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1. 发明公开

KR20200141809A 집적회로 장치 및 그 제조 방법 审中-公开
公开(公告)号：KR20200141809A
公开(公告)日：2020-12-21
申请号：KR20190068805
申请日：2019-06-11
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： KANG JUN GOO , LEE HYUN SUK , CHO GI HEE , AHN SANG HYUCK
IPC分类号： H01L27/108 , H01L29/92
摘要： 집적회로장치는커패시터구조물을포함하고, 상기커패시터구조물은, 기판상에배치되는하부전극; 상기하부전극의측벽상에배치되는서포터; 상기하부전극및 상기서포터상에배치되는유전층; 및상기유전층상에서상기하부전극을커버하는상부전극을포함하고, 상기하부전극은, 상기기판상에서상기기판의상면에수직한제1 방향으로연장되는베이스전극층과, 상기베이스전극층의상기측벽과상기유전층사이, 및상기베이스전극층의상면과상기유전층사이에배치되며, 니오븀질화물을포함하는도전캡핑층을포함한다.

2. 发明公开

KR20180009185A 반도체 소자의 제조 방법 审中-公开
标题翻译：制造半导体器件的方法
公开(公告)号：KR20180009185A
公开(公告)日：2018-01-26
申请号：KR20160090778
申请日：2016-07-18
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： YU JI WON , LEE HYUN SUK , PARK JI WOON , CHO GI HEE , PARK HEE SOOK , SOHN WOONG HEE
IPC分类号： H01L21/02 , H01L21/60 , H01L21/67
CPC分类号： H01L21/205 , H01L21/54 , H01L21/6719 , H01L21/67739 , H01L21/67769
摘要： 본발명의일 실시예에따른반도체소자제조방법은기판이도입된공정챔버내부에제1 반응물을공급하는단계, 제1 퍼지기체의유량을조절하고, 유량이조절된상기제1 퍼지기체를제1 저장부에정해진시간동안저장하는단계, 상기제1 반응물을공급하는단계이후에, 상기공정챔버내부로, 상기제1 저장부에저장되어있던상기제1 퍼지기체를공급하는단계, 및상기제1 퍼지기체를공급하는단계이후에, 상기기판이도입된상기공정챔버내부에제2 반응물을공급하는단계를포함할수 있다.
摘要翻译：一种制造半导体器件的方法，所述方法包括：将第一反应物供应到引入了衬底的处理室内部; 控制第一净化气体的流量并将其流量已被控制的第一净化气体存储在第一存储器中给定的时间段; 在供应第一反应物之后，将来自第一储存器的第一净化气体供应至处理室的内部; 并且在供应第一净化气体之后将第二反应物供应到处理室的内部。

3. 发明公开

KR20070093676A METHOD FOR MANUFACTURING THE STACKED SEMICONDUCTOR DEVICE 审中-公开
标题翻译：用于制造堆叠半导体器件的方法
公开(公告)号：KR20070093676A
公开(公告)日：2007-09-19
申请号：KR20060023822
申请日：2006-03-15
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： LEE HYUN SUK , LIM HYUN SEOK , PARK IN SUN , KIM RAK HWAN
IPC分类号： H01L21/336 , H01L21/28
摘要： A method for manufacturing a stack type semiconductor device is provided to reduce sufficiently contact resistances of a silicon pattern and a silicon substrate by forming ohmic structures on a surface of the silicon substrate and at sidewalls of the silicon pattern using different materials. Interlayer dielectrics and interlayer silicon pattern are sequentially deposited on a silicon substrate(100). A thin film structure is formed on the resultant structure. The thin film structure has a contact hole capable of exposing partially the silicon pattern and the substrate to the outside. A first ohmic pattern(130) made of a cobalt silicide layer is formed on the resultant structure to cover the exposed portion of the substrate. A second ohmic pattern(132) made of a tungsten silicide layer is formed on the resultant structure to cover the exposed portion of the silicon pattern. A barrier metal(134) is formed along the contact hole. The contact hole is filled with a metal pattern(136).
摘要翻译：提供了一种用于制造叠层型半导体器件的方法，以通过在硅衬底的表面上和在使用不同材料的硅图案的侧壁处形成欧姆结构来减小硅图案和硅衬底的充分接触电阻。层间电介质和层间硅图案依次沉积在硅衬底（100）上。在所得结构上形成薄膜结构。薄膜结构具有能够将硅图案和基板部分地暴露于外部的接触孔。在所得结构上形成由钴硅化物层制成的第一欧姆图案（130）以覆盖基板的暴露部分。在所得结构上形成由硅化钨层制成的第二欧姆图案（132）以覆盖硅图案的暴露部分。沿着接触孔形成阻挡金属（134）。接触孔填充金属图案（136）。

4. 发明专利

DE69937795D1 未知
公开(公告)号：DE69937795D1
公开(公告)日：2008-01-31
申请号：DE69937795
申请日：1999-06-14
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： KIM YOUNG KY , LEE HYUN SUK , KIM SUN MI
IPC分类号： H04J13/00 , H04B7/26 , H04W56/00
摘要： State synchronization methods for transmitting packet data between a base station and a mobile station in a CDMA mobile communication system are provided. In one method, the base station transmits a state check message to the mobile station in an active state. The base station receives a response message from the mobile station, and analyzes the received response message to determine a state of the mobile station. The base station terminates a corresponding channel and transitions to the state of the mobile station. In a second method for transmitting packet data between a base station and a mobile station in a CDMA mobile communication system, the mobile station transmits a state check message to the base station in an active state. The mobile station receives a response message from the base station and analyzes the received response message to determine a state of the base station. The mobile station terminates a corresponding channel and transitions the mobile station to the state of the base station.

5. 发明专利

CA2324335C DEVICE AND METHOD FOR ASSIGNING SPREADING CODE FOR REVERSE COMMON CHANNEL MESSAGE IN CDMA COMMUNICATION SYSTEM 未知
公开(公告)号：CA2324335C
公开(公告)日：2007-01-09
申请号：CA2324335
申请日：1999-03-26
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： LEE HYUN SUK , AHN JAE MIN , MOON HI CHAN , YOON SOON YOUNG , KIM YOUNG KY , PARK JIN SOO
IPC分类号： H04B7/216 , H04J13/00 , H04B7/26 , H04J13/16 , H04W72/04 , H04W74/02 , H04W76/02
摘要： There are provided a common channel message communicating device and method in a CDMA communication system. In a base station of the common channel message communicating device, a control message generator (612) generates a control message including information representative of a spreading code for spreading a reverse common channel message, and a forward common channel transmitter (618) transmits the control message on a forward common channel. In a mobile station, a control message analyser analyses information representative of an assigned spreading code included in the control message received on the forward common channel, a spreading code generator generates a spreading code based on the spreading code information, and a channel transmitter spreads the reverse common channel message by the spreading code and transmits the spread reverse common channel message.

6. 发明专利

DE69932710T2 未知
公开(公告)号：DE69932710T2
公开(公告)日：2006-12-07
申请号：DE69932710
申请日：1999-03-26
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： LEE HYUN SUK , MOON HI CHAN , YOON SOON YOUNG , KIM YOUNG KY , PARK JIN SOO , AHN JAE MIN
IPC分类号： H04B7/216 , H04J13/00 , H04B7/26 , H04J13/16 , H04W72/04 , H04W74/02 , H04W76/02
摘要： There are provided a common channel message communicating device and method in a CDMA communication system. In a base station of the common channel message communicating device, a control message generator generates a control message including information representative of a spreading code for spreading a reverse common channel message, and a forward common channel transmitter transmits the control message on a forward common channel. In a mobile station, a control message analyser analyses information representative of an assigned spreading code included in the control message received on the forward common channel, a spreading code generator generates a spreading code based on the spreading code information, and a channel transmitter spreads the reverse common channel message by the spreading code and transmits the spread reverse common channel message.

7. 发明专利

CA2324450C POWER CONTROL DEVICE AND METHOD FOR CONTROLLING A REVERSE LINK COMMON CHANNEL IN A CDMA COMMUNICATION SYSTEM 未知
公开(公告)号：CA2324450C
公开(公告)日：2006-01-03
申请号：CA2324450
申请日：1999-03-23
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： MOON HI CHAN , KIM YOUNG KY , CHOI JIN WOO , AHN JAE MIN , LEE HYUN SUK
IPC分类号： H04B7/216 , H04B1/707 , H04B7/005 , H04B7/26 , H04J13/00 , H04W52/04 , H04W52/08 , H04W52/14 , H04W52/32 , H04W52/44 , H04W52/50 , H04W52/54 , H04W52/58 , H04W76/02
摘要： A common power control channel transmission device for a base station in a CDMA communication system is provided having a selector (350) for receiving power control commands to be transmitted to multiple subscribers and multiplexing the received power control commands; and a spreading modulator (372) for spreading an output of the selector by multiplying the output of the selector by a spreading sequence. The common power control channel transmission device can be used t o control power of a reverse link common channel. For the power control of the reverse link common channel, the base station receives a signal from a mobile station via the reverse link common channel, and transmits to the mobile station a power control command for controlling a transmission power of the reverse link common channel according to a measured strength of the received signal.

8. 发明专利

CA2425463A1 POWER CONTROL DEVICE AND METHOD FOR CONTROLLING A REVERSE LINK COMMON CHANNEL IN A CDMA COMMUNICATION SYSTEM 未知
公开(公告)号：CA2425463A1
公开(公告)日：1999-09-30
申请号：CA2425463
申请日：1999-03-23
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： KIM YOUNG KY , CHOI JIN WOO , AHN JAE MIN , MOON HI CHAN , LEE HYUN SUK
IPC分类号： H04B1/69 , H04B7/216 , H04J11/00
摘要： A common power control channel transmission device for a base station in a CDMA communication system is provided having a selector for receiving power control commands to be transmitted to multiple subscribers and multiplexing the received power control commands; and a spreading modulator for spreading an output of the selector by multiplying the output of the selector by a spreading sequence. The common power control channel transmission device can be used to control power of a reverse, link common channel. For the power control of the reverse link common channel, the base station receives a signal from a mobile station via the reverse link common channel, and transmits to the mobile station a power control command for controlling a transmission power of the reverse link common channel according to a measured strength of the received signal.

9. 发明专利

DE69937795T2 未知
公开(公告)号：DE69937795T2
公开(公告)日：2008-04-30
申请号：DE69937795
申请日：1999-06-14
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： KIM YOUNG KY , LEE HYUN SUK , KIM SUN MI
IPC分类号： H04J13/00 , H04B7/26 , H04W56/00
摘要： State synchronization methods for transmitting packet data between a base station and a mobile station in a CDMA mobile communication system are provided. In one method, the base station transmits a state check message to the mobile station in an active state. The base station receives a response message from the mobile station, and analyzes the received response message to determine a state of the mobile station. The base station terminates a corresponding channel and transitions to the state of the mobile station. In a second method for transmitting packet data between a base station and a mobile station in a CDMA mobile communication system, the mobile station transmits a state check message to the base station in an active state. The mobile station receives a response message from the base station and analyzes the received response message to determine a state of the base station. The mobile station terminates a corresponding channel and transitions the mobile station to the state of the base station.

10. 发明专利

DE69926039T2 未知
公开(公告)号：DE69926039T2
公开(公告)日：2005-12-01
申请号：DE69926039
申请日：1999-04-13
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： JUNG KI-SUNG , MOON CHAN , LEE HYUN SUK , AHN JAE MIN
IPC分类号： H04W76/02 , H04B7/216 , H04B7/26 , H04J13/00 , H04W4/20 , H04W74/08 , H04Q7/38
摘要： A common channel message transmitting device and method in a CDMA communication system. In accordance with the method of the present invention, a mobile station (MS) sends a common channel message with a request for designation of a channel for transmission of a consecutive common channel message, and a base station (BS) sends a response message indicating an available channel ID for use by the MS, when one is available. If a channel ID is available, the MS sends the next message on a channel designated with the assigned channel ID.

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