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    • 4. 发明授权
    • MEMS device with integrated memory cells
    • 具有集成存储单元的MEMS器件
    • US08536664B1
    • 2013-09-17
    • US11735803
    • 2007-04-16
    • Richard TsaiXiaolei Liu
    • Richard TsaiXiaolei Liu
    • G03B17/00
    • G03B3/10G03B2205/0084
    • A MEMS device can include an actuator, a base formed from a substrate, and a plurality of memory cells integrated with the base. At least a portion of the base can be configured to move in response to the actuator. A miniature camera can include a base comprising a frame, a stage, and a plurality of flexures configured to connect the stage with the frame. The flexures can be adapted to bend to permit the stage to move relative to the frame. The camera can include a plurality of memory cells integrated with the base, a lens mount secured to the stage, a lens barrel secured to the lens mount, an image sensor, and an actuator adapted to move the stage relative to the frame and the image sensor.
    • MEMS器件可以包括致动器,由衬底形成的基座以及与基座一体化的多个存储单元。 基座的至少一部分可以被构造成响应于致动器而移动。 微型照相机可以包括基座,其包括框架,台架以及被配置为将平台与框架连接的多个挠曲件。 挠曲件可以适于弯曲以允许平台相对于框架移动。 相机可以包括与基座一体化的多个存储器单元,固定到平台的透镜架,固定到透镜座的透镜筒,图像传感器和适于相对于框架移动平台的致动器和图像 传感器。
    • 8. 发明授权
    • Rotationally deployed actuators
    • 旋转部署的执行器
    • US08430580B2
    • 2013-04-30
    • US12946646
    • 2010-11-15
    • Roman C. GutierrezGuiqin WangXiaolei LiuRobert J. CalvetAnkur Jain
    • Roman C. GutierrezGuiqin WangXiaolei LiuRobert J. CalvetAnkur Jain
    • G03B17/00
    • H04N5/2254G03B3/10G03B2205/0007G03B2205/0046G03B2205/0069H02N1/008H04N5/2257Y10T29/49826
    • A method for making an actuator includes forming, e.g., using photolithography techniques, a substantially planar actuator device of an electrically conductive material, e.g., a semiconductor, to include an outer frame, a fixed frame coupled to the outer frame for rotational movement relative thereto, a moveable frame coupled to the outer frame for rotational movement relative thereto, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame. The fixed frame is then rotated to a deployed position relative to the outer frame such that the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth, and the position of the fixed frame relative to the outer frame is then fixed at the deployed position.
    • 制造致动器的方法包括例如使用光刻技术形成例如半导体的导电材料的基本上平面的致动器装置,以包括外框架,联接到外框架的固定框架,用于相对于外框架的旋转运动 ,联接到所述外框架以用于相对于所述外框架旋转运动的可移动框架,以及包括多个交叉齿的致动器,其固定部分附接到所述固定框架,并且其移动部分附接到所述可移动框架。 然后,固定框架相对于外框架旋转到展开位置,使得致动器齿的固定部分相对于致动器齿的移动部分以选定的角度设置,并且固定框架相对于 外框然后固定在展开位置。