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1. 发明申请

US20090077805A1 PHOTOVOLTAIC PRODUCTION LINE 失效
标题翻译：光伏生产线
公开(公告)号：US20090077805A1
公开(公告)日：2009-03-26
申请号：US12202199
申请日：2008-08-29
申请人： Robert Z. BACHRACH , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michael R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. BACHRACH , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michael R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L31/18 , H05K13/00
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个处理室，该处理室适于在衬底的表面上沉积含硅层，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

2. 发明申请

US20090077804A1 PRODUCTION LINE MODULE FOR FORMING MULTIPLE SIZED PHOTOVOLTAIC DEVICES 审中-公开
标题翻译：用于形成多个大小的光伏器件的生产线模块
公开(公告)号：US20090077804A1
公开(公告)日：2009-03-26
申请号：US12201840
申请日：2008-08-29
申请人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L31/18 , H01L21/304 , B26F3/00
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.
摘要翻译：本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

3. 发明授权

US08225496B2 Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated 失效
标题翻译：由多个自动模块和工具组成的自动化集成太阳能电池生产线，包括用于固化已层压的太阳能装置的高压釜
公开(公告)号：US08225496B2
公开(公告)日：2012-07-24
申请号：US12202199
申请日：2008-08-29
申请人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G. J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J. B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G. J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J. B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L51/44 , H01L51/48 , H01L21/768 , H01L31/072
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

4. 发明申请

US20100047954A1 PHOTOVOLTAIC PRODUCTION LINE 审中-公开
标题翻译：光伏生产线
公开(公告)号：US20100047954A1
公开(公告)日：2010-02-25
申请号：US12548273
申请日：2009-08-26
申请人： Tzay-Fa (Jeff) Su , Hien-Minh Huu Le , Fang Mei , Yong-kee Chae , Michel R. Frei , Asaf Schlezinger , Shuran Sheng , Jeffrey S. Sullivan , David Tanner
发明人： Tzay-Fa (Jeff) Su , Hien-Minh Huu Le , Fang Mei , Yong-kee Chae , Michel R. Frei , Asaf Schlezinger , Shuran Sheng , Jeffrey S. Sullivan , David Tanner
IPC分类号： H01L31/18
CPC分类号： B26F3/002 , B23K26/364 , B23K26/40 , B23K2103/172 , B26F3/004 , B65G49/064 , B65G49/068 , B65G2249/02 , C03B33/0222 , H01L21/67115 , H01L21/67236 , H01L21/67259 , H01L21/67276 , H01L21/67706 , H01L21/67712 , H01L21/67727 , H01L21/67748 , H01L21/6776 , H01L21/681 , H01L31/02008 , H01L31/075 , H01L31/076 , H01L31/1876 , Y02E10/548 , Y02P40/57 , Y02P70/521
摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

5. 发明申请

US20110177648A1 METHOD OF MANUFACTURING THIN FILM SOLAR CELLS HAVING A HIGH CONVERSION EFFICIENCY 失效
标题翻译：制造具有高转换效率的薄膜太阳能电池的方法
公开(公告)号：US20110177648A1
公开(公告)日：2011-07-21
申请号：US12980132
申请日：2010-12-28
申请人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
发明人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
IPC分类号： H01L31/0352
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供一种用于形成太阳能电池的方法和装置。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置在导电接触层在第一透明导电氧化物层上形成在导电接触层上的第一pin结，以及形成在第一pin结上的第二透明导电氧化物层。

6. 发明授权

US08252624B2 Method of manufacturing thin film solar cells having a high conversion efficiency 失效
标题翻译：具有高转换效率的薄膜太阳能电池的制造方法
公开(公告)号：US08252624B2
公开(公告)日：2012-08-28
申请号：US12980132
申请日：2010-12-28
申请人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
发明人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
IPC分类号： H01L21/00
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供一种用于形成太阳能电池的方法和装置。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置在导电接触层在第一透明导电氧化物层上形成在导电接触层上的第一pin结，以及形成在第一pin结上的第二透明导电氧化物层。

7. 发明申请

US20110174362A1 MANUFACTURE OF THIN FILM SOLAR CELLS WITH HIGH CONVERSION EFFICIENCY 审中-公开
标题翻译：具有高转换效率的薄膜太阳能电池的制造
公开(公告)号：US20110174362A1
公开(公告)日：2011-07-21
申请号：US12980135
申请日：2010-12-28
申请人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
发明人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
IPC分类号： H01L31/0248 , H01L31/02
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供一种用于形成太阳能电池的方法和装置。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置在导电接触层在第一透明导电氧化物层上形成在导电接触层上的第一pin结，以及形成在第一pin结上的第二透明导电氧化物层。

8. 发明授权

US07964430B2 Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications 失效
标题翻译：在适用于太阳能电池应用的激光划线透明导电氧化物层上沉积硅层
公开(公告)号：US07964430B2
公开(公告)日：2011-06-21
申请号：US11752823
申请日：2007-05-23
申请人： Tae Kyung Won , Soo Young Choi , Yong Kee Chae , Liwei Li , Shuran Sheng
发明人： Tae Kyung Won , Soo Young Choi , Yong Kee Chae , Liwei Li , Shuran Sheng
IPC分类号： H01L21/332 , H01L21/00
CPC分类号： H01L31/022466 , H01L31/04 , H01L31/1884 , Y02E10/50 , Y10S438/94
摘要： Methods and apparatus for reducing defects on transparent conducting oxide (TCO) layer are provided. In one embodiment, a method for depositing a silicon layer on a transparent conducting oxide (TCO) layer may include providing a substrate having a TCO layer disposed thereon, wherein the TCO layer has a peripheral region and a cell integrated region, the cell integrated region having laser scribing patterns disposed thereon, positioning the substrate on a substrate support assembly disposed in a processing chamber, wherein the substrate support assembly has a roughened surface in contact with the substrate, contacting a shadow frame to the peripheral region of the TCO layer and to the substrate support assembly thereby creating an electrical ground path between the TCO layer and substrate support through the shadow frame, and depositing a silicon containing layer on the TCO layer through an aperture of the shadow frame.
摘要翻译：提供了减少透明导电氧化物（TCO）层缺陷的方法和装置。在一个实施例中，用于在透明导电氧化物（TCO）层上沉积硅层的方法可以包括提供其上设置有TCO层的衬底，其中TCO层具有外围区域和电池集成区域，电池集成区域其具有设置在其上的激光划线图案，将所述基板定位在设置在处理室中的基板支撑组件上，其中所述基板支撑组件具有与所述基板接触的粗糙表面，将阴影框架接触所述TCO层的周边区域，衬底支撑组件，从而通过阴影框架在TCO层和衬底支撑件之间形成电接地路径，并且通过阴影框架的孔口在TCO层上沉积含硅层。

9. 发明授权

US07741144B2 Plasma treatment between deposition processes 失效
标题翻译：沉积工艺之间的等离子体处理
公开(公告)号：US07741144B2
公开(公告)日：2010-06-22
申请号：US12263253
申请日：2008-10-31
申请人： Soo Young Choi , Yong-Kee Chae , Shuran Sheng , Liwei Li
发明人： Soo Young Choi , Yong-Kee Chae , Shuran Sheng , Liwei Li
IPC分类号： H01L27/142
CPC分类号： H01L21/0262 , H01L21/02532 , H01L21/02576 , H01L21/02595 , H01L21/02667 , H01L31/0236 , H01L31/02366 , H01L31/075 , H01L31/076 , H01L31/186 , H01L31/202 , Y02E10/548 , Y02P70/521
摘要： Embodiments of the present invention include an improved method of forming a thin film solar cell device using a plasma processing treatment between two or more deposition steps. Embodiments of the invention also generally provide a method and apparatus for forming the same. The present invention may be used to advantage to form other single junction, tandem junction, or multi-junction solar cell devices.
摘要翻译：本发明的实施例包括使用在两个或更多个沉积步骤之间的等离子体处理处理来形成薄膜太阳能电池器件的改进方法。本发明的实施例还通常提供用于形成该方法和装置的方法和装置。本发明可用于形成其它单结，串联结或多结太阳能电池器件。

10. 发明申请

US20080289686A1 METHOD AND APPARATUS FOR DEPOSITING A SILICON LAYER ON A TRANSMITTING CONDUCTIVE OXIDE LAYER SUITABLE FOR USE IN SOLAR CELL APPLICATIONS 审中-公开
标题翻译：用于在太阳能电池应用中使用的发射导电氧化物层上的硅层沉积的方法和装置
公开(公告)号：US20080289686A1
公开(公告)日：2008-11-27
申请号：US11752794
申请日：2007-05-23
申请人： TAE KYUNG WON , Soo Young Choi , Yong Kee Chae , Liwei Li , Shuran Sheng
发明人： TAE KYUNG WON , Soo Young Choi , Yong Kee Chae , Liwei Li , Shuran Sheng
IPC分类号： H01L31/04 , C23C16/00
CPC分类号： H01L31/1884 , H01L31/022466 , H01L31/04 , Y02E10/50
摘要： Methods and apparatus for reducing defects on transmitting conducting oxide (TCO) layer are provided. In one embodiment, a method for depositing a silicon layer on a transmitting conducting oxide (TCO) layer may include providing a substrate having a TCO layer disposed thereon, wherein the TCO layer has a peripheral region and a cell integrated region, the cell integrated region having laser scribing patterns disposed thereon, positioning the substrate on a substrate support assembly disposed in a processing chamber, wherein the substrate support assembly has a roughened surface in contact with the substrate, contacting a shadow frame to the peripheral region of the TCO layer and to the substrate support assembly thereby creating an electrical ground path between the TCO layer and substrate support through the shadow frame, and depositing a silicon containing layer on the TCO layer through an aperture of the shadow frame.
摘要翻译：提供了减少传导导电氧化物（TCO）层缺陷的方法和装置。在一个实施例中，用于在透射导电氧化物（TCO）层上沉积硅层的方法可以包括提供其上设置有TCO层的衬底，其中TCO层具有外围区域和电池集成区域，电池集成区域其具有设置在其上的激光划线图案，将所述基板定位在设置在处理室中的基板支撑组件上，其中所述基板支撑组件具有与所述基板接触的粗糙表面，将阴影框架接触所述TCO层的周边区域，衬底支撑组件，从而通过阴影框架在TCO层和衬底支撑件之间形成电接地路径，并且通过阴影框架的孔口在TCO层上沉积含硅层。

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