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1. 发明授权

EP1585218B1 Bulk acoustic wave resonator and methods of making the same 有权转让
标题翻译：它们的体声波及其制造方法
公开(公告)号：EP1585218B1
公开(公告)日：2012-04-04
申请号：EP05252130.9
申请日：2005-04-05
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, In-Sang , Park, Yun-Kwon , Ha, Byeoung-ju , Kim, Duck-hwan
IPC分类号： H03H3/02 , H03H9/17
CPC分类号： H03H3/02 , H03H9/02149 , H03H9/105 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023 , Y10T29/42

2. 发明公开

EP1548939A3 Duplexer and method of fabrication 有权
标题翻译：双工器和制造方法
公开(公告)号：EP1548939A3
公开(公告)日：2006-01-04
申请号：EP04257188.5
申请日：2004-11-19
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, In-Sang , Ha, Byeoung-ju, 507-1401 Jinsan Maeul Samsung , Park, Yun-kwon , Nam, Kuang-woo , Shim, Dong-ha
IPC分类号： H03H9/70
CPC分类号： H03H9/173 , H03H9/0571 , H03H9/564 , H03H9/706 , Y10T29/42
摘要： A duplexer having a filter (300) implemented using thin Film Bulk Acoustic Resonators and an isolation part (200) which are integrally formed including a substrate (110), a transmitter filter (300) integrated on the substrate (110) to pass signals only in a frequency band for transmission, a receiver filter integrated on the substrate to pass signals only in a frequency band for reception, and an isolation part integrally formed with either one of the transmitter filter and the receiver filter to isolate the signals passed through the transmitter filter and the receiver filter from each other. The isolation part (200) includes a capacitor and an inductor. The capacitor is build using the FBAR membrane (130) as a dielectric layer. Since the isolation part is integrally formed with either one of the transmitter filter and the receiver filter, the duplexer can be manufactured in a small size by simplified processes.
摘要翻译：一种双工器，具有使用薄膜体声谐振器和整体形成的隔离部件（200）实现的滤波器（300），该隔离部件包括衬底（110），集成在衬底（110）上的发射器滤波器（300）在用于传输的频带中，集成在基片上的接收器滤波器仅在用于接收的频带中传递信号，以及与发射器滤波器和接收器滤波器中的任何一个整体形成的隔离部分，以隔离通过发射器过滤器和接收器相互过滤。隔离部分（200）包括电容器和电感器。使用FBAR膜（130）作为电介质层来构建电容器。由于隔离部分与发射器滤波器和接收器滤波器中的任何一个整体形成，所以双工器可以通过简化的工艺以小尺寸制造。

3. 发明授权

EP1318530B1 Inductor element having a high quality factor 有权
标题翻译：具有高品质因数电感分量
公开(公告)号：EP1318530B1
公开(公告)日：2012-11-07
申请号：EP02258402.3
申请日：2002-12-05
申请人： Samsung Electronics Co., Ltd.
发明人： Song, In-Sang
IPC分类号： H01L23/522 , H01F17/00 , H01L23/64
CPC分类号： H01F17/0006 , H01F27/362 , H01F27/365 , H01L23/5227 , H01L23/645 , H01L2924/0002 , H01L2924/00

4. 发明授权

EP1548939B1 Duplexer and method of fabrication 有权
标题翻译：双工器和制造方法
公开(公告)号：EP1548939B1
公开(公告)日：2009-01-07
申请号：EP04257188.5
申请日：2004-11-19
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, In-Sang , Ha, Byeoung-ju, 507-1401 Jinsan Maeul Samsung , Park, Yun-kwon , Nam, Kuang-woo , Shim, Dong-ha
IPC分类号： H03H9/70
CPC分类号： H03H9/173 , H03H9/0571 , H03H9/564 , H03H9/706 , Y10T29/42
摘要： A duplexer having a filter (300) implemented using thin Film Bulk Acoustic Resonators and an isolation part (200) which are integrally formed including a substrate (110), a transmitter filter (300) integrated on the substrate (110) to pass signals only in a frequency band for transmission, a receiver filter integrated on the substrate to pass signals only in a frequency band for reception, and an isolation part integrally formed with either one of the transmitter filter and the receiver filter to isolate the signals passed through the transmitter filter and the receiver filter from each other. The isolation part (200) includes a capacitor and an inductor. The capacitor is build using the FBAR membrane (130) as a dielectric layer. Since the isolation part is integrally formed with either one of the transmitter filter and the receiver filter, the duplexer can be manufactured in a small size by simplified processes.

5. 发明公开

EP1585218A2 Bulk acoustic wave resonator and methods of making the same 有权转让
标题翻译： Volumenwellenresonator和Herstellungsverfahrendafür
公开(公告)号：EP1585218A2
公开(公告)日：2005-10-12
申请号：EP05252130.9
申请日：2005-04-05
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, In-Sang , Park, Yun-Kwon , Ha, Byeoung-ju , Kim, Duck-hwan
IPC分类号： H03H3/02 , H03H9/17
CPC分类号： H03H3/02 , H03H9/02149 , H03H9/105 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023 , Y10T29/42
摘要： A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one embodiment, the cavity walls are substantially perpendicular to the back surface. In another embodiment, the first electrode is formed in the cavity such that it is electrically connected to an electrode on the back surface of the support structure. In yet another embodiment, the cavity is formed via an etch through via holes in the back surface of the support structure, which leads to greater flexibility in designing a method of manufacture while reducing the need for alignment relative to other designs.
摘要翻译：具有由夹在第一和第二电极之间的压电层形成的膜的谐振器悬挂在从支撑结构的后表面形成的空腔的上方。在一个实施例中，空腔壁基本上垂直于后表面。在另一个实施例中，第一电极形成在空腔中，使得其与支撑结构的背表面上的电极电连接。在另一个实施例中，通过蚀刻穿过支撑结构的后表面中的通孔形成空腔，这导致在设计制造方法时的更大的灵活性，同时减少了相对于其他设计的对准的需要。

6. 发明公开

EP1318530A1 Inductor element having a high quality factor 有权
标题翻译： Induktives Bauelement mit hohemGütefaktor
公开(公告)号：EP1318530A1
公开(公告)日：2003-06-11
申请号：EP02258402.3
申请日：2002-12-05
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, In-Sang
IPC分类号： H01F17/00 , H01L23/64
CPC分类号： H01F17/0006 , H01F27/362 , H01F27/365 , H01L23/5227 , H01L23/645 , H01L2924/0002 , H01L2924/00
摘要： An inductor element having a high quality factor, wherein the inductor element includes an inductor helically formed on a semiconductor substrate and a magnetic material film on a surface of the inductor for inducing magnetic flux generated by the inductor. The magnetic material film preferably includes a first magnetic material film disposed on a lower surface of the inductor, between the substrate and the inductor, and a second magnetic material film disposed on an upper surface of the inductor. The magnetic material film may be patterned according to a direction along which the magnetic flux flows, for example, radially. Since the magnetic flux proceeding toward the upper part and lower part of the inductor is induced by the magnetic material film, the effect of the magnetic flux generated in the inductor on external circuits may be reduced and the efficiency of the inductor may be enhanced.
摘要翻译：一种具有高品质因数的电感器元件，其中电感器元件包括螺旋地形成在半导体衬底上的电感器和用于感应电感器产生的磁通的电感器表面上的磁性材料膜。磁性材料膜优选地包括设置在电感器的下表面，衬底和电感器之间的第一磁性材料膜和设置在电感器的上表面上的第二磁性材料膜。磁性材料膜可以根据磁通流动的方向，例如径向地图案化。由于通过磁性材料膜引起向电感器的上部和下部的磁通，所以可以减小电感器中产生的磁通对外部电路的影响，并且可以提高电感器的效率。

7. 发明公开

EP1585218A3 Bulk acoustic wave resonator and methods of making the same 有权转让
标题翻译：它们的体声波及其制造方法
公开(公告)号：EP1585218A3
公开(公告)日：2006-07-26
申请号：EP05252130.9
申请日：2005-04-05
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, In-Sang , Park, Yun-Kwon , Ha, Byeoung-ju , Kim, Duck-hwan
IPC分类号： H03H3/02 , H03H9/17
CPC分类号： H03H3/02 , H03H9/02149 , H03H9/105 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023 , Y10T29/42
摘要： A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one embodiment, the cavity walls are substantially perpendicular to the back surface. In another embodiment, the first electrode is formed in the cavity such that it is electrically connected to an electrode on the back surface of the support structure. In yet another embodiment, the cavity is formed via an etch through via holes in the back surface of the support structure, which leads to greater flexibility in designing a method of manufacture while reducing the need for alignment relative to other designs.

8. 发明公开

EP1548939A2 Duplexer and method of fabrication 有权
标题翻译：双工器和制造方法
公开(公告)号：EP1548939A2
公开(公告)日：2005-06-29
申请号：EP04257188.5
申请日：2004-11-19
申请人： Samsung Electronics Co., Ltd.
发明人： Song, In-Sang , Ha, Byeoung-ju, 507-1401 Jinsan Maeul Samsung , Park, Yun-kwon , Nam, Kuang-woo , Shim, Dong-ha
IPC分类号： H03H9/70
CPC分类号： H03H9/173 , H03H9/0571 , H03H9/564 , H03H9/706 , Y10T29/42
摘要： A duplexer having a filter and an isolation part which are integrally formed including a substrate, a transmitter filter integrated on the substrate to pass signals only in a frequency band for transmission, a receiver filter integrated on the substrate to pass signals only in a frequency band for reception, and an isolation part integrally formed with either one of the transmitter filter and the receiver filter to isolate the signals passed through the transmitter filter and the receiver filter from each other. Since the isolation part is integrally formed with either one of the transmitter filter and the receiver filter, the duplexer can be manufactured in a small size by simplified processes.
摘要翻译：一种双工器，其具有整体形成的滤波器和隔离部分，所述滤波器和隔离部分包括衬底，集成在衬底上的发送器滤波器，用于仅在用于发送的频带中传送信号，接收器滤波器集成在衬底上，以仅在频带以及与发射机滤波器和接收机滤波器中的任何一个整体形成的隔离部分，以将通过发射机滤波器和接收机滤波器的信号彼此隔离。由于隔离部分与发射器滤波器和接收器滤波器中的任何一个整体形成，所以双工器可以通过简化的工艺以小尺寸制造。

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