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    • 9. 发明授权
    • Techniques for controlling a charged particle beam
    • 用于控制带电粒子束的技术
    • US07820986B2
    • 2010-10-26
    • US11854852
    • 2007-09-13
    • Piotr R. LubickiRussell J. LowJoseph C. OlsonAnthony Renau
    • Piotr R. LubickiRussell J. LowJoseph C. OlsonAnthony Renau
    • H01J37/317H05H5/06
    • H01J37/04H01J37/3171H01J2237/04735H01J2237/04756H05H15/00
    • Techniques for controlling a charged particle beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle acceleration/deceleration system. The charged particle acceleration/deceleration system may comprise an acceleration column. The acceleration column may comprise a plurality of electrodes having apertures through which a charged particle beam may pass. The charged particle acceleration/deceleration system may also comprise a plurality of resistors electrically coupled to the plurality of electrodes. The charged particle acceleration/deceleration system may further comprise a plurality of switches electrically coupled to the plurality of electrodes and the plurality of resistors, each of the plurality of switches may be configured to be selectively switched respectively in a plurality of operation modes.
    • 公开了用于控制带电粒子束的技术。 在一个特定的示例性实施例中,这些技术可以被实现为带电粒子加速/减速系统。 带电粒子加速/减速系统可以包括加速度列。 加速柱可以包括具有孔的多个电极,带电粒子束可以通过该孔。 带电粒子加速/减速系统还可以包括电耦合到多个电极的多个电阻器。 带电粒子加速/减速系统还可以包括电耦合到多个电极和多个电阻器的多个开关,多个开关中的每一个可被配置为分别以多种操作模式选择性地切换。