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1. 发明授权

US06168374A Friction vacuum pump 有权
标题翻译：摩擦真空泵
公开(公告)号：US06168374A
公开(公告)日：2001-01-02
申请号：US09242004
申请日：1999-02-05
申请人： Robert Stolle , Heinz-Dieter Odendahl , Christian Beyer
发明人： Robert Stolle , Heinz-Dieter Odendahl , Christian Beyer
IPC分类号： F01D136
CPC分类号： F04C23/005 , F04D19/042 , F04D19/044 , F04D19/046
摘要： The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (2) joined at its pressure side to a screw pump stage (4). In order to improve the pump properties it is proposed that a filling stage (3) be arranged between the turbomolecular pump stage (2) and the screw pump stage (4) that has blades (13) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (2), and at the pressure side to the depth of the suction-side region of the screw (14) of the screw stage (4).
摘要翻译：本发明涉及一种摩擦真空泵，其具有至少一个涡轮分子泵级（2），其在其压力侧连接到螺杆泵级（4）。为了提高泵性能，提出在涡轮分子泵级（2）和螺杆泵级（4）之间设置一个填充级（3），该级具有叶片（13），其叶片（13）的吸力侧对应于在涡轮分子泵级（2）的压力侧的叶片的有效长度和螺杆级（4）的螺杆（14）的吸入侧区域的深度的压力侧。

2. 发明申请

US20110123328A1 VACUUM PUMP 审中-公开
标题翻译：真空泵
公开(公告)号：US20110123328A1
公开(公告)日：2011-05-26
申请号：US12952568
申请日：2010-11-23
申请人： Markus Henry , Christian Beyer , Heinz Englaender , Rainer Hoelzer , Heinz-Dieter Odendahl
发明人： Markus Henry , Christian Beyer , Heinz Englaender , Rainer Hoelzer , Heinz-Dieter Odendahl
IPC分类号： F04D29/04
CPC分类号： F04D19/042 , F04D19/048 , F04D29/0563 , F04D29/058 , F04D29/059 , F16C32/0402 , F16C2360/45
摘要： A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).
摘要翻译：真空泵，特别是涡轮分子泵或多入口泵，包括承载至少一个转子装置（14）的转子轴（12）。转子轴（12）由轴承组件（56）支撑在压力侧上，并通过另一个轴承组件（30）在吸力侧上。根据本发明，吸入侧轴承组件（30）包括电磁轴承（32,34）。此外，根据本发明，压力侧轴承组件（56）包括球轴承（58），使得转子轴（12）可以被给予最大可能的长度。滚动轴承（58）优选地被电磁轴承（32,34）偏置。

3. 发明授权

US5944049A Apparatus and method for regulating a pressure in a chamber 失效
标题翻译：用于调节室内压力的装置和方法
公开(公告)号：US5944049A
公开(公告)日：1999-08-31
申请号：US893032
申请日：1997-07-15
申请人： Christian Beyer , Keith Trenton , Mariusch Gregor , Robert Stolle , Rudolph Bahnen , Anja Plugge , Heinz Frings , Karl-Heinz Ronthaler , Dennis Smith , Jayesh Patel
发明人： Christian Beyer , Keith Trenton , Mariusch Gregor , Robert Stolle , Rudolph Bahnen , Anja Plugge , Heinz Frings , Karl-Heinz Ronthaler , Dennis Smith , Jayesh Patel
IPC分类号： F04B49/06 , F04B37/16 , F04B49/08 , F04D25/16 , F04D27/00 , G05D16/20 , F16K31/12 , F17D1/16 , E03B25/09
CPC分类号： G05D16/208 , F04B49/08 , F04D19/04 , F04D25/16 , F04D27/0253 , F04D27/0269 , F04B2203/0204 , F04B2205/172 , Y10S137/907 , Y10T137/0396 , Y10T137/7761
摘要： A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly communicating with the chamber. The pressure of the chamber can be regulated by combinations of the following: controlling the variable rotational frequency of a roots vacuum pump, a pre-vacuum pump, or a high compression pump; controlling a control valve between a pre-vacuum pump and the first vacuum pump; controlling a control valve for injecting gas into the exhaust side of the first vacuum pump or into the compression stage of the first vacuum pump; and controlling a control valve or control valves for bypassing the first vacuum pump or a compression stage or compression stages of the first vacuum pump. To regulate the pressure in the chamber, several types of control rules can be used, including: a PID control rule, a gain scheduler, and a threshold comparison control rule.
摘要翻译：通过控制第一真空泵的排气侧的排气压力或第一真空泵直接与室连通的第一真空泵的压缩级的内部压力来调节室的压力。腔室的压力可以通过以下组合来调节：控制根真空泵，预真空泵或高压缩泵的可变转速; 控制预真空泵和第一真空泵之间的控制阀; 控制用于将气体注入到第一真空泵的排气侧或第一真空泵的压缩级中的控制阀; 以及控制用于绕过第一真空泵或第一真空泵的压缩级或压缩级的控制阀或控制阀。为了调节室中的压力，可以使用几种类型的控制规则，包括：PID控制规则，增益调度器和阈值比较控制规则。

4. 发明申请

US20140123732A1 LEAK DETECTION DEVICE AND METHOD FOR CHECKING OBJECTS FOR FLUID TIGHTNESS BY MEANS OF A LEAK DETECTION DEVICE 有权
标题翻译：泄漏检测装置和方法，用于通过泄漏检测装置检测流体密度的物体
公开(公告)号：US20140123732A1
公开(公告)日：2014-05-08
申请号：US14131073
申请日：2012-05-18
申请人： Gerhard Wilhelm Walter , Guenter Holstein , Christian Beyer
发明人： Gerhard Wilhelm Walter , Guenter Holstein , Christian Beyer
IPC分类号： G01M3/02
CPC分类号： G01M3/02 , G01M3/202
摘要： A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.
摘要翻译：泄漏检测装置具有用于抽真空连接到抽空泵装置的测试室。此外，试验室通过试验气体管线连接到试验气体泵装置。测试气体泵装置在其主入口处连接到测试气体检测器，使得可以使用逆流原理进行检测气体的检测。在测试气体管线中布置有阀装置。该阀装置具有用于临时存储从测试室移除的测试气体的测试气室。

5. 发明申请

US20110033317A1 VACUUM PUMP 审中-公开
标题翻译：真空泵
公开(公告)号：US20110033317A1
公开(公告)日：2011-02-10
申请号：US12988074
申请日：2009-04-15
申请人： Alois Greven , Christian Beyer
发明人： Alois Greven , Christian Beyer
IPC分类号： F04B49/00
CPC分类号： F04D19/042 , F04D27/001 , F04D29/32 , H04Q9/00 , H04Q2209/47
摘要： A pump rotor (11) contains a transponder (14) that can be read out by a reader (12) of a pump stator (10). The pump rotor (11) also contains sensors (26) for determining operating data (BD), and a memory (27). The memory (27) stores either the history of the measured operating data (BD) or a service life characteristic (LDK). In this way, the rate of wear of the respective rotor is determined and stored in the rotor, and the rotor therefore contains all of the information relating to maintenance. The rotor-related information remains in the rotor even if the rotor is used in another vacuum pump.
摘要翻译：泵转子（11）包含可由泵定子（10）的读取器（12）读出的应答器（14）。泵转子（11）还包含用于确定操作数据（BD）的传感器（26）和存储器（27）。存储器（27）存储测量的操作数据（BD）的历史或者使用寿命特性（LDK）。以这种方式，确定各个转子的磨损速度并将其存储在转子中，因此转子包含与维护有关的所有信息。即使在另一个真空泵中使用转子，转子相关信息也保留在转子中。

6. 发明申请

US20100176294A1 MASS SPECTROMETER ARRANGEMENT 失效
标题翻译：质谱仪安排
公开(公告)号：US20100176294A1
公开(公告)日：2010-07-15
申请号：US12663946
申请日：2008-06-03
申请人： Markus Henry , Christian Beyer
发明人： Markus Henry , Christian Beyer
IPC分类号： H01J49/24 , H01J49/26
CPC分类号： H01J49/24 , F04D19/042 , F04D29/522
摘要： The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).
摘要翻译：本发明涉及一种质谱仪装置（10），其包括具有质谱仪前真空真空室（20）的壳体（86），其具有质谱仪前级真空出口（30），至少两个质谱仪的高真空真空室（21， 22,23）和与高真空真空室（21,22,23）连接并具有前级真空出口（89）的一体式涡轮分子泵（12）。两个前级真空出口（30,89）打开到壳体（86）中的共同的预真空室（98）中，该预热真空室又开启到壳体出口（88）中。

7. 发明申请

US20060169028A1 Test-gas leak detector 有权
标题翻译：试验气体检漏仪
公开(公告)号：US20060169028A1
公开(公告)日：2006-08-03
申请号：US10546666
申请日：2003-12-19
申请人： Christian Beyer , Hermann Boy , Rainer Holzer , Gunter Holstein
发明人： Christian Beyer , Hermann Boy , Rainer Holzer , Gunter Holstein
IPC分类号： G01M3/04
CPC分类号： G01M3/205 , F04D19/04 , F04D27/00
摘要： A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).
摘要翻译：测试气体泄漏检测器（1）包括用于被测设备的连接（27），嗅探器或泄漏检测器室，高真空泵（2），连接的测试气体检测器（5）在所述泵的进气侧，以及从所述检漏器（27）的连接引出的测试气体导管（28）。除了通过导管部分（31,32,35）和阀（33）之外，除了高真空泵（2）的预真空区域之外，还将导管连接到高真空泵（2）的至少一个中间级，34,36）。一种壳体（9），其中至少一些导管和阀以及高真空泵（2）被集成在一起，形成泄漏检测器（1）的一部分，并且可拆卸滑入模块（51）形成高真空泵。滑入模块具有包括通道（58,61）的外部护套结构（53），并且当检漏器（1）可操作时，位于设置在壳体（9）中的接收开口（52）中。

8. 发明申请

US20110311348A1 MULTI-INLET VACUUM PUMP 有权
标题翻译：多重真空泵
公开(公告)号：US20110311348A1
公开(公告)日：2011-12-22
申请号：US13203309
申请日：2010-02-23
申请人： Christian Beyer , Markus Henry , Heinz Englaender
发明人： Christian Beyer , Markus Henry , Heinz Englaender
IPC分类号： F04D19/04 , F01D1/36
CPC分类号： F04D19/046 , F04D19/042
摘要： A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).
摘要翻译：多入口真空泵包括第一泵装置（10），第一泵装置（10）包括具有沿输送方向（36）串联布置的多个第一转子盘（20）的第一转子元件（18）和第二泵装置（12）包括具有沿传送方向（36）串联布置的多个第二转子盘（28）的另一个转子元件（26）。第二转子盘（28）的直径至少部分地大于第一转子盘（20）的直径。主入口（32）与第一泵装置（10）吸入第一流体流（34）。第一流体流（34）沿着另一个泵装置（12）的方向输送。中间入口（38）与第二泵装置（12）吸入第二流体流（40）。第二流体流（40）沿泵出口的方向输送。在第二泵装置（12）内，优选地在第二泵装置（12）的两个相邻的第二转子盘（28）之间将出现合并两个流体流（34,40）的过程。

9. 发明授权

US06914361B2 Magnetic bearing 失效
标题翻译：磁轴承
公开(公告)号：US06914361B2
公开(公告)日：2005-07-05
申请号：US10383342
申请日：2003-03-07
申请人： Christian Beyer , Heinrich Engländer , Josef Hodapp
发明人： Christian Beyer , Heinrich Engländer , Josef Hodapp
IPC分类号： F16C39/06 , H02K7/09
CPC分类号： F16C39/066 , F16C32/0417 , F16C32/0465 , F16C32/0468 , F16C32/0476
摘要： The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion (12) comprises a magnetic coil (42) generating a magnetic field and having a yoke (44). The second bearing portion (18) comprising a permanent magnet (50) which is magnetized in alignment with the yoke (44). The permanent magnet of the second bearing portion has an attracting effect upon the yoke of the first bearing portion. To avoid this, the first bearing portion is provided with a permanently magnetized compensation magnet (54) which is located opposite the permanent magnet (50) of the second bearing portion (18) and is magnetized oppositely to the permanent magnet (50).
摘要翻译：本发明涉及一种具有固定的第一轴承部分和无接触地支撑在第一轴承部分上的可动第二轴承部分的磁性轴承。第一轴承部分（12）包括产生磁场并具有轭（44）的磁线圈（42）。第二轴承部分（18）包括与磁轭（44）对准地被磁化的永磁体（50）。第二轴承部分的永磁体对第一轴承部分的磁轭具有吸引作用。为了避免这种情况，第一轴承部分设置有永久磁化的补偿磁体（54），其与第二轴承部分（18）的永磁体（50）相对并且与永磁体（50）相反地被磁化。

10. 发明授权

US06910861B2 Turbomolecular vacuum pump with the rotor and stator vanes 有权
标题翻译：涡轮分子真空泵带转子和定子叶片
公开(公告)号：US06910861B2
公开(公告)日：2005-06-28
申请号：US10466343
申请日：2001-11-15
申请人： Christian Beyer , Heinz Engländer , Peter Klingner , Martin Laerbusch
发明人： Christian Beyer , Heinz Engländer , Peter Klingner , Martin Laerbusch
IPC分类号： F04D19/04 , F04D29/38 , F04D29/54
CPC分类号： F04D19/042 , F04D29/384
摘要： A turbomolecular vacuum pump (1) has an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet. The rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation. At least a part of the rotor vanes (6) have a rear side (12) which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes (6) have a front side (11), which is concave on the suction side and convex on the delivery side.
摘要翻译：涡轮分子真空泵（1）具有入口（3）和出口（4）以及位于入口和出口之间的转子和定子叶片（5和6）。转子叶片（6）相对于旋转方向具有前侧（11）和后侧（12）。转子叶片（6）的至少一部分具有在吸力侧凸起并在输送侧凹陷的后侧（12）。或者，转子叶片（6）的至少一部分具有前侧（11），其在吸力侧是凹的并且在输送侧上是凸的。

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