 for cooling the refrigerant, whose phase is changed between gas and liquid, is arranged at the outside of the tunnel type clean room 21. The refrigerant, cooled by the heat exchanging unit 92 and whose phase is changed between gas and liquid, is circulated through the coil 90 while air, cooled by the coil 90, flows into the high-speed flow area (a) of the tunnel type clean room 21 through a high performance filter 35 by the fan filter unit 30. Accordingly, it is not required that a damper is provided in a boundary area to regulate the flow speed in a low-speed flow area.

2. 发明专利

JPH08210677A TUNNEL TYPE CLEAN ROOM 失效
公开(公告)号：JPH08210677A
公开(公告)日：1996-08-20
申请号：JP31059695
申请日：1995-11-29
申请人： SANKI ENG CO LTD
发明人： MIZUSHIMA SHIGERU , KATO AKIRA , YOSHIZAKI SEISHIROU , SUGAFUJI KAZUNORI
IPC分类号： F24F7/06
摘要： PURPOSE: To prevent the entrainment of dust, generated by workers working in a boundary area, into a high-speed flow area by a method wherein a clean room is partitioned by a hanging wall into the high-speed area and a low-speed flow area and the high-speed flow area is provided with a fan filter unit while the low-speed flow area is provided with a filter unit for clean room, which is provided with an air filter having a specified configuration. CONSTITUTION: A tunnel type clean room is partitioned by a hanging wall 32 into a high-speed flow area (a), necessitating a high degree of cleanness, a boundary area (c) and a love-speed flow area (b) while the high-speed flow area (a) is provided with a fan filter unit 43 and the low-speed flow area (b) is provided with a filter unit 39 for clean room, which is provided with an air filter 40 for clean room, whose section cut in the direction of the short diameter is provided with a substantially half elliptical configuration. In the high-speed flow area (a), high-speed laminar flow, flowing against production machines 38 installed on a floor, is formed while uniform low-speed flow is formed from the air filter 39 for clean room in the low-speed flow area (b) and the boundary area (c). Accordingly, ascending air stream will never be generated in the boundary area (c) and stabilized downward air stream can be obtained in the room.

3. 发明专利

JPH08210679A TUNNEL TYPE CLEAN ROOM AIR-CONDITIONING SYSTEM 失效
公开(公告)号：JPH08210679A
公开(公告)日：1996-08-20
申请号：JP31059995
申请日：1995-11-29
申请人： SANKI ENG CO LTD
发明人： MIZUSHIMA SHIGERU , KATO AKIRA , YOSHIZAKI SEISHIROU , SUGAFUJI KAZUNORI
IPC分类号： F24F7/06
摘要： PURPOSE: To permit coping with a thermal load, generated from production facilities, effectively by a method wherein a coil, through which refrigerant, whose phase is changed between gas and liquid, flows, is arranged in a fan filter unit, in which the production facilities are positioned, while a heat exchanging unit is arranged at the outside of the tunnel type clean room. CONSTITUTION: A coil 77, through which the refrigerant of a refrigerant circulating multi-system, whose phase is changed between gas and liquid, flows, is arranged on the upper surface of a fan filter unit 53, in which production facilities 48 in a tunnel type clean room 41 are positioned, while the heat exchanging unit 78 of a refrigerant circulating multi-system, having a heat exchanger 79 for cooling the refrigerant, whose phase is changed between gas and liquid, is arranged at the outside of the tunnel type clean room 41. Refrigerant, cooled by the heat exchanging unit 78 and whose phase is changed between gas and liquid, is circulated through the coil 77 while air, cooled by the coil 77, is conducted by the fan filter unit 53 from the high-performance filter 56 into the high-speed flow area (a), in which production facilities 48 in the tunnel type clean room 41 are arranged.

4. 发明专利

JPH0893696A FAN FILTER UNIT 失效
公开(公告)号：JPH0893696A
公开(公告)日：1996-04-09
申请号：JP22674694
申请日：1994-09-21
申请人： SANKI ENG CO LTD
发明人： KATO AKIRA , YOSHIZAKI SEISHIROU , SUGAFUJI KAZUNORI , UEHARA SEIJI
IPC分类号： F04D25/08 , F04D29/44
摘要： PURPOSE: To uniform the distribution of air velocity discharged from a filter without increasing the discharge resistance by the turning flow generated in use of an axial fan and collided restrictively with a plurality of communicating plates arranged on the upper part of the inner periphery of a unit body. CONSTITUTION: A unit body 31 is formed in the center of the upper surface 37 with an inlet opening part 39 in which an axial fan 41 is disposed. The axial fan 41 has a bellmouth 43 inserted in the inlet opening part 39. Air sucked from the inlet opening part 39 by the axial fan 41 in a fan filter unit is generated as a turning flow which collides restrictively with a plurality of commutating plates 55 disposed on the upper part of the inner periphery of the unit body 31 in the outer periphery part to provide the flow directed downward and be jetted into a chamber through a filter 35, so that the distribution of wind velocity discharged from the filter 35 can be uniformed.

5. 发明专利

JPH09150027A FILTER UNIT FOR TUNNEL-TYPE CLEAN ROOM 失效
公开(公告)号：JPH09150027A
公开(公告)日：1997-06-10
申请号：JP31059895
申请日：1995-11-29
申请人： SANKI ENG CO LTD
发明人： YOSHIZAKI SEISHIROU , KATO AKIRA
IPC分类号： F24F7/06 , B01D46/00 , B01D46/52
摘要： PROBLEM TO BE SOLVED: To ensure a smooth air current distribution and protect a worker against dust by providing an air filter for a clean room with almost semielliptical cross section in the short diametral direction and enlarging a filter medium area in a region where the air is ejected in the short diametral direction. SOLUTION: A tunnel-type clean room 41 is divided into a rapid flow area A requiring high cleanliness, a border area C and a slow flow area B by a hanging wall 42. In addition, a filter unit for the tunnel-type clean room 41 for blowing out a clean air into the room 41 is installed on the ceiling 43 side of the slow flow area B. Further, the filter unit 49 is composed of an air filter 50 for the clean room with an almost semielliptical cross section cut in the short diametral direction, and a supply chamber 51. If the curvature of the air filter 50 is reduced as explained, a smooth air current distribution is given to the crosswise long clean room. Thus it is possible to prevent dust generated by a worker located at the border area from being entrained into the rapid flow area A.

6. 发明专利

JPH08210676A TUNNEL TYPE CLEAN ROOM 失效
公开(公告)号：JPH08210676A
公开(公告)日：1996-08-20
申请号：JP31059595
申请日：1995-11-29
申请人： SANKI ENG CO LTD
发明人： MIZUSHIMA SHIGERU , YOSHIZAKI SEISHIROU , SUGAFUJI KAZUNORI
IPC分类号： F24F7/06
摘要： PURPOSE: To prevent the entrainment of dust, generated from workers positioned at a boundary area, into high-speed flow area by a method wherein a clean room is partitioned into the high-speed flow area and a low-speed flow area by a hanging wall and the high-speed flow area is provided with a fan filter unit while the low-speed flow area is provided with filter ducts having the section of an arc. CONSTITUTION: A tunnel type clean room is partitioned by a hanging wall 22 into a high-speed flow area (a), wherein a high degree of cleanness is necessitated, a boundary area (c) and a low-speed flow area (b). A filter unit 30 is arranged in the high-speed flow area (a) and a filter duct 80, having an arced section, is arranged in the low-speed flow area (b). In this case, the flow-out speed of the boundary area (c) between the high-speed flow area (a) below the hanging wall 22 and the low-speed flow area (b) is substantially equal to that of the high-speed flow area (a). Accordingly, high-speed laminar flow, flowing against production machines 29 installed on a floor, is formed in the high-speed flow area (a) while middle-speed and low-speed flows, having a uniform direction, are formed from the filter duct 80 having the section of an arc. According to this method, ascending air streams will never be generated in the boundary area (c) or the corners of a room and stabilized downward air stream can be obtained.

7. 发明专利

JPH08152171A CLEAN ROOM AIR CONDITIONING SYSTEM 失效
公开(公告)号：JPH08152171A
公开(公告)日：1996-06-11
申请号：JP29530594
申请日：1994-11-29
申请人： SANKI ENG CO LTD
发明人： MIZUSHIMA SHIGERU , YOSHIZAKI SEISHIROU , SUGAFUJI KAZUNORI
IPC分类号： F24F7/06
摘要： PURPOSE: To effectively correspond to a partial heat load by a method wherein an indoor unit where a refrigerant which transforms between gas-liquid phases circulates is arranged on the upper surface of a filter unit, and in the meantime, a heat-exchanger unit to cool the refrigerant which changes between gas-liquid phases is arranged outside a clean room. CONSTITUTION: After introducing air in a floor space 46 to an air conditioner 47 being equipped with a cold/hot water coil 48 and fan 49, the air conditioned air is introduced to a ceiling space 43 through a circulation duct 50, and then, the air conditioned air is blown out from a filter unit 51. By this method, the air in a clean room 41 is purified and air conditioned. In this case, on the upper surface of the filter unit 51, a coil 32 where a refrigerant which transforms between gas-liquid phases circulates, and an indoor unit 33 being equipped with a fan 31 to blow the air which is cooled by the coil 32 are arranged. In the meantime, outside of the clean room 41, a heat-exchanger unit 34 to cool the refrigerant which transforms between gas-liquid phases is arranged. Then, the air conditioning system effectively corresponds to a partial heat load generating in the clean room 41 by selecting the location of the indoor unit 33.

8. 发明专利

JPH08150312A FILTER UNIT FOR CLEAN ROOM 失效
公开(公告)号：JPH08150312A
公开(公告)日：1996-06-11
申请号：JP29530094
申请日：1994-11-29
申请人： SANKI ENG CO LTD
发明人： YOSHIZAKI SEISHIROU , KATO AKIRA
IPC分类号： F24F7/06 , B01D46/52 , F24F13/068 , F24F13/08
摘要： PURPOSE: To provide a good air current distribution by forming an air filter for a clean room into a shape whose cross section is almost a semiellipse cut in its minor axis direction. CONSTITUTION: In an air filter unit 50 for a clean room, an air filter 51 is formed into a shape whose cross section is almost a semiellipse cut in its minor axis direction. The air filter unit 50 constituted of the air filter 51 and a supplier chamber 52 is fitted on a ceiling 61 of a clean room 60. At this time, the curvature of a filter surface 51a in a region 51A for blowing out in the minor axis direction of the air filter 51 is made smaller than that of a conventional air filter. That is, by increasing minus Z components in the vector direction of fluid elements 70 arranged in the minus Z direction from a semicircular section little by little, the fluid elements 70 being in charge of an expanse of a space in the X direction is increased. In this way, the expanse of the fluid elements 70 to a space in the X direction is decreased, wind velocity is kept rather far from a blow-out hole to restrain the generation of negative pressure.

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