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    • 4. 发明公开
    • MICRO-ELECTRO-MECHANICAL SYSTEMS SWITCH
    • 微电子机械系统开关
    • KR20070074728A
    • 2007-07-18
    • KR20060002643
    • 2006-01-10
    • SAMSUNG ELECTRONICS CO LTD
    • HOUNG YOUNG TACKKIM DONG KYUNSONG IN SANGLEE SANG HUNKWON SANG WOOKKIM JONG SEOKKIM CHE HEUNG
    • B81B7/02B81B3/00H01H57/00H01L41/09H01L41/187
    • B41J2/04581B41J2/04541
    • An MEMS(Micro Electro Mechanical Systems) switch is provided to reduce a contact resistance as well as an insertion loss by enhancing a contact structure of a signal line. An MEMS switch includes a substrate(101), a fixed signal line(110), a moving signal line(130), and a piezoelectric actuator(150). The fixed signal line is formed on one side of center of the substrate. The moving signal line is formed on an other side of the center of the substrate having a predetermined gap(G1) from an upper surface of the fixed signal line. The piezoelectric actuator lowers a free end of the moving signal line to connect the moving signal line to the fixed signal line and includes a first electrode(151), a piezoelectric layer(153), a second electrode(155), and a connection layer(157). The piezoelectric layer is formed on the first electrode. The second electrode is formed on the piezoelectric layer. The connection layer is formed on the second electrode and is connected to an upper surface of the moving signal line.
    • 提供了一种MEMS(微机电系统)开关,通过增强信号线的接触结构来减小接触电阻以及插入损耗。 MEMS开关包括基板(101),固定信号线(110),移动信号线(130)和压电致动器(150)。 固定信号线形成在基板的中心的一侧。 移动信号线形成在距离固定信号线的上表面具有预定间隙(G1)的基板的中心的另一侧。 压电致动器降低移动信号线的自由端以将移动信号线连接到固定信号线,并包括第一电极(151),压电层(153),第二电极(155)和连接层 (157)。 压电层形成在第一电极上。 第二电极形成在压电层上。 连接层形成在第二电极上并连接到移动信号线的上表面。