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    • 5. 发明授权
    • Block valve with tank chamber
    • 带阀舱的截止阀
    • US5469885A
    • 1995-11-28
    • US326852
    • 1994-10-21
    • Ryutaro Nishimura
    • Ryutaro Nishimura
    • F16K11/22F16K27/00F16K11/10
    • F16K11/22Y10T137/86083Y10T137/87877
    • A valve body is provided with a gas feed passage having an inlet and an outlet, a tank chamber, and a branch passage having a first portion connected between the gas feed passage and the tank chamber and an outlet extending from the tank chamber to a side of the valve body. A first valve is mounted on the valve body and selectively opens and closes the gas feed passage at a point downstream of the junction of the branch passage with the gas feed passage. A second valve is mounted on the valve body and selectively opens and closes the branch passage at a point between the tank chamber and the junction of the branch passage and the gas feed passage. A vacuum pump is provided to evacuate the tank chamber. When the first valve is open and the second valve is closed, gas may flow from an inlet pipe, through the gas feed passage and the first valve to a semiconductor process chamber. When the first valve is closed and the second valve is opened, residual gas in piping upstream of the inlet is evacuated through the branch passage and the second valve by the vacuum in the tank chamber. The first valve isolates the process chamber while the residual gas is being evacuated from the upstream piping.
    • 阀体设置有具有入口和出口的气体供给通道,罐室和分支通道,其具有连接在气体供给通道和罐室之间的第一部分和从罐室延伸到侧面的出口 的阀体。 第一阀安装在阀体上,并且在分支通道与气体供给通道的接合点下游的一个点处选择性地打开和关闭气体供给通道。 第二阀安装在阀体上,并且在罐室与分支通道与气体供给通道的接合部之间的点处选择性地打开和关闭分支通道。 提供真空泵以抽空罐室。 当第一阀打开并且第二阀关闭时,气体可以从入口管通过供气通道和第一阀流到半导体处理室。 当第一阀关闭并且第二阀打开时,入口上游管道中的残余气体通过分支通道和第二阀通过罐室中的真空抽真空。 第一个阀将处理室隔离,同时从上游管道排出残留气体。
    • 7. 发明授权
    • Fluid controller with pivoting valve stem operator
    • 具有旋转阀杆操作器的流体控制器
    • US6105930A
    • 2000-08-22
    • US325846
    • 1999-06-04
    • Ryutaro NishimuraTakashi Hirose
    • Ryutaro NishimuraTakashi Hirose
    • F16K31/44F16K7/16F16K31/524F16K31/56F17D3/00F16K35/02
    • F16K31/56F16K7/16
    • A fluid controller comprises a pivotal member pivotally movable about the axis of a horizontal pin, a pair of rollable rollers rotatably supported by the lower end of the pivotal member and having an axis in parallel to the axis of the horizontal pin, a slope provided by the upper surface of a bonnet for allowing each roller to roll therealong in a plane orthogonal to the axis of the roller, and a stopper supported by the pivotal member so as to be movable between a position to engage with a valve stem and a position to be out of engagement therewith. The pivotal member is pivotally moved to roll the rollers along the slope and move the roller-supporting pivotal member upward or downward with the rolling movement, whereby the horizontal pin is raised or lowered.
    • 流体控制器包括可围绕水平销的轴线枢转运动的枢转构件,由可枢转构件的下端可旋转地支撑并且具有平行于水平销的轴线的轴线的一对可滚动辊,由 用于允许每个辊在与辊的轴线正交的平面上滚动的发动机罩的上表面,以及由所述枢转构件支撑的止动件,以在与阀杆接合的位置和 与其失去联系。 枢转构件被枢转地移动以沿着斜面滚动辊,并且随着滚动运动而使辊支撑枢转构件向上或向下移动,由此水平销升高或降低。