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    • 3. 发明授权
    • High current ion source
    • 高电流离子源
    • US4562355A
    • 1985-12-31
    • US706746
    • 1985-02-28
    • Roderich KellerFritz Nohmayer
    • Roderich KellerFritz Nohmayer
    • H01J27/02H01J49/14H01J27/00
    • H01J49/142H01J27/02
    • A high current ion source for generating ion beams from gases and non-volatile materials which comprises a furnace-cathode unit for generating vapor to be ionized, a major source unit for ionizing the vapor generated in the furnace-cathode chamber and an extraction unit for removing the ions from the major source unit. The three units are removably sealed to each other by vacuum-tight seals. The furnace-cathode unit includes a furnace chamber, the major source unit includes a discharge chamber and the extraction unit a source outlet electrode. Connecting means couple the furnace chamber to the discharge chamber, and suspension means are provided for suspending the components from surrounding flanges.
    • 一种用于从气体和非挥发性材料产生离子束的高电流离子源,其包括用于产生要离子化的蒸汽的炉 - 阴极单元,用于电离炉 - 阴极室中产生的蒸汽的主要源单元和用于 从主要源单元去除离子。 三个单元通过真空密封可拆卸地彼此密封。 炉 - 阴极单元包括炉室,主源单元包括排出室,提取单元包括源出口电极。 连接装置将炉室连接到排放室,并且提供悬挂装置用于将部件悬置在周围的凸缘上。