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    • 6. 发明申请
    • ANGULAR VELOCITY SENSOR
    • 角速度传感器
    • US20150219456A1
    • 2015-08-06
    • US14334602
    • 2014-07-17
    • SAMSUNG ELECTRO-MECHANICS CO., LTD.
    • Jong Woon KimTae Yoon KimSeung Mo LimHeung Woo Park
    • G01C19/5705
    • G01C19/5705G01C19/56
    • Disclosed herein is an angular velocity sensor, including: a sensing module including a mass body part which includes a plurality of mass bodies disposed to be parallel with each other, an internal frame which movably supports the mass body, and sensing side flexible parts which rotatably connect the mass body to the internal frame; an external frame supporting the sensing module; and a vibration side flexible part rotatably connecting the sensing module to the external frame, wherein the vibration side flexible part is disposed between the internal frame and the external frame to be parallel with each other with respect to a disposition direction of the mass body part which is disposed in the internal frame.
    • 本文公开了一种角速度传感器,包括:感测模块,包括质量体部分,其包括彼此平行设置的多个质量体,可移动地支撑质量体的内部框架,以及可旋转地 将质量体连接到内部框架; 支撑感测模块的外部框架; 以及振动侧柔性部分,其将所述感测模块可旋转地连接到所述外部框架,其中所述振动侧柔性部分设置在所述内部框架和所述外部框架之间,以相对于所述质量体部分的布置方向彼此平行, 设置在内部框架中。