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1. 发明授权

US07105098B1 Method to control artifacts of microstructural fabrication 有权
标题翻译：控制微结构制作工艺的方法
公开(公告)号：US07105098B1
公开(公告)日：2006-09-12
申请号：US10165356
申请日：2002-06-06
申请人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
发明人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
IPC分类号： B44C1/22
CPC分类号： H01L21/3085 , B81C1/00626
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对被蚀刻到衬底材料中的特征的深度提供差分控制。蚀刻相关的结构伪影的补偿可以通过适当地使用这种蚀刻延迟层来实现。

2. 发明授权

US06930051B1 Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer 有权
标题翻译：通过使用蚀刻延迟层制造多层硅基微结构的方法
公开(公告)号：US06930051B1
公开(公告)日：2005-08-16
申请号：US10165861
申请日：2002-06-06
申请人： Ronald P. Manginell , W. Kent Schubert , Randy J. Shul
发明人： Ronald P. Manginell , W. Kent Schubert , Randy J. Shul
IPC分类号： B81C1/00 , H01L21/302 , H01L21/308
CPC分类号： B81C1/00626 , B81C2201/0142 , H01L21/3083
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Structures having features with different depth can be formed thereby in a single etching step.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对蚀刻到衬底材料中的特征的深度提供差分控制。可以在单个蚀刻步骤中形成具有不同深度的特征的结构。

3. 发明授权

US5792280A Method for fabricating silicon cells 失效
标题翻译：制造硅电池的方法
公开(公告)号：US5792280A
公开(公告)日：1998-08-11
申请号：US820969
申请日：1996-12-27
申请人： Douglas S. Ruby , Paul A. Basore , W. Kent Schubert
发明人： Douglas S. Ruby , Paul A. Basore , W. Kent Schubert
IPC分类号： H01L31/0216 , H01L31/0236 , H01L31/068 , H01L31/18 , H01L31/00
CPC分类号： H01L31/1804 , H01L31/02167 , H01L31/0236 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： A process for making high-efficiency solar cells. This is accomplished by forming a diffusion junction and a passivating oxide layer in a single high-temperature process step. The invention includes the class of solar cells made using this process, including high-efficiency solar cells made using Czochralski-grown silicon.
摘要翻译：制造高效太阳能电池的工艺。这通过在单个高温工艺步骤中形成扩散结和钝化氧化物层来实现。本发明包括使用该方法制造的太阳能电池类，包括使用切克劳斯基生长的硅制造的高效太阳能电池。

4. 发明授权

US5789745A Ion mobility spectrometer using frequency-domain separation 失效
标题翻译：离子迁移谱仪使用频域分离
公开(公告)号：US5789745A
公开(公告)日：1998-08-04
申请号：US959659
申请日：1997-10-28
申请人： Stephen J. Martin , Michael A. Butler , Gregory C. Frye , W. Kent Schubert
发明人： Stephen J. Martin , Michael A. Butler , Gregory C. Frye , W. Kent Schubert
IPC分类号： G01N27/64 , H01J49/40
CPC分类号： G01N27/622 , H01J49/0018
摘要： An apparatus and method is provided for separating and analyzing chemical species in an ion mobility spectrometer using a frequency-domain technique wherein the ions generated from the chemical species are selectively transported through an ion flow channel having a moving electrical potential therein. The moving electrical potential allows the ions to be selected according to ion mobility, with certain of the ions being transported to an ion detector and other of the ions being effectively discriminated against. The apparatus and method have applications for sensitive chemical detection and analysis for monitoring of exhaust gases, hazardous waste sites, industrial processes, aerospace systems, non-proliferation, and treaty verification. The apparatus can be formed as a microelectromechanical device (i.e. a micromachine).
摘要翻译：提供了一种使用频域技术分离和分析离子迁移谱仪中的化学物质的装置和方法，其中从化学物质产生的离子选择性地通过其中具有移动电位的离子流动通道传输。移动的电位允许根据离子迁移率选择离子，其中某些离子被输送到离子检测器并且其他离子被有效地区分开。该设备和方法应用于对废气，危险废物场所，工业过程，航空航天系统，不扩散和条约验证进行敏感的化学检测和分析。该装置可以形成为微机电装置（即微型机械装置）。

5. 发明授权

US5279795A Extended range chemical sensing apparatus 失效
标题翻译：扩展范围的化学传感设备
公开(公告)号：US5279795A
公开(公告)日：1994-01-18
申请号：US171
申请日：1993-01-04
申请人： Robert C. Hughes , W. Kent Schubert
发明人： Robert C. Hughes , W. Kent Schubert
IPC分类号： G01N33/00 , G01N27/00
CPC分类号： G01N33/005 , G01N33/0032 , Y10T436/22
摘要： An apparatus for sensing chemicals over extended range of concentrations. In particular, first and second sensors each having separate, but overlapping ranges for sensing concentrations of hydrogen are provided. Preferably, the first sensor is a MOS solid state device wherein the metal electrode or gate is a nickel alloy. The second sensor is a chemiresistor comprising a nickel alloy.
摘要翻译：一种用于在更长浓度范围内感测化学品的装置。特别地，提供了具有用于感测氢浓度的单独但重叠的范围的第一和第二传感器。优选地，第一传感器是MOS固态器件，其中金属电极或栅极是镍合金。第二传感器是包括镍合金的化学电阻器。

6. 发明授权

US07095295B1 Multi-tunable microelectromechanical system (MEMS) resonators 有权
标题翻译：多可调谐微机电系统（MEMS）谐振器
公开(公告)号：US07095295B1
公开(公告)日：2006-08-22
申请号：US10443951
申请日：2003-05-21
申请人： Harold L. Stalford , Michael A. Butler , W. Kent Schubert
发明人： Harold L. Stalford , Michael A. Butler , W. Kent Schubert
IPC分类号： H03H9/46
CPC分类号： H03H9/02409
摘要： A method for tuning a vibratory device including a cantilevered resonator comprising the steps of increasing a voltage V0 supplied to the vibratory device to thereby increase the bandwidth of the vibratory device; and keeping the resonant frequency of the vibratory device at substantially that natural frequency of the cantilevered resonator, wherein the vibratory device comprises: a capacitor including a movable plate and a fixed plate spaced from each other, the movable plate being part of the cantilevered resonator; a voltage source connected to the capacitor for providing voltage V0 across the capacitor to produce an attractive force between movable plate and fixed plate; a circuit connecting the voltage source to the capacitor; and a load resistor in said circuit having a resistance RL satisfying the following equation: μ = ω 0 ⁢ c 0 ⁢ R L ( 1 - λ ) where: μ is at least 10; ω0 is the beam constant for the cantilevered resonator; c0 is the capacitance for the capacitor; and λ is the voltage dependent coupling parameter for voltage V0.
摘要翻译：一种用于调谐包括悬臂谐振器的振动装置的方法，包括以下步骤：增加提供给振动装置的电压V SUB，从而增加振动装置的带宽; 并且将所述振动装置的谐振频率保持在所述悬臂谐振器的基本固有频率，其中所述振动装置包括：包括可移动板和彼此间隔开的固定板的电容器，所述可移动板是所述悬臂谐振器的一部分; 连接到电容器的电压源，用于在电容器之间提供电压V 0以在可动板和固定板之间产生吸引力; 将电压源连接到电容器的电路; 并且所述电路中的负载电阻具有满足以下等式的电阻R L： $< MROW> =（1->其中：mu至少为10; ω= 0是针对悬臂谐振器的光束常数; c <0>电容器的电容; 而λ是电压V 0 0的电压相关耦合参数。$

7. 发明授权

US06822929B1 Micro acoustic spectrum analyzer 失效
标题翻译：微声谱分析仪
公开(公告)号：US06822929B1
公开(公告)日：2004-11-23
申请号：US10606526
申请日：2003-06-25
申请人： W. Kent Schubert , Michael A. Butler , Douglas R. Adkins , Larry F. Anderson
发明人： W. Kent Schubert , Michael A. Butler , Douglas R. Adkins , Larry F. Anderson
IPC分类号： G01N3300
CPC分类号： B06B1/0292 , G01H3/00 , G01H3/08 , G01H3/12 , G01N29/14 , G01N29/42 , G01N29/46 , H04R1/44 , H04R29/00
摘要： A micro acoustic spectrum analyzer for determining the frequency components of a fluctuating sound signal comprises a microphone to pick up the fluctuating sound signal and produce an alternating current electrical signal; at least one microfabricated resonator, each resonator having a different resonant frequency, that vibrate in response to the alternating current electrical signal; and at least one detector to detect the vibration of the microfabricated resonators. The micro acoustic spectrum analyzer can further comprise a mixer to mix a reference signal with the alternating current electrical signal from the microphone to shift the frequency spectrum to a frequency range that is a better matched to the resonant frequencies of the microfabricated resonators. The micro acoustic spectrum analyzer can be designed specifically for portability, size, cost, accuracy, speed, power requirements, and use in a harsh environment. The micro acoustic spectrum analyzer is particularly suited for applications where size, accessibility, and power requirements are limited, such as the monitoring of industrial equipment and processes, detection of security intrusions, or evaluation of military threats.
摘要翻译：用于确定波动声音信号的频率分量的微声频谱分析仪包括麦克风拾取波动的声音信号并产生交流电信号; 至少一个微制造谐振器，每个谐振器具有不同的谐振频率，其响应于交流电信号而振动; 以及至少一个检测器，用于检测微加工的谐振器的振动。微声频谱分析仪还可以包括混合器以将参考信号与来自麦克风的交流电信号混合，以将频谱移动到与微细谐振器的谐振频率更好匹配的频率范围。微声谱分析仪可以专门设计用于便携性，尺寸，成本，精度，速度，功率要求和在恶劣环境中的使用。微声谱分析仪特别适用于尺寸，可达性和功率要求有限的应用，例如监测工业设备和工艺，检测安全入侵或评估军事威胁。

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