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    • 2. 发明申请
    • VACUUM COATER DEVICE AND MECHANISM FOR SUPPORTING AND MANIPULATING WORKPIECES IN SAME
    • 用于支持和操作其工作的真空涂料装置和机构
    • US20080223291A1
    • 2008-09-18
    • US11685354
    • 2007-03-13
    • Robert William BruceTheodore Robert GrossmanJohn Douglas EvansBrian Harvey Pilsner
    • Robert William BruceTheodore Robert GrossmanJohn Douglas EvansBrian Harvey Pilsner
    • C23C14/00
    • C23C14/30C23C14/50C23C14/505C23C14/568
    • An apparatus for providing a vacuum coating to a workpiece, including: a coating chamber containing a coating material, with the coating chamber being operable at an elevated temperature and a sub-atmospheric pressure; an electron beam gun projecting an electron beam into the coating chamber and onto the coating material, where the electron beam gun is operable to melt the coating material and to evaporate molten coating material; and, a mechanism for supporting manipulating the workpiece in the coating chamber. The supporting mechanism further includes: a coupling device for retaining the workpiece; a joint connected to the coupling device enabling movement of the workpiece in all directions; an intermediate member connecting the coupling device and the joint; and, a device connected to the intermediate member for moving the workpiece in a designated vertical plane. The supporting mechanism may also include a device connected to the intermediate member for moving the workpiece in a designated horizontal plane.
    • 一种用于向工件提供真空涂层的设备,包括:包含涂层材料的涂层室,涂层室可在升高的温度和低于大气压的压力下操作; 电子束枪将电子束投射到涂覆室和涂覆材料上,其中电子束枪可操作以熔化涂层材料并蒸发熔融涂覆材料; 以及用于支撑在涂布室中操作工件的机构。 支撑机构还包括:用于保持工件的联接装置; 连接到联接装置的联接器,其能够使工件在所有方向上移动; 连接所述联接装置和所述接头的中间构件; 以及连接到中间构件的装置,用于在指定的垂直平面中移动工件。 支撑机构还可以包括连接到中间构件的装置,用于在指定的水平面中移动工件。
    • 3. 发明授权
    • Electron beam physical vapor deposition process
    • 电子束物理气相沉积工艺
    • US07128950B2
    • 2006-10-31
    • US10754419
    • 2004-01-08
    • Robert William BruceJohn Douglas Evans, Sr.
    • Robert William BruceJohn Douglas Evans, Sr.
    • C23C14/30
    • C23C14/083C23C14/30C23C14/548H01J37/3053H01J2237/3132
    • An electron beam physical vapor deposition (EBPVD) process performed with a coating apparatus to produce a coating material (e.g., a ceramic thermal barrier coating) on an article. The EBPVD apparatus generally includes a coating chamber operated at an elevated temperature and a subatmospheric pressure. The coating chamber contains a crucible and a coating material surrounded by and contained within the crucible, and the coating material has a surface exposed by the crucible. The process entails projecting an electron beam onto the surface of the coating material, wherein the electron beam defines a beam pattern having a higher intensity at an interface of the surface of the coating material with the crucible than at a central region of the surface of the coating material.
    • 用涂覆设备进行电子束物理气相沉积(EBPVD)处理,以在制品上产生涂层材料(例如,陶瓷热障涂层)。 EBPVD设备通常包括在升高的温度和低于大气压的压力下操作的涂覆室。 涂覆室包含坩埚和由坩埚包围并包含在坩埚内的涂层材料,并且涂层材料具有由坩埚暴露的表面。 该过程需要将电子束投射到涂层材料的表面上,其中电子束限定在涂层材料的表面与坩埚的界面处具有比在表面的中心区域具有更高强度的束图案 涂料。
    • 6. 发明授权
    • Electron beam physical vapor deposition apparatus
    • 电子束物理气相沉积装置
    • US06983718B1
    • 2006-01-10
    • US09624810
    • 2000-07-24
    • Robert William BruceJohn Douglas Evans, Sr.
    • Robert William BruceJohn Douglas Evans, Sr.
    • C23C16/48C23F1/00H01L21/306
    • C23C14/083C23C14/30C23C14/548H01J37/3053H01J2237/3132
    • An electron beam physical vapor deposition (EBPVD) apparatus and a method for using the apparatus to produce a coating material (e.g., a ceramic thermal barrier coating) on an article. The EBPVD apparatus generally includes a coating chamber that is operable at elevated temperatures and subatmospheric pressures. An electron beam gun projects an electron beam into the coating chamber and onto a coating material within the chamber, causing the coating material to melt and evaporate. An article is supported within the coating chamber so that vapors of the coating material deposit on the article. The operation of the EBPVD apparatus is enhanced by the shape and intensity of the electron beam pattern on the coating material and on a crucible containing the molten coating material.
    • 电子束物理气相沉积(EBPVD)装置和使用该装置在制品上制备涂层材料(例如,陶瓷热障涂层)的方法。 EBPVD设备通常包括可在升高的温度和低于大气压的压力下操作的涂覆室。 电子束枪将电子束投射到涂层室中并且涂覆在腔室内的涂层材料上,导致涂层材料熔化和蒸发。 在涂层室内支撑制品,使得涂层材料的蒸气沉积在制品上。 通过涂层材料上的电子束图案和含有熔融涂层材料的坩埚的形状和强度,增强了EBPVD装置的操作。