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    • 1. 发明申请
    • LIGHT SCANNING APPARATUS, LIGHT SCANNING CONTROL APPARATUS, AND LIGHT SCANNING UNIT
    • 光扫描装置,光扫描控制装置和光扫描装置
    • US20140355087A1
    • 2014-12-04
    • US14283384
    • 2014-05-21
    • Riichiro HIBIYAHisamichi Sekine
    • Riichiro HIBIYAHisamichi Sekine
    • G02B26/10
    • G02B26/105
    • A light scanning apparatus includes torsion beams supporting a mirror supporting portion on opposite sides of the mirror supporting portion along an axis direction, the mirror supporting portion being swung around the axis direction by the torsion beams; a pair of drive beams sandwiching the mirror and the mirror supporting portion in a direction orthogonal to the axis direction; connection beams that connect mutually facing sides of each drive beam with the torsion beams; and a piezoelectric sensor formed on the connection beams and detecting displacement of the connection beams caused by a swing of the torsion beams around the axis when the mirror swings by a drive voltage, wherein a first bias voltage having a positive or negative polarity is applied to an upper electrode of the piezoelectric sensor, and a second bias voltage having an opposite polarity is applied to a lower electrode.
    • 光扫描装置包括:扭转梁,其沿着轴方向支撑反射镜支撑部的相对侧的反射镜支撑部,所述反射镜支撑部通过所述扭转梁绕所述轴线方向摆动; 一对驱动光束,其在与轴向正交的方向上夹着反射镜和反射镜支撑部; 将每个驱动梁的相互面对的侧面与扭转梁连接的连接梁; 以及形成在所述连接梁上的压电传感器,并且当所述反射镜以驱动电压摆动时,检测由所述扭转波束绕所述轴线的摆动引起的所述连接梁的位移,其中施加正极性或负极性的第一偏置电压 压电传感器的上电极和具有相反极性的第二偏置电压施加到下电极。