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    • 1. 发明授权
    • Compositions for chemical mechanical planarization of copper
    • 铜化学机械平面化的组成
    • US06866792B2
    • 2005-03-15
    • US10017934
    • 2001-12-12
    • Robert J. SmallMaria PetersonTuan TruongMelvin Keith CarterLily Yao
    • Robert J. SmallMaria PetersonTuan TruongMelvin Keith CarterLily Yao
    • C09G1/02C09K3/14C09K13/00C09K13/06
    • C09K3/1463C09G1/02
    • The present invention relates chemical mechanical planarization (“CMP”) of copper surfaces and describes copper CMP slurries including an oxidizer, one or more hydroxylamine compounds and at least one abrasive. The hydroxylamine compositions can include hydroxylamine nitrate, hydroxylamine, hydroxylamine sulfate, hydroxyl ammonium salts and mixtures thereof. The oxidizers may further include citric acid as a complexing agent for copper. Sulfuric acid and/or nitric acid provide means for modifying the pH of the oxidizer so that the hydroxylamine chemistries are acidic. Some embodiments include corrosion inhibitors such as benzotriazole, 2,4-pentadione dioxime and/or 1,6-dioxaspiro[4,4] nonane 2,7-dione. Some embodiments also include a free radical inhibitor, advantageously hydrazine. Colloidal silica and milled alumina are used as typical abrasive components.
    • 本发明涉及铜表面的化学机械平面化(“CMP”),并且描述了包括氧化剂,一种或多种羟胺化合物和至少一种研磨剂的铜CMP浆料。 羟胺组合物可以包括硝酸羟胺,羟胺,硫酸羟胺,羟基铵盐及其混合物。 氧化剂还可以包括柠檬酸作为铜的络合剂。 硫酸和/或硝酸提供了改变氧化剂的pH使得羟胺化学性质为酸性的方法。 一些实施方案包括腐蚀抑制剂,例如苯并三唑,2,4-戊二酮二肟和/或1,6-二氧杂螺[4,4]壬烷2,7-二酮。 一些实施方案还包括自由基抑制剂,有利的是肼。 胶体二氧化硅和碾磨的氧化铝用作典型的磨料组分。
    • 5. 发明申请
    • Catalytic alkylation of alcohols to liquid ethers and organic compounds to alkylated products
    • 将醇与液体醚和有机化合物催化烷基化成烷基化产物
    • US20130204037A1
    • 2013-08-08
    • US13385192
    • 2012-02-07
    • Melvin Keith Carter
    • Melvin Keith Carter
    • C07C41/09C07C45/68C07C51/367C07C209/02
    • C07C41/09B01J31/2239B01J2231/44B01J2531/16B01J2531/56B01J2531/845C07C45/68C07C51/367C07C209/16C07C211/08C07C43/04C07C43/164C07C65/21C07C49/04
    • A catalytic process is taught for non-oxidative alkylation of organic compounds, comprising alcohols, alkanes, glycols, ethers, aldehydes, ketones, carboxylic acids, esters, amines, thiols or phosphines, by alkyl groups produced from alcohols or glycols, forming products comprising ethers and other higher molecular weight alkylated compounds. The process is conducted at a reflux temperature below 200° C. in the presence of an acid, alkali or neutral salt dehydrating agent comprising sulfuric acid, phosphoric acid or their salts, lime or anhydrous calcium sulfate in the absence of zero valent metals and air. Specifically, this catalytic process converts ethanol to ethyl butyl ethers, ethyl hexyl ethers and dibutyl ethers or oxygenated gasoline as well as amines comprising n-butyl amine plus butanol to dibutyl amine and butyl hexyl amines at ambient pressure. This same catalytic alkylation chemistry, which does not constitute a condensation reaction, alkylates 4-hydroxybenzoic acid using ethanol to 4-ethoxyethylbenzoic acid products.
    • 教导了通过由醇或二醇生产的烷基对有机化合物(包括醇,烷烃,二醇,醚,醛,酮,羧酸,酯,胺,硫醇或膦)进行非氧化烷基化的催化方法, 醚和其他较高分子量的烷基化化合物。 在不存在零价金属和空气的情况下,在含有硫酸,磷酸或其盐,石灰或无水硫酸钙的酸,碱或中性盐脱水剂的存在下,在低于200℃的回流温度下进行该方法 。 具体地说,该催化方法在环境压力下将乙醇转化为乙基丁基醚,乙基己基醚和二丁基醚或含氧汽油以及包含正丁胺加丁醇的胺至二丁基胺和丁基己基胺。 这种不构成缩合反应的催化烷基化化学反应使用乙醇将4-羟基苯甲酸烷基化成4-乙氧基乙基苯甲酸产物。
    • 6. 发明申请
    • Catalytic conversion of amide compounds to methyl ether polymers and methyl ether ladder polymers
    • 酰胺化合物催化转化成甲基醚聚合物和甲基醚梯度聚合物
    • US20100168377A1
    • 2010-07-01
    • US12317796
    • 2008-12-29
    • Melvin Keith Carter
    • Melvin Keith Carter
    • C08G73/00
    • C08G65/00B01J31/2213B01J31/223B01J31/2239B01J2231/14B01J2231/641B01J2531/0219B01J2531/16B01J2531/17B01J2531/18B01J2531/46B01J2531/48B01J2531/49B01J2531/56B01J2531/57B01J2531/58B01J2531/62B01J2531/64B01J2531/66B01J2531/70B01J2531/72B01J2531/74B01J2531/821B01J2531/822B01J2531/824B01J2531/825B01J2531/827B01J2531/828B01J2531/842B01J2531/845B01J2531/847C08G67/00
    • Catalytic processes have been developed for direct chemical conversion of amides to methyl ether polymers or methyl ether ladder polymers. Amides formed by reacting acetic acid with monoethanol amine (MEA) or acetic acid with butylamine were polymerized in the presence of transition metal catalysts in air to form linear polymers. Ethanol acetamide was catalytically converted to a linear polyether as characterized by FTIR spectra. The catalysts were based on molecular strings of mono-, di- or tri-valent transition metal compounds that opened the amide carbonyl double bond to produce linear polyethers. Laboratory results have demonstrated [cobalt(II)]2, [manganese(II)]2, cobalt(II)-manganese(II), [nickel(II)]2 and related families of catalysts to be effective for formation of methyl ether polymers by this process.Similar transition metal catalysts plus hydrogen peroxide facilitated reactions of the amide compounds dimethylacetamide (DMAc), DMF as well as amides formed from L-cysteine with MEA, serine with MEA, arginine with MEA and histidine with MEA to form insoluble methyl ether ladder polymers at or near ambient temperature that were quite different from the linear polyether polymers. Catalysts active for these polymerizations were based on di- or tri-valent transition metals. The polymer formed from DMAc using a Co(III) catalyst plus 20% hydrogen peroxide was a ladder polymer as characterized by FTIR spectroscopy and isolated solids were observed to be microscopic hexagonal needle shaped crystals. The catalysts were based on molecular strings of tri-valent transition metal compounds. Laboratory results have demonstrated [cobalt(III)]2 and related families of catalysts in the presence of hydrogen peroxide to be effective for formation of methyl ether ladder polymers.
    • 已经开发了用于将酰胺直接化学转化为甲基醚聚合物或甲基醚梯度聚合物的催化方法。 在乙酸与单乙醇胺(MEA)或乙酸与丁胺反应形成的酰胺在空气中在过渡金属催化剂存在下聚合形成线性聚合物。 将乙醇乙酰胺催化转化为线性聚醚,其特征在于FTIR光谱。 催化剂基于打开酰胺羰基双键以产生线性聚醚的单 - ,二 - 或三价过渡金属化合物的分子串。 实验室研究结果表明[钴(Ⅱ)] 2,[锰(Ⅱ)] 2,钴(Ⅱ) - 锰(Ⅱ),[镍(Ⅱ) 聚合物通过这个过程。 类似的过渡金属催化剂加过氧化氢促进了酰胺化合物二甲基乙酰胺(DMAc),DMF以及由L-半胱氨酸与MEA形成的酰胺,具有MEA的丝氨酸,具有MEA的精氨酸和具有MEA的组氨酸形成不溶性甲基醚梯度聚合物的酰胺化合物 或接近环境温度,与线性聚醚聚合物完全不同。 对这些聚合有活性的催化剂基于二价或三价过渡金属。 使用Co(III)催化剂和20%过氧化氢由DMAc形成的聚合物是通过FTIR光谱表征的梯形聚合物,并且观察到分离的固体是微观六角形针状晶体。 催化剂基于三价过渡金属化合物的分子串。 实验室结果表明,在过氧化氢存在下,[钴(III)] 2和催化剂的相关族可有效形成甲基醚梯形聚合物。