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1. 发明授权

US07145143B2 Tunable sensor 失效
标题翻译：可调谐传感器
公开(公告)号：US07145143B2
公开(公告)日：2006-12-05
申请号：US10749710
申请日：2003-12-31
申请人： Roland A. Wood , Barrett E. Cole , Robert E. Higashi , Daniel W. Youngner
发明人： Roland A. Wood , Barrett E. Cole , Robert E. Higashi , Daniel W. Youngner
IPC分类号： G01B9/02 , G01J3/45
CPC分类号： G01J3/26 , G01B11/272 , G01J3/36 , G01J3/427 , G01J5/023 , G01J5/10 , G01J5/20 , G02B5/284 , G02B26/001 , H01L27/14621 , H01L31/02024 , H01L31/02162 , H01L31/02325 , H01L2224/48091 , H01L2224/73204 , H01L2924/00014
摘要： A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.
摘要翻译：一种用于在特定频率和宽带模式下从目标检测红外光（IR）的可调式辐射热量计装置。该装置可以具有其每个可控制的像素阵列，以对被选择和检测的特定波长的光敏感。像素级别上的特定频率的检测可能导致目标的频谱分析。此外，测辐射热计的每个像素通过相关联的标准具可被调谐以检测IR的不同频率或被切换到IR的宽带检测。该器件可以封装在集成的真空封装中，其中标准具阵列变成顶盖，其结合到包含测辐射热计阵列的晶片。

2. 发明授权

US07170059B2 Planar thermal array 有权
标题翻译：平面热阵列
公开(公告)号：US07170059B2
公开(公告)日：2007-01-30
申请号：US10678527
申请日：2003-10-03
申请人： Roland A. Wood , Robert E. Higashi , Barrett E. Cole
发明人： Roland A. Wood , Robert E. Higashi , Barrett E. Cole
IPC分类号： G01J5/00
CPC分类号： H01L27/14649 , G01J5/20
摘要： A thermal sensor structure having one level for an infrared detecting pixel including the sensor associated electronics. The electronics displace a small area thereby having little effect on the fill area of the pixel relative to a level having no pixel electronics. That level has thermally isolation for the substrate through the limited structural attachment to the substrate because of the access vias to the silicon. It has additional isolation because of a pit of removed silicon from the substrate below that one level. The thermal sensor may have an array with a large number of pixels having the one level for the pixels and electronics structure.
摘要翻译：一种热传感器结构，其具有用于红外检测像素的一个级别，该像素包括与传感器相关电子装置移动一个小区域，从而对像素的填充面积相对于没有像素电子装置的水平几乎没有影响。由于通向硅的通路，该水平通过与衬底的有限结构连接而对衬底进行热隔离。它具有额外的隔离，因为从低于该水平面的衬底去除硅的坑。热传感器可以具有具有用于像素和电子结构的一个级别的大量像素的阵列。

3. 发明申请

US20090283759A1 MOS LOW POWER SENSOR WITH SACRIFICAL MEMBRANE 有权
标题翻译： MOS低功率传感器与密封膜
公开(公告)号：US20090283759A1
公开(公告)日：2009-11-19
申请号：US12119872
申请日：2008-05-13
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： H01L29/43 , H01L21/28
CPC分类号： H01L27/14669 , H01L27/14689
摘要： A metal oxide semiconductor (MOS) device includes a substrate, a lower sacrificial membrane adjacent to the substrate, an upper thin film structure adjacent to the lower membrane, and a MOS material deposited on the upper thin film structure.
摘要翻译：金属氧化物半导体（MOS）器件包括衬底，与衬底相邻的下牺牲膜，邻近下膜的上薄膜结构和沉积在上薄膜结构上的MOS材料。

4. 发明授权

US07470894B2 Multi-substrate package assembly 失效
标题翻译：多基板封装组合
公开(公告)号：US07470894B2
公开(公告)日：2008-12-30
申请号：US11383380
申请日：2006-05-15
申请人： Barrett E. Cole , Robert E. Higashi , Christopher J. Zins , Subash Krishnankutty
发明人： Barrett E. Cole , Robert E. Higashi , Christopher J. Zins , Subash Krishnankutty
IPC分类号： H01J5/02
CPC分类号： G01J3/02 , G01J3/0256 , G01J3/26 , H01L31/02162 , H01L31/105 , H01L31/109
摘要： A multi-substrate package assembly having a first substrate, a second substrate and a package, each with a number of bond pads. The package includes a cavity for receiving either or both of the first and second substrates, with a number of bond pads positioned along at least part of the periphery of the cavity. The first substrate and the second substrate are preferably positioned in the cavity of the package, with selected bond pads of the first substrate and second substrate electrically connected to selected bond pads of the package. In some embodiments, the bond pads of the first substrate are only connected to bond pads on one or more sides of the cavity, and the bond pads of the second substrate are only connected to bond pads on one or more of the remaining sides of the cavity. The packaging assembly of the present invention can be used in many applications, including spectrally tunable optical detectors.
摘要翻译：一种具有第一基板，第二基板和封装的多基板封装组件，每个具有多个接合焊盘。该封装包括用于接收第一和第二基板中的一个或两个的空腔，其中多个接合焊盘沿着空腔的至少一部分周边定位。第一基板和第二基板优选地定位在封装的空腔中，其中第一基板和第二基板的选定的接合焊盘电连接到封装的选定的接合焊盘。在一些实施例中，第一衬底的接合焊盘仅连接到空腔的一侧或多侧上的接合焊盘，并且第二衬底的接合焊盘仅连接到第一衬底的一个或多个侧面上的接合焊盘腔。本发明的包装组件可用于许多应用中，包括光谱可调光学检测器。

5. 发明授权

US06949931B2 Nanotube sensor 有权
标题翻译：纳米管传感器
公开(公告)号：US06949931B2
公开(公告)日：2005-09-27
申请号：US10304351
申请日：2002-11-26
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： G01N27/00 , G01N27/414 , G01N27/62
CPC分类号： G01N27/4146 , Y10S977/953
摘要： A sensor having a nanotube grown on and supported by thermal bimorph structures. The nanotube rests on a heat sink during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink may function as a gate along with the bimorph structures as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.
摘要翻译：具有生长在热双晶体结构上并由其支撑的纳米管的传感器。在感测气体或液体期间，纳米管位于散热器上，并且当加热纳米管以从其中解吸气体或液体时，其从散热器移动。作为晶体管的其他端子，散热器可以与双压电晶片结构一起作为栅极。作为像晶体管的器件，可以获得电流 - 电压和电流 - 栅极电压特性。这些特性可以提供关于纳米管吸收的气体或液体的信息。

6. 发明授权

US5886249A Micromachined integrated opto-flow gas/liquid sensor 失效
公开(公告)号：US5886249A
公开(公告)日：1999-03-23
申请号：US55621
申请日：1998-04-06
申请人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
发明人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
IPC分类号： G01N21/03 , G01N21/17 , G01N21/35 , G01N21/37 , G01N21/33
CPC分类号： G01N21/37 , G01N21/03 , G01N21/1702 , G01N21/3504 , G01N2021/0346
摘要： A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.

7. 发明授权

US5869749A Micromachined integrated opto-flow gas/liquid sensor 失效
标题翻译：微加工集成光电气体/液体传感器
公开(公告)号：US5869749A
公开(公告)日：1999-02-09
申请号：US841748
申请日：1997-04-30
申请人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
发明人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
IPC分类号： G01N21/03 , G01N21/17 , G01N21/35 , G01N21/37
CPC分类号： G01N21/37 , G01N21/03 , G01N21/1702 , G01N21/3504 , G01N2021/0346
摘要： A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.
摘要翻译：具有快速强度变化或脉冲光源的微加工的集成光流式或光声传感器，干涉滤光器，气腔，其可以或可以不是调谐到特定波长的光的光学和/或声学谐振器或声音频率，检测到的气体可以通过过滤器扩散到其中;以及流体或压力传感器以检测加热和冷却，以及由于通过在特定波长处吸收光而导致的气体的膨胀和收缩被检测的特定气体。从检测到的气体推断其他气体的存在。

8. 发明授权

US07075629B2 High temperature pyrometer 有权
标题翻译：高温高温计
公开(公告)号：US07075629B2
公开(公告)日：2006-07-11
申请号：US10436391
申请日：2003-05-12
申请人： Ulrich Bonne , Barrett E. Cole , Roland A. Wood , Rudolph Dudebout , Emmanuel Nwadiogbu
发明人： Ulrich Bonne , Barrett E. Cole , Roland A. Wood , Rudolph Dudebout , Emmanuel Nwadiogbu
IPC分类号： G01J5/48
CPC分类号： G01J5/48 , G01J5/60
摘要： A pyrometer having at least two detectors and at least two band-pass filters near each to limit the detectable wavelength band emitted by an object, and a device to exchange their filters to eliminate detector output ratio errors. The detector output ratio is then used to derive the color temperature of the object, which may have fast changes in emission intensity output.
摘要翻译：具有至少两个检测器和每个附近的至少两个带通滤波器的高温计限制由对象发射的可检测波长带，以及用于交换其滤波器以消除检测器输出比误差的装置。然后使用检测器输出比率来导出对象的色温，其可能具有发射强度输出的快速变化。

9. 发明授权

US07468515B2 Ultra violet light sensor 有权
标题翻译：紫外光传感器
公开(公告)号：US07468515B2
公开(公告)日：2008-12-23
申请号：US11164946
申请日：2005-12-12
申请人： Barrett E. Cole , Robert E. Higashi , James Bartels , Norm Planer , Gregg Swanson
发明人： Barrett E. Cole , Robert E. Higashi , James Bartels , Norm Planer , Gregg Swanson
IPC分类号： G01J1/42
CPC分类号： G01J1/429 , G01J1/02 , G01J1/0271 , H01J47/02
摘要： A light detector having spaced electrodes preset by pins or a spacer within a sealed enclosure. The detector may have a MEMS structure that is separate from the sealing of the enclosure. Further, the detector may have a lens for the transmission of light onto the elements. The lens may be coated to affect the amount of light admitted into the enclosure. Light detectable by the sensor may be ultra-violet.
摘要翻译：光检测器，其具有由密封壳体内的引脚或间隔物预设的间隔电极。检测器可以具有与外壳的密封分开的MEMS结构。此外，检测器可以具有用于将光传输到元件上的透镜。透镜可以被涂覆以影响进入外壳的光量。由传感器检测到的光可以是紫外线。

10. 发明授权

US07071566B2 Multi-substrate package assembly 失效
公开(公告)号：US07071566B2
公开(公告)日：2006-07-04
申请号：US10154577
申请日：2002-05-23
申请人： Barrett E. Cole , Robert E. Higashi , Christopher J. Zins , Subash Krishnankutty
发明人： Barrett E. Cole , Robert E. Higashi , Christopher J. Zins , Subash Krishnankutty
IPC分类号： H01L23/48 , H01L23/52
CPC分类号： G02B5/284 , G01B11/272 , G01J3/26 , G01J3/36 , G01J3/427 , G01J5/20 , G02B26/001 , H01L27/14621 , H01L31/02024 , H01L31/02162 , H01L31/02325 , H01L2224/05568 , H01L2224/05573 , H01L2224/13 , H01L2224/48091 , H01L2924/00014
摘要： A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The substrates are secured relative to one another to form the spectrally tunable optical detector.

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