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1. 发明授权

US07173688B2 Method for calculating an intensity integral for use in lithography systems 有权
标题翻译：用于计算光刻系统中使用的强度积分的方法
公开(公告)号：US07173688B2
公开(公告)日：2007-02-06
申请号：US11022888
申请日：2004-12-28
申请人： Roberto B. Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
发明人： Roberto B. Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
IPC分类号： G03B27/72 , G03B27/42
CPC分类号： G02B27/0012 , G02B7/346 , G03F7/70125 , G03F7/70191
摘要： A system and method for uniformity correction such that a defined uniformity specification is met while minimizing a set of selected constraints is provided. The system includes illumination optics, an opto-mechanical correction system, a contrast device, projection optics and a correction module coupled to the correction system. The correction system includes a plurality of adjustable components such as fingers. The correction module is configured to determine adjustments to the components to correct uniformity. A method for discretizing the continuous intensity integral is also provided. The illumination slot is divided into a grid having multiple grid points. “pupils” are then superimposed onto the grid. Multiple second grids are also defined. Each ““pupil”” is mapped to a second grid such that the center of the second grid is coincident with the ““pupil”” center. The continuous intensity integral is then discretized using the first grid, plurality of second grids, and ““pupil”” mappings.
摘要翻译：一种用于均匀性校正的系统和方法，使得满足定义的均匀性规范，同时使得一组选定的约束最小化。该系统包括照明光学器件，光学机械校正系统，对比度装置，投影光学器件和耦合到校正系统的校正模块。校正系统包括多个可调组件，例如手指。校正模块被配置为确定对组件的调整以校正均匀性。还提供了一种用于离散连续强度积分的方法。照明槽被分成具有多个网格点的网格。 “瞳孔”然后叠加到网格上。还定义了多个第二个网格。每个“”瞳孔“”被映射到第二格子，使得第二格子的中心与“瞳孔”中心一致。然后使用第一格栅，多个第二格栅和“”瞳孔“”映射离散化连续强度积分。

2. 发明授权

US07333176B2 De-focus uniformity correction 有权
标题翻译：去焦均匀性校正
公开(公告)号：US07333176B2
公开(公告)日：2008-02-19
申请号：US11647419
申请日：2006-12-29
申请人： Roberto B. Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
发明人： Roberto B. Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
IPC分类号： G03B27/52 , G03B27/42 , G03B27/72
CPC分类号： G02B27/0012 , G02B7/346 , G03F7/70125 , G03F7/70191
摘要： A system and method for uniformity correction such that a defined uniformity specification is met while minimizing a set of selected constraints is provided. The system includes illumination optics, an opto-mechanical correction system, a contrast device, projection optics and a correction module coupled to the correction system. The correction system includes a plurality of adjustable components such as fingers. The correction module is configured to determine adjustments to the components to correct uniformity. A method for discretizing the continuous intensity integral is also provided. The illumination slot is divided into a grid having multiple grid points. “pupils” are then superimposed onto the grid. Multiple second grids are also defined. Each ““pupil”” is mapped to a second grid such that the center of the second grid is coincident with the ““pupil”” center. The continuous intensity integral is then discretized using the first grid, plurality of second grids, and ““pupil”” mappings.
摘要翻译：一种用于均匀性校正的系统和方法，使得满足定义的均匀性规范，同时使得一组选定的约束最小化。该系统包括照明光学器件，光学机械校正系统，对比度装置，投影光学器件和耦合到校正系统的校正模块。校正系统包括多个可调组件，例如手指。校正模块被配置为确定对组件的调整以校正均匀性。还提供了一种用于离散连续强度积分的方法。照明槽被分成具有多个网格点的网格。 “瞳孔”然后叠加到网格上。还定义了多个第二个网格。每个“”瞳孔“”被映射到第二格子，使得第二格子的中心与“瞳孔”中心一致。然后使用第一格栅，多个第二格栅和“”瞳孔“”映射离散化连续强度积分。

3. 发明申请

US20060139608A1 De-focus uniformity correction 有权
标题翻译：去焦均匀性校正
公开(公告)号：US20060139608A1
公开(公告)日：2006-06-29
申请号：US11022888
申请日：2004-12-28
申请人： Roberto Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
发明人： Roberto Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
IPC分类号： G03B27/54
CPC分类号： G02B27/0012 , G02B7/346 , G03F7/70125 , G03F7/70191
摘要： A system and method for uniformity correction such that a defined uniformity specification is met while minimizing a set of selected constraints is provided. The system includes illumination optics, an opto-mechanical correction system, a contrast device, projection optics and a correction module coupled to the correction system. The correction system includes a plurality of adjustable components such as fingers. The correction module is configured to determine adjustments to the components to correct uniformity. A method for discretizing the continuous intensity integral is also provided. The illumination slot is divided into a grid having multiple grid points. “pupils” are then superimposed onto the grid. Multiple second grids are also defined. Each ““pupil”” is mapped to a second grid such that the center of the second grid is coincident with the ““pupil”” center. The continuous intensity integral is then discretized using the first grid, plurality of second grids, and ““pupil”” mappings.
摘要翻译：一种用于均匀性校正的系统和方法，使得满足定义的均匀性规范，同时使得一组选定的约束最小化。该系统包括照明光学器件，光学机械校正系统，对比度装置，投影光学器件和耦合到校正系统的校正模块。校正系统包括多个可调组件，例如手指。校正模块被配置为确定对组件的调整以校正均匀性。还提供了用于离散连续强度积分的方法。照明槽被分成具有多个网格点的网格。 “瞳孔”然后叠加到网格上。还定义了多个第二个网格。每个“”瞳孔“”被映射到第二格子，使得第二格子的中心与“瞳孔”中心一致。然后使用第一格栅，多个第二格栅和“”瞳孔“”映射离散化连续强度积分。

4. 发明申请

US20070109518A1 De-focus uniformity correction 有权
标题翻译：去焦均匀性校正
公开(公告)号：US20070109518A1
公开(公告)日：2007-05-17
申请号：US11647419
申请日：2006-12-29
申请人： Roberto Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
发明人： Roberto Wiener , Alexander Kremer , Elizabeth Stone , Richard Zimmerman
IPC分类号： G03B27/52
CPC分类号： G02B27/0012 , G02B7/346 , G03F7/70125 , G03F7/70191
摘要： A system and method for uniformity correction such that a defined uniformity specification is met while minimizing a set of selected constraints is provided. The system includes illumination optics, an opto-mechanical correction system, a contrast device, projection optics and a correction module coupled to the correction system. The correction system includes a plurality of adjustable components such as fingers. The correction module is configured to determine adjustments to the components to correct uniformity. A method for discretizing the continuous intensity integral is also provided. The illumination slot is divided into a grid having multiple grid points. “pupils” are then superimposed onto the grid. Multiple second grids are also defined. Each “pupil” is mapped to a second grid such that the center of the second grid is coincident with the “pupil” center. The continuous intensity integral is then discretized using the first grid, plurality of second grids, and “pupil” mappings.
摘要翻译：一种用于均匀性校正的系统和方法，使得满足定义的均匀性规范，同时使得一组选定的约束最小化。该系统包括照明光学器件，光学机械校正系统，对比度装置，投影光学器件和耦合到校正系统的校正模块。校正系统包括多个可调组件，例如手指。校正模块被配置为确定对组件的调整以校正均匀性。还提供了一种用于离散连续强度积分的方法。照明槽被分成具有多个网格点的网格。 “瞳孔”然后叠加到网格上。还定义了多个第二个网格。每个“瞳孔”被映射到第二格子，使得第二格子的中心与“瞳孔”中心重合。然后使用第一格栅，多个第二格栅和“瞳孔”映射离散化连续强度积分。

5. 发明申请

US20090046338A1 Beam Positioning and Pointing 有权
标题翻译：光束定位和指向
公开(公告)号：US20090046338A1
公开(公告)日：2009-02-19
申请号：US11840821
申请日：2007-08-17
申请人： Richard Zimmerman , Roberto B. Wiener
发明人： Richard Zimmerman , Roberto B. Wiener
IPC分类号： G02B26/08
CPC分类号： G03F7/7085 , G02B26/0875 , G03F7/70191
摘要： A beam pointing and positioning system includes a first lens, movable in a first plane perpendicular to a nominal optical axis, which receives and positions a light beam. The system also includes a second lens, movable in a second plane perpendicular to the nominal optical axis, which receives and points the positioned light beam. The system is thereby capable of directing the light beam to a desired location at a desired angle. The system may also include a beam splitter that receives, transmits, and reflects the pointed light beam, one or more sensors that receive the reflected light beam, and a controller coupled to the sensor(s) and first and second lenses. The controller may control the positioning of the first and second lenses based on beam position and pointing data and/or signals received from the sensor(s). A method of positioning and pointing a light beam is also presented.
摘要翻译：光束指向和定位系统包括可在垂直于标称光轴的第一平面中移动的第一透镜，其接收并定位光束。该系统还包括可在垂直于标称光轴的第二平面中移动的第二透镜，其接收并指向定位的光束。因此，该系统能够以期望的角度将光束引导到期望的位置。该系统还可以包括接收，透射和反射尖锐光束的束分离器，接收反射光束的一个或多个传感器以及耦合到传感器和第一和第二透镜的控制器。控制器可以基于从传感器接收的波束位置和指向数据和/或信号来控制第一和第二透镜的定位。还提出了一种定位和指向光束的方法。

6. 发明申请

US20070103665A1 System and method for uniformity correction 有权
标题翻译：用于均匀校正的系统和方法
公开(公告)号：US20070103665A1
公开(公告)日：2007-05-10
申请号：US11295517
申请日：2005-12-07
申请人： Richard Zimmerman , Eric Catey , David Hult , Alexander Kremer , Heine Mulder , Hendrikus Greevenbroek , Roberto Wiener
发明人： Richard Zimmerman , Eric Catey , David Hult , Alexander Kremer , Heine Mulder , Hendrikus Greevenbroek , Roberto Wiener
IPC分类号： G03B27/80
CPC分类号： G02B27/0012 , G02B7/346 , G03F7/70125 , G03F7/70191
摘要： A system and method for uniformity correction is provided. The system includes a plurality of winged correction elements inserted into the illumination field in a defined configuration. Adjacent winged correction elements are overlapped to minimize induced uniformity ripple. Each winged correction element has a first protrusion on a longitudinal edge of the correction element and a second protrusion on the opposite longitudinal edge. The slope of a sloped edge of the first protrusion and the slope of a sloped edge of the second protrusion are tied to the slope of a gradient in the non-uniformity profile of the illumination field. In addition, the angles defined by the flat tip of the correction element and the sloped edge of the first and second protrusions are tied to the angle of a gradient of the illumination field.
摘要翻译：提供了一种用于均匀性校正的系统和方法。该系统包括以限定的构造插入到照明场中的多个翼状校正元件。相邻的有翼校正元件被重叠以最小化诱导的均匀性纹波。每个翼状校正元件在校正元件的纵向边缘上具有第一突出部，并且在相对的纵向边缘上具有第二突起。第一突起的倾斜边缘的斜率和第二突起的倾斜边缘的斜率与照明场的不均匀轮廓中的梯度的斜率相关联。此外，由校正元件的平坦尖端和第一和第二突起的倾斜边缘限定的角度与照明场的梯度的角度相关联。

7. 发明申请

US20070145715A1 Trailer Tongue Comprising Rapid Telescoping and Pivotal Adjustment Mechanisms 审中-公开
标题翻译：拖车舌头包括快速伸缩和枢纽调整机制
公开(公告)号：US20070145715A1
公开(公告)日：2007-06-28
申请号：US11615071
申请日：2006-12-22
申请人： Richard Zimmerman
发明人： Richard Zimmerman
IPC分类号： B60D1/40
CPC分类号： B60D1/155
摘要： In one embodiment the invention comprises a trailer hitch comprising: a frame having a front, a telescoping member slidably supported by the frame for telescoping from the frame front and wherein the telescoping member is movable laterally relative to the frame.
摘要翻译：在一个实施例中，本发明包括拖车牵引架，其包括：框架，其具有前部，可伸缩构件，其可滑动地由框架支撑，用于从框架前部伸缩，并且其中伸缩构件相对于框架横向移动。

8. 发明申请

US20050204276A1 Method and system for web page personalization 有权
标题翻译：网页个性化的方法和系统
公开(公告)号：US20050204276A1
公开(公告)日：2005-09-15
申请号：US11057759
申请日：2005-02-14
申请人： Devin Hosea , Richard Zimmerman , Arthur Rascon , Anthony Oddo , Nathaniel Thurston
发明人： Devin Hosea , Richard Zimmerman , Arthur Rascon , Anthony Oddo , Nathaniel Thurston
IPC分类号： G06F17/30 , G06Q10/06 , G06Q30/02 , G06F17/00 , G06F3/00
CPC分类号： G06Q30/02 , G06F17/30905 , G06Q10/06375 , G06Q30/0254 , H04L67/025 , H04L67/22 , H04L67/306
摘要： The invention includes a method and system for personalizing displays of published Web pages provided by Web content providers to meet the interests of Web users accessing the pages, based on profiles of the users. The system preferably provides to the requesting user, through a proxy server, an edited version of the HTML file for the original published Web page that is served by a host Web server. The system uses user profiles that may include demographic and psychographic data to edit the requested Web page. The content of a Web page as published by a host Web server may be coded to correlate components of the Web page with demographic and psychographic data. The user profiles may then be used to filter the content of a coded Web page for delivery to a requesting user. The system may rearrange content on a published Web page so that content determined to be of higher interest to a user is more prominently featured or more easily or quickly accessible. The system may also delete content on a published Web page that is determined to be of low interest to a user. In embodiments of the invention, a single proxy server or proxy server system personalizes Web pages from multiple Web servers, using a single user profile for a user.
摘要翻译：本发明包括一种用于个性化由Web内容提供商提供的已发布网页的显示的方法和系统，以便基于用户的简档来满足访问页面的Web用户的兴趣。该系统优选地通过代理服务器向请求用户提供由主机Web服务器服务的原始发布的网页的HTML文件的编辑版本。该系统使用可以包括人口统计学和心理学数据的用户简档来编辑所请求的网页。由主机Web服务器发布的网页的内容可以被编码以将网页的组件与人口统计学和心理学数据相关联。然后可以使用用户简档来过滤编码网页的内容，以便传送到请求用户。该系统可以重新排列已发布的网页上的内容，使得被确定为对用户更感兴趣的内容更显着地特征或更容易或快速地可访问。系统还可以删除被确定为对用户不感兴趣的已发布网页上的内容。在本发明的实施例中，单个代理服务器或代理服务器系统使用针对用户的单个用户简档个性化来自多个Web服务器的网页。

9. 发明申请

US20100153050A1 Autonomous Underwater Vehicle Borne Gravity Meter 审中-公开
标题翻译：自主水下车载重力仪
公开(公告)号：US20100153050A1
公开(公告)日：2010-06-17
申请号：US12617688
申请日：2009-11-12
申请人： Mark A. Zumberge , Glenn Sasagawa , Richard Zimmerman , Jeff Ridgway
发明人： Mark A. Zumberge , Glenn Sasagawa , Richard Zimmerman , Jeff Ridgway
IPC分类号： G01V7/00 , G05D1/00 , B63G8/00 , G06F19/00
CPC分类号： G01V7/16
摘要： Techniques and systems are disclosed for performing a gravity survey near the seafloor. In one aspect, a system includes an autonomous underwater vehicle that includes a sensor system holding area. The system includes a gravity sensor system to fit inside the sensor system holding area of the autonomous underwater vehicle. The gravity sensor system includes a motorized gimbal to provide a leveled sensor platform. Also, the gravity sensor system includes a gravimeter sensor mounted onto the motorized gimbal to measure gravity data. Further, the payload includes a motion sensor mounted onto the motorized gimbal to measure motion data associated with movements of the autonomous underwater vehicle.
摘要翻译：公开了用于在海底附近执行重力测量的技术和系统。一方面，一种系统包括一个包括传感器系统保持区域的自主水下航行器。该系统包括重力传感器系统，以配合在自主水下航行器的传感器系统保持区域内。重力传感器系统包括一个电动万向架，以提供一个平整的传感器平台。此外，重力传感器系统包括安装在机动万向架上的重力传感器以测量重力数据。此外，有效载荷包括安装在机动万向架上的运动传感器，以测量与自主水下航行器的运动相关的运动数据。

10. 发明申请

US20130054606A1 SPATIAL PROCESSING SYSTEM, SOFTWARE AND METHOD 审中-公开
标题翻译：空间处理系统，软件和方法
公开(公告)号：US20130054606A1
公开(公告)日：2013-02-28
申请号：US13596008
申请日：2012-08-27
申请人： Richard Zimmerman
发明人： Richard Zimmerman
IPC分类号： G06F17/30
CPC分类号： G06F16/444
摘要： A system, software and method which enable the analysis of a spatial database.
摘要翻译：一种能够分析空间数据库的系统，软件和方法。

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