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1. 发明授权

US6031695A Combined read head and write head with non-magnetic electrically conductive layer on upper pole tip thereof 失效
标题翻译：组合读头和写磁头与上磁极上的非磁性导电层
公开(公告)号：US6031695A
公开(公告)日：2000-02-29
申请号：US924395
申请日：1997-09-05
申请人： Richard Hsiao , Cherngye Hwang , Hugo Alberto Emilio Santini
发明人： Richard Hsiao , Cherngye Hwang , Hugo Alberto Emilio Santini
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39 , G11B5/187 , G11B5/265
CPC分类号： G11B5/3967 , G11B5/012 , G11B5/3133 , G11B5/3163
摘要： A combined read head and write head includes at least one write coil layer embedded in an insulation stack. The insulation stack is sandwiched between first and second pole piece layers that are connected at a back gap. The pole piece layers have first and second pole tips that have edges that form a portion of an air bearing surface. A write gap layer that forms a portion of the air bearing surface is sandwiched between a top surface of the first pole tip and a bottom surface of the second pole tip. A non-magnetic electrically conductive layer on top of the second pole tip forms a portion of the air bearing surface. A magnetoresistive sensor is sandwiched between first and second gap layers, which are sandwiched between first and second shield layers. The second shield layer is a common layer with the first pole piece layer.
摘要翻译：组合读头和写头包括嵌入绝缘堆叠中的至少一个写入线圈层。绝缘堆叠被夹在第一和第二极靴层之间，后端间隔连接。极片层具有第一和第二极尖，其具有形成空气轴承表面的一部分的边缘。形成空气轴承表面的一部分的写入间隙层被夹在第一极尖的顶表面和第二极尖的底表面之间。在第二极尖顶部的非磁性导电层形成空气轴承表面的一部分。磁阻传感器夹在第一和第二间隙层之间，夹在第一和第二屏蔽层之间。第二屏蔽层是具有第一极片层的公共层。

2. 发明授权

US06623652B1 Reactive ion etching of the lapped trailing edge surface of a slider 失效
标题翻译：滑块的后跟边缘表面的反应离子蚀刻
公开(公告)号：US06623652B1
公开(公告)日：2003-09-23
申请号：US09593348
申请日：2000-06-14
申请人： Richard Hsiao , Cherngye Hwang , Hugo Alberto Emilio Santini
发明人： Richard Hsiao , Cherngye Hwang , Hugo Alberto Emilio Santini
IPC分类号： G11B5127
CPC分类号： G11B5/6005 , G11B5/102 , G11B5/1871 , G11B5/3106 , G11B5/3136 , G11B5/3903 , G11B5/40 , Y10T29/49032
摘要： A method of altering the topography of a trailing edge or ABS of a slider is disclosed, the slider having a substrate surface, at least one magnetic recording head on top of the alumina, and an overcoat of a material, preferably SiO2. The steps include first applying an SiO2 overcoat at the wafer level followed by slicing the wafer into rows, then lapping the rows. The rows are then placed on a bias electrode, exposing the trailing edge to a plasma generated from a controlled source in a reactive ion etching process. The plasma is generated using an chemical etchant such as CHF3 and other F-containing compounds, the plasma being generated with a combination of an inert gas such as Argon and the chemical etchant. In the plasma, the electrode is charged to accelerate the plasma ions towards the exposed surface. Reacted material is drawn from the surface of the slider. The SiO2 trailing edge reacts preferentially with the plasma, thus effectuating a change in the trailing edge topography.
摘要翻译：公开了一种改变滑块的后缘或ABS的形貌的方法，滑块具有衬底表面，在氧化铝顶部上的至少一个磁记录头和材料的外涂层，优选为SiO 2。这些步骤包括首先在晶片级施加SiO 2外涂层，然后将晶片切片成行，然后研磨行。然后将行放置在偏置电极上，将后缘暴露于在反应离子蚀刻工艺中由受控源产生的等离子体。使用诸如CHF 3和其它含F化合物的化学蚀刻剂产生等离子体，等离子体通过惰性气体如氩气和化学蚀刻剂的组合产生。在等离子体中，电极被加电以将等离子体离子加速到暴露的表面。从滑块的表面抽出反应材料。 SiO 2后缘优先与等离子体反应，从而实现后缘形貌的变化。

3. 发明授权

US06328859B1 Method of making second pole tip of a write head with a narrow track width 失效
标题翻译：具有窄轨道宽度的写头的第二极端的方法
公开(公告)号：US06328859B1
公开(公告)日：2001-12-11
申请号：US09368068
申请日：1999-08-03
申请人： Richard Hsiao , Cherngye Hwang , Hugo Alberto Emilio Santini
发明人： Richard Hsiao , Cherngye Hwang , Hugo Alberto Emilio Santini
IPC分类号： C23F100
CPC分类号： G11B5/3967 , G11B5/012 , G11B5/3133 , G11B5/3163
摘要： A method is provided for forming a final second pole tip of a write head wherein the final second pole tip is bounded in part by a final top and final first and second side walls, the final first and second side walls being separated by a final track width at an air bearing surface (ABS). The method includes the steps of forming a preliminary second pole tip that is bounded in part by the final top and preliminary first and second side walls. The preliminary first and second side walls are separated by a preliminary width at the ABS that is wider than the final track width. Next, a non-magnetic sacrificial layer is formed on the final top of the preliminary second pole tip. Ion beam milling is then employed for milling the preliminary first and second side walls to form the final second pole tip with the final first and second side walls separated by the final track width with at least a portion of the sacrificial layer remaining on the final top of the final second pole tip.
摘要翻译：提供了一种用于形成写头的最终第二极尖的方法，其中最后的第二极尖部分由最终的顶部和最终的第一和第二侧壁限定，最终的第一和第二侧壁被最后的轨道分开空气轴承表面（ABS）的宽度。该方法包括以下步骤：形成由最终顶部和初步的第一和第二侧壁部分限定的预备的第二极头。初步的第一和第二侧壁在ABS处的宽度比最终轨道宽度宽的初步宽度分开。接下来，在初步第二极尖的最终顶部上形成非磁性牺牲层。然后使用离子束铣削研磨初步的第一和第二侧壁以形成最终的第二极尖，最后的第一和第二侧壁与最后的轨道宽度分开，牺牲层的至少一部分保留在最终的顶部的最后的第二极点。

4. 发明授权

US5893981A Method of making stabilized MR sensor and flux guide joined by contiguous junction 失效
标题翻译：制造稳定的MR传感器和通过连接接头连接的助焊剂的方法
公开(公告)号：US5893981A
公开(公告)日：1999-04-13
申请号：US44358
申请日：1998-03-19
申请人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
发明人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
IPC分类号： G01R33/09 , G03F7/00 , G11B5/31 , G11B5/39 , B44C1/22
CPC分类号： G11B5/3916 , G01R33/09 , G03F7/00 , G11B5/3903 , G11B5/3919 , G11B5/3932 , G11B5/3163
摘要： The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.
摘要翻译： MR传感器和磁通引导件的后端通过连续的自对准结连接，从而可以实现MR传感器后端的磁通引导件的可预测重叠，以优化MR传感器中的信号通量密度。用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件，用于稳定通量引导件。通过使用单个剥离抗蚀剂掩模，MR传感器和引导/纵向偏置层可以被图案化，然后沉积助焊剂引导件。助焊剂是绝缘材料层和助焊剂引导材料层的双层。绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

5. 发明授权

US07116516B2 Magnetic head having write head with helical coil and method for fabrication thereof 失效
标题翻译：具有带螺旋线圈的写头的磁头及其制造方法
公开(公告)号：US07116516B2
公开(公告)日：2006-10-03
申请号：US10611090
申请日：2003-06-30
申请人： Frederick Hayes Dill , Robert Edward Fontana, Jr. , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill , Robert Edward Fontana, Jr. , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B5/127
CPC分类号： G11B5/313 , G11B5/012 , G11B5/127 , G11B5/17 , G11B5/3163 , Y10T29/49046
摘要： The present invention is a magnetic head having a helical induction coil and includes hard disk drive devices that utilize the magnetic head. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.
摘要翻译：本发明是一种具有螺旋感应线圈的磁头，并且包括利用磁头的硬盘驱动装置。在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。在优选实施例中，螺旋线圈由铜构成。

6. 发明授权

US06570739B2 Magnetic head having write head element with high aspect ratio coil 失效
标题翻译：具有高纵横比线圈的写头元件的磁头
公开(公告)号：US06570739B2
公开(公告)日：2003-05-27
申请号：US09953702
申请日：2001-09-11
申请人： Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B517
CPC分类号： G11B5/17 , G11B5/313 , G11B5/3163
摘要： A hard disk drive of the present invention includes a magnetic head having a high aspect ratio induction coil. The magnetic head includes a first pole tip piece that is formed upon a first magnetic pole and a second pole tip piece that is part of the second magnetic pole, where the write gap is formed between the first pole tip piece and the second pole tip piece. The use of the two pole tip pieces increases the spacing between the first magnetic pole layer and the second magnetic pole layer such that an induction coil having high aspect ratio coil turns can be formed within the insulation layers. A reactive ion etch (RIE) process is used to form the coil trenches within which the high aspect ratio coil turns are created. An RIE etch stop layer is formed upon the first magnetic pole layer to prevent the RIE etch process from creating coil turn trenches that make contact with the first magnetic pole layer. Where high aspect ratio coil pattern is formed, a finer pitch coil is fabricated, such that the yoke length of the magnetic head is reduced and the flux rise time of the magnetic head is decreased, whereby the magnetic head has an increased data writing rate.
摘要翻译：本发明的硬盘驱动器包括具有高纵横比感应线圈的磁头。磁头包括形成在第一磁极上的第一极端部件和作为第二磁极的一部分的第二极端部件，其中在第一极端部件和第二极端部件之间形成写入间隙。通过使用两个极端部片增加第一磁极层和第二磁极层之间的间隔，使得可以在绝缘层内形成具有高纵横比线圈的感应线圈。使用反应离子蚀刻（RIE）工艺来形成其中产生高纵横比线圈的线圈沟槽。在第一磁极层上形成RIE蚀刻停止层，以防止RIE蚀刻工艺产生与第一磁极层接触的线圈转动沟槽。在形成高纵横比线圈图案的情况下，制造更细的节距线圈，使得磁头的磁轭长度减小并且磁头的磁通上升时间减小，从而磁头具有增加的数据写入速率。

7. 发明授权

US06377423B2 Planar stitched write head having write coil insulated with inorganic insulation 失效
标题翻译：平面针迹写头，具有用无机绝缘绝缘的写线圈
公开(公告)号：US06377423B2
公开(公告)日：2002-04-23
申请号：US09761034
申请日：2001-01-16
申请人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译：写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。提供写头的几个实施例以及新颖的制作方法。

8. 发明授权

US06239955B1 Stabilized MR sensor and heat guide joined by contiguous junction 有权
标题翻译：稳定的MR传感器和导热板连接在一起
公开(公告)号：US06239955B1
公开(公告)日：2001-05-29
申请号：US09280497
申请日：1999-03-30
申请人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
发明人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
IPC分类号： G11B539
CPC分类号： G11B5/3916 , G01R33/09 , G03F7/00 , G11B5/3163 , G11B5/3903 , G11B5/3919 , G11B5/3932
摘要： The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous selfaligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.
摘要翻译： MR传感器和磁通引导件的后端通过连续的自对准结连接，从而可以实现MR传感器后端的磁通引导件的可预测重叠，以优化MR传感器中的信号通量密度。用于MR传感器的引线/纵向偏置层也通过邻接的自对准结连接到通量引导件，用于稳定通量引导件。通过使用单个剥离抗蚀剂掩模，MR传感器和引导/纵向偏置层可以被图案化，然后沉积助焊剂引导件。助焊剂是绝缘材料层和助焊剂引导材料层的双层。绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

9. 发明授权

US06226149B1 Planar stitched write head having write coil insulated with inorganic insulation 失效
标题翻译：平面针迹写头，具有用无机绝缘绝缘的写线圈
公开(公告)号：US06226149B1
公开(公告)日：2001-05-01
申请号：US09212119
申请日：1998-12-15
申请人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill, Jr. , Robert E. Fontana , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译：写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。提供写头的几个实施例以及新颖的制作方法。

10. 发明授权

US06181532B2 Stabilized MR sensor and flux/heat guide joined by contiguous junction 失效
标题翻译：稳定的MR传感器和通过连接接头连接的通量/热导
公开(公告)号：US06181532B2
公开(公告)日：2001-01-30
申请号：US09280489
申请日：1999-03-30
申请人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
发明人： Moris Musa Dovek , Robert E. Fontana , Richard Hsiao , Mohamad Towfik Krounbi , Hugo Alberto Emilio Santini , Virgil Simon Speriosu
IPC分类号： G11B539
CPC分类号： G11B5/3916 , G01R33/09 , G03F7/00 , G11B5/3163 , G11B5/3903 , G11B5/3919 , G11B5/3932
摘要： The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.
摘要翻译： MR传感器和磁通引导件的后端通过连续的自对准结连接，从而可以实现MR传感器后端的磁通引导件的可预测重叠，以优化MR传感器中的信号通量密度。用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件，用于稳定通量引导件。通过使用单个剥离抗蚀剂掩模，MR传感器和引导/纵向偏置层可以被图案化，然后沉积助焊剂引导件。助焊剂是绝缘材料层和助焊剂引导材料层的双层。绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

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