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    • 1. 发明授权
    • Ellipsometer
    • 椭圆计
    • US5343293A
    • 1994-08-30
    • US940903
    • 1992-10-23
    • Rudolf BergerHeiner RysselClaus SchneiderWolfgang Aderhold
    • Rudolf BergerHeiner RysselClaus SchneiderWolfgang Aderhold
    • G01B11/06G01N21/21H01L21/205H01L21/66G01B11/00
    • G01B11/065
    • An ellipsometer, used in particular for measuring the thickness of oxide films on silicon wafers inside an oven, comprising an analyzer unit (3), a beam deflection device, a paddle and a ploarizer unit (2). In order to increase the measurement precision, the ellipsometer is designed so that the beam deflection device comprises two prisms (6, 9), the prisms (6,9), the analyzer unit (3) and the polarizer unit (2) are mounted on the paddle (11), and two tubes (4, 10) are provided for guiding the beam from the polarizer unit (2) to the first prism (6) and from the second prism (9) to the analyzer unit (3) .
    • PCT No.PCT / DE91 / 00345 Sec。 371日期:1992年10月23日 102(e)日期1992年10月23日PCT 1991年4月24日提交PCT公布。 WO91 / 16600 PCT出版物 日期:1991年10月31日。一种椭圆光度计,特别用于测量烘箱内硅晶片上的氧化膜的厚度,包括分析器单元(3),光束偏转装置,桨叶和扩散器单元(2)。 为了提高测量精度,椭圆光度计被设计成使得光束偏转装置包括两个棱镜(6,9),棱镜(6,9),分析器单元(3)和偏振器单元(2)被安装 在所述桨叶(11)上设置有两个管(4,10),用于将所述光束从所述偏振器单元(2)引导到所述第一棱镜(6)并且从所述第二棱镜(9)引导到所述分析器单元(3) 。
    • 10. 发明申请
    • Belt tensioning device with external damping sleeve
    • 皮带张紧装置带外部阻尼套筒
    • US20070010361A1
    • 2007-01-11
    • US11474597
    • 2006-06-26
    • Vladimir KobelevManfred JungRudolf Berger
    • Vladimir KobelevManfred JungRudolf Berger
    • F16H7/14F16H7/22
    • F16H7/1218F16H7/1281F16H2007/081
    • A belt tensioning device has a torsion spring assembly and a damping assembly with a housing with a longitudinal axis A. A torsion spring is positioned in the housing so as to extend coaxially relative to the longitudinal axis A and which, by means of one of its ends, is secured in the housing in a rotationally fixed way. A tensioning arm is supported relative to the housing so as to be oscillatingly rotatable around the longitudinal axis A and is connected to the other end of the torsion spring in a rotationally fixed way. A tensioning roller is supported at a free end of the tensioning arm so as to be rotatable around an axis of rotation B and extending parallel relative to the longitudinal axis A. The damping assembly surrounds the housing coaxially relative to the longitudinal axis A and comprises cylindrical friction face pairs.
    • 带张紧装置具有扭转弹簧组件和具有带纵向轴线A的壳体的阻尼组件。扭力弹簧定位在壳体中,以便相对于纵向轴线A同轴地延伸,并且借助其中的一个 端部以旋转固定的方式固定在壳体中。 张紧臂相对于壳体被支撑,以便围绕纵向轴线A可旋转地旋转,并以旋转固定的方式连接到扭转弹簧的另一端。 张紧辊被支撑在张紧臂的自由端处,以便能够围绕旋转轴线B旋转并相对于纵向轴线A平行地延伸。阻尼组件相对于纵向轴线A同轴地包围壳体,并且包括圆柱形 摩擦面对。