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    • 6. 发明授权
    • Process for producing optical waveguide
    • 光波导制造工艺
    • US07267931B2
    • 2007-09-11
    • US11194456
    • 2005-08-02
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • G02B6/13
    • G02B1/045G02B6/138
    • The present invention provides a process for producing an optical waveguide, comprising the steps of: continuously applying a fluorene derivative layer onto a continuous substrate and curing the layer to thereby form a lower cladding layer; continuously applying a photosensitive fluorene derivative layer onto the lower cladding layer; continuously exposing the applied photosensitive fluorene derivative layer to a light through a photomask having a predetermined pattern; continuously subjecting the exposed photosensitive fluorene derivative layer to post-exposure heating; continuously developing the heated photosensitive fluorene derivative layer to remove the unexposed areas therein, thereby forming into the predetermined pattern; curing the developed photosensitive fluorene derivative layer to thereby form a core layer having the predetermined pattern on the lower cladding layer; and continuously applying a fluorene derivative layer over the lower cladding layer so as to cover the core layer and curing the fluorene derivative layer to thereby form an upper cladding layer.
    • 本发明提供一种光波导的制造方法,包括以下步骤:在连续的基板上连续施加芴衍生物层,使该层固化,形成下包层; 将感光芴衍生物层连续施加到下包层上; 通过具有预定图案的光掩模将所施加的光敏芴衍生物层连续曝光于光; 对暴露的感光芴衍生物层进行后曝光加热; 连续显影加热的感光芴衍生物层以除去其中未曝光的区域,从而形成预定图案; 固化显影的感光芴衍生物层,从而在下包层上形成具有预定图案的芯层; 并且在下包层上连续施加芴衍生物层,以覆盖芯层并固化芴衍生物层从而形成上包层。
    • 7. 发明申请
    • Process for producing optical waveguide
    • 光波导制造工艺
    • US20060029891A1
    • 2006-02-09
    • US11194456
    • 2005-08-02
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • G02B6/10G03C1/725G03C1/73
    • G02B1/045G02B6/138
    • The present invention provides a process for producing an optical waveguide, comprising the steps of: continuously applying a fluorene derivative layer onto a continuous substrate and curing the layer to thereby form a lower cladding layer; continuously applying a photosensitive fluorene derivative layer onto the lower cladding layer; continuously exposing the applied photosensitive fluorene derivative layer to a light through a photomask having a predetermined pattern; continuously subjecting the exposed photosensitive fluorene derivative layer to post-exposure heating; continuously developing the heated photosensitive fluorene derivative layer to remove the unexposed areas therein, thereby forming into the predetermined pattern; curing the developed photosensitive fluorene derivative layer to thereby form a core layer having the predetermined pattern on the lower cladding layer; and continuously applying a fluorene derivative layer over the lower cladding layer so as to cover the core layer and curing the fluorene derivative layer to thereby form an upper cladding layer.
    • 本发明提供一种光波导的制造方法,包括以下步骤:在连续的基板上连续施加芴衍生物层,使该层固化,形成下包层; 将感光芴衍生物层连续施加到下包层上; 通过具有预定图案的光掩模将所施加的光敏芴衍生物层连续曝光于光; 对暴露的感光芴衍生物层进行后曝光加热; 连续显影加热的感光芴衍生物层以除去其中未曝光的区域,从而形成预定图案; 固化显影的感光芴衍生物层,从而在下包层上形成具有预定图案的芯层; 并且在下包层上连续施加芴衍生物层,以覆盖芯层并固化芴衍生物层从而形成上包层。