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    • 5. 发明授权
    • Method of making tapered semiconductor waveguides
    • 制造锥形半导体波导的方法
    • US4944838A
    • 1990-07-31
    • US389074
    • 1989-08-03
    • Thomas L. KochUziel Koren
    • Thomas L. KochUziel Koren
    • G02B6/136H01L21/306H01S5/323
    • H01L21/30612G02B6/136H01S5/32391
    • Adiabatic mode control and structural reproducibility are achieved by a tapered semiconductor waveguide structure wherein semiconductor guiding layers are interleaved with stop-etch layers and each guiding layer extends further along the propagation axis of the waveguide further than the guiding layer immediately adjacent thereabove to create a staircase-like core or guiding structure. Cladding regions of appropriate semiconductor material having a lower index of refraction than the tapered core structure may be added to completely surround the tapered guiding structure. The profile of the tapered structure is realizable as any desired staircase-like shape such as linear, parabolic, exponential or the like. Additional layers of higher index of refraction semiconductor material may be included in the cladding region to permit additional beam shaping of the expanded spatial mode propagating along the tapered waveguide.Photolithographic masks defining successively larger exposed areas are aligned, deposited over the waveguide structure, and then removed following each etching step. Material selective etching techniques are employed to remove exposed (unmasked) portions of guiding layers. In sequence, the exposed, formerly underlying portions of the stop-etch layers are then removed using material selective etching. Iteration of the above process steps permits a tapered waveguide structure to be defined.
    • 绝热模式控制和结构再现性通过锥形半导体波导结构实现,其中半导体引导层与停止蚀刻层交错,并且每个引导层沿着波导的传播轴进一步延伸,远离其上方紧邻的引导层,以产生阶梯 型芯或引导结构。 可以添加具有比锥形芯结构更低的折射率的适当的半导体材料的包层区域以完全包围锥形引导结构。 锥形结构的轮廓可实现为任何所需的阶梯状形状,例如线性,抛物线形,指数型等。 可以在包层区域中包含更高折射率的折射率半导体材料的附加层,以允许沿着锥形波导传播的扩展空间模式的附加束成形。 定义连续较大的暴露区域的光刻掩模对准,沉积在波导结构上,然后在每个蚀刻步骤之后被移除。 使用材料选择性蚀刻技术来去除引导层的暴露(未掩蔽)部分。 顺序地,然后使用材料选择性蚀刻去除停止蚀刻层的暴露的先前的下面的部分。 上述工艺步骤的迭代允许限定锥形波导结构。
    • 9. 发明授权
    • Tapered semiconductor waveguides
    • 锥形半导体波导
    • US4932032A
    • 1990-06-05
    • US389087
    • 1989-08-03
    • Thomas L. KochUziel Koren
    • Thomas L. KochUziel Koren
    • G02B6/122G02B6/30H01S5/10H01S5/323
    • G02B6/305G02B6/1228H01S5/1032H01S5/1014H01S5/32391
    • Adiabatic mode control and structural reproducibility are achieved by a tapered semiconductor waveguide structure wherein semiconductor guiding layers are interleaved with stop-etch layers and each successive guiding layer extends further along the propagation axis of the waveguide than the guiding layer immediately adjacent thereabove to create a staircase-like core or guiding structure. Cladding regions of appropriate semiconductor material having a lower index of refraction than the tapered core structure may be added to completely surround the tapered guiding structure. The profile of the tapered structure is realizable as any desired staircase-like shape such as linear, parabolic, exponential or the like. Additional layers of higher index of refraction semiconductor material may be included in the cladding region to permit additional beam shaping of the expanded spatial mode propagating along the tapered waveguide.
    • 通过锥形半导体波导结构实现绝热模式控制和结构再现性,其中半导体引导层与停止蚀刻层交错,并且每个连续的引导层沿着波导的传播轴进一步延伸,而不是紧邻其上方的引导层以产生阶梯 型芯或引导结构。 可以添加具有比锥形芯结构更低的折射率的适当的半导体材料的包层区域以完全包围锥形引导结构。 锥形结构的轮廓可实现为任何所需的阶梯状形状,例如线性,抛物线形,指数型等。 可以在包层区域中包含更高折射率的折射率半导体材料的附加层,以允许沿着锥形波导传播的扩展空间模式的附加束成形。
    • 10. 发明授权
    • Optical communication system employing spectrally sliced optical source
    • 光通信系统采用光谱切片光源
    • US5861965A
    • 1999-01-19
    • US706029
    • 1996-08-30
    • Uziel KorenKang-Yih Liou
    • Uziel KorenKang-Yih Liou
    • G02B6/293H04B10/272H04J14/00H04J14/02H04J14/08
    • H04B10/272H04J14/02H04J14/08
    • An apparatus and method provides optical multiple wavelength signals using a single, broadband optical source such, for example, as an LED, to generate many independent optical wavelength channels. An optical transmitter includes a wavelength channel defining assembly which resolves the broad spectrum pulses output by the source into discrete wavelength bands constituting respective pulses (i.e., wavelength channels) and which inserts a delay between the bands to define a sequence of individually addressable channels.In accordance with one embodiment of the invention, spectral splicing is achieved by a multiple channel filter, and insertion of the respective delays is achieved by individual fiber sections, each section having a length selected to introduce a particular delay, coupled to the output ports of the router. The inserted delays can be conveniently selected to separate adjacent wavelength channels and thereby minimize the likelihood of crosstalk. Pulses of the thus-resolved channels arrive at different times to a multiplexer which may be configured, for example, as a passive WDM multiplexer or as a star combiner. The resulting sequence of addressable wavelength channels may be supplied to one or more high-speed, broadband modulators, with each modulator being operable to modulate some or all of the channels.
    • 一种装置和方法使用单个宽带光源(例如LED)提供光学多波长信号,以产生许多独立的光波长通道。 光发射器包括波长通道限定组件,其将由源输出的广谱脉冲解析成构成相应脉冲(即,波长通道)的离散波长带,并且在波段之间插入延迟以限定可单独寻址的通道序列。 根据本发明的一个实施例,通过多通道滤波器实现频谱拼接,并且各个延迟的插入由各个光纤部分实现,每个部分具有选择的长度以引入特定延迟,耦合到输出端口 路由器 可以方便地选择插入的延迟以分离相邻的波长信道,从而使串扰的可能性最小化。 如此分辨的信道的脉冲到达可被配置为例如无源WDM多路复用器或星形组合器的多路复用器的不同时间。 所得到的可寻址波长信道序列可以被提供给一个或多个高速宽带调制器,每个调制器可操作以调制一些或全部信道。