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    • 9. 发明授权
    • Thin film transistor array panel
    • 薄膜晶体管阵列面板
    • US09536908B2
    • 2017-01-03
    • US14799995
    • 2015-07-15
    • Samsung Display Co., Ltd.
    • Yung Bin ChungChul-Hyun BaekEun Jeong ChoJung Yun Jo
    • H01L27/14H01L27/12H01L29/66H01L29/786H01L29/417H01L21/02
    • H01L27/124H01L21/0217H01L27/1248H01L27/1259H01L29/41733H01L29/66765H01L29/78606H01L29/78669H01L29/78678
    • A thin-film transistor array panel includes an insulation substrate, a gate line disposed on the insulation substrate, a gate insulating layer disposed on the gate line, a semiconductor layer disposed on the gate insulating layer, a data line disposed on the semiconductor layer and including a source electrode, a drain electrode disposed on the semiconductor layer and facing the source electrode, a first electrode disposed on the gate insulating layer, a first passivation layer disposed on the first electrode and including silicon nitride, a second passivation layer disposed on the first passivation and including silicon nitride, and a second electrode disposed on the passivation layer, in which a first ratio of nitrogen-hydrogen bonds to silicon-hydrogen bonds in the first passivation layer is different from a second ratio of nitrogen-hydrogen bonds to silicon-hydrogen bonds in the second passivation layer.
    • 薄膜晶体管阵列面板包括绝缘基板,设置在绝缘基板上的栅极线,设置在栅极线上的栅极绝缘层,设置在栅极绝缘层上的半导体层,设置在半导体层上的数据线,以及 包括源电极,设置在半导体层上并面对源电极的漏电极,设置在栅绝缘层上的第一电极,设置在第一电极上并包括氮化硅的第一钝化层,设置在第一电极上的第二钝化层 第一钝化并且包括氮化硅,以及设置在钝化层上的第二电极,其中第一钝化层中氮 - 氢键与硅 - 氢键的第一比例不同于氮 - 氢键与硅的第二比率 在第二钝化层中的氢键。