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1. 发明申请

US20110112675A1 PRODUCT RELEASE CONTROL INTO TIME-SENSITIVE PROCESSING ENVIRONMENTS 失效
标题翻译：产品释放控制到时间敏感的处理环境
公开(公告)号：US20110112675A1
公开(公告)日：2011-05-12
申请号：US12615351
申请日：2009-11-10
申请人： Richard G. Burda , John T. Federico , Jonathan Levy , Oliver Liao , Thomas D. Stahlecker , Benjamin Wheeler
发明人： Richard G. Burda , John T. Federico , Jonathan Levy , Oliver Liao , Thomas D. Stahlecker , Benjamin Wheeler
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G06Q50/04 , Y02P90/30
摘要： A method identifies time sensitive processing sequences within a production environment using a computerized device. The processing sequences perform operations utilizing one or more tools. The method also identifies non-committed work in process items that are grouped in non-committed lots for release into one or more of the time sensitive processing sequences, and identifies committed work in process items that are being processed in committed lots within the time sensitive processing sequences, using the computerized device. The method sorts the non-committed lots by a predetermined priority, again using the computerized device. Starting with the highest priority non-committed lot (and continuing with others of the non-committed lots in priority order) the method determines whether there is available tool capacity to process a non-committed lot through each corresponding time sensitive processing sequence using the computerized device. If the tool capacity is available for the non-committed lot, the method releases the non-committed lot to begin the corresponding time sensitive processing sequences, using the computerized device.
摘要翻译：一种方法使用计算机化设备识别生产环境中的时间敏感处理序列。处理顺序使用一个或多个工具执行操作。该方法还可以识别分组在非承诺批次中的过程项目中的非承诺工作，以将其发布到一个或多个时间敏感的处理序列中，并在敏感时间内识别正在处理的进程项目中的承诺工作处理序列，使用计算机化的设备。该方法再次使用计算机化的设备对未承诺的批次进行排序预定的优先级。从最高优先级的非承诺批次开始（并以优先级顺序与其他未承诺的批次继续），该方法确定是否有可用的工具容量通过每个相应的时间敏感处理序列处理非承诺批次，使用计算机化设备。如果工具容量可用于非承诺批次，则该方法将使用计算机化设备释放非承诺批次以开始相应的时间敏感处理序列。

2. 发明授权

US08452437B2 Product release control into time-sensitive processing environments 失效
标题翻译：产品发布控制到时间敏感的处理环境中
公开(公告)号：US08452437B2
公开(公告)日：2013-05-28
申请号：US12615351
申请日：2009-11-10
申请人： Richard G. Burda , John T. Federico , Oliver Liao , Thomas D. Stahlecker , Jonathan Levy , Benjamin Wheeler
发明人： Richard G. Burda , John T. Federico , Oliver Liao , Thomas D. Stahlecker , Jonathan Levy , Benjamin Wheeler
IPC分类号： G06F7/00
CPC分类号： G06Q10/06 , G06Q50/04 , Y02P90/30
摘要： A method identifies time sensitive processing sequences within a production environment using a computerized device. The processing sequences perform operations utilizing one or more tools. The method also identifies non-committed work in process items that are grouped in non-committed lots for release into one or more of the time sensitive processing sequences, and identifies committed work in process items that are being processed in committed lots within the time sensitive processing sequences, using the computerized device. The method sorts the non-committed lots by a predetermined priority, again using the computerized device. Starting with the highest priority non-committed lot (and continuing with others of the non-committed lots in priority order) the method determines whether there is available tool capacity to process a non-committed lot through each corresponding time sensitive processing sequence using the computerized device. If the tool capacity is available for the non-committed lot, the method releases the non-committed lot to begin the corresponding time sensitive processing sequences, using the computerized device.
摘要翻译：一种方法使用计算机化设备识别生产环境中的时间敏感处理序列。处理顺序使用一个或多个工具执行操作。该方法还可以识别分组在非承诺批次中的过程项目中的非承诺工作，以将其发布到一个或多个时间敏感的处理序列中，并在敏感时间内识别正在处理的进程项目中的承诺工作处理序列，使用计算机化的设备。该方法再次使用计算机化的设备对未承诺的批次进行排序预定的优先级。从最高优先级的非承诺批次开始（并以优先级顺序与其他未承诺的批次继续），该方法确定是否有可用的工具容量通过每个相应的时间敏感处理序列处理非承诺批次，使用计算机化设备。如果工具容量可用于非承诺批次，则该方法将使用计算机化设备释放非承诺批次以开始相应的时间敏感处理序列。

3. 发明授权

US07565218B2 Method and system of prioritization for managing manufacturing processes 失效
标题翻译：管理制造过程的优先级的方法和系统
公开(公告)号：US07565218B2
公开(公告)日：2009-07-21
申请号：US11393027
申请日：2006-03-30
申请人： Richard G. Burda , Aseem K. Joshi , Sameer T. Shikalgar , Susan Kangas van Oss , Patrick R. Varekamp
发明人： Richard G. Burda , Aseem K. Joshi , Sameer T. Shikalgar , Susan Kangas van Oss , Patrick R. Varekamp
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A system and method are disclosed for prioritizing a plurality of lots in a manufacturing process. Portions of a priority for each lot are created. The portions are combined to form a unique range priority for each lot. The range priorities may be used to equitable compare all of the active lots in a fabrication facility. The system and method may be implemented as part of a range management system.
摘要翻译：公开了一种用于在制造过程中优先考虑多个批次的系统和方法。创建每个批次的优先级的部分。这些部分被组合以形成每个批次的唯一的范围优先级。范围优先级可用于公平地比较制造设施中的所有活动批次。系统和方法可以被实现为范围管理系统的一部分。

4. 发明授权

US07239930B2 Method, system, and computer program product for improved flow of development lots in a manufacturing facility 失效
标题翻译：方法，系统和计算机程序产品，用于改进制造设施中开发批次的流动
公开(公告)号：US07239930B2
公开(公告)日：2007-07-03
申请号：US10908714
申请日：2005-05-24
申请人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Robert J. Milne , Elizabeth L. Williamson
发明人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Robert J. Milne , Elizabeth L. Williamson
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , Y02P90/86
摘要： The present invention provides a method, system, and computer program product for improved flow of development lots in a manufacturing facility. A method in accordance to one embodiment of the present invention comprises: establishing at least one target for processing of a set of development lots in the manufacturing facility; monitoring a progress of the set of development lots in the manufacturing facility; comparing the progress of the set of development lots against the at least one target; establishing at least one suggested action for the set of development lots if the progress of the set of development lots deviates from the at least one target; and deciding which development lots in the set of development lots to assign to at least one tool in the manufacturing facility, wherein the at least one suggested action is incorporated into the assignment decision.
摘要翻译：本发明提供了一种用于改进制造设备中的开发批次的流程的方法，系统和计算机程序产品。根据本发明的一个实施例的方法包括：建立至少一个目标，用于处理制造设施中的一组开发批次; 监测制造设施中的一批开发项目的进度; 将发展项目集合的进度与至少一个目标进行比较; 如果一组开发项目的进度偏离至少一个目标，则为该组开发项目建立至少一个建议行动; 以及将所述开发批次中的哪些开发批次分配给所述制造设施中的至少一个工具，其中所述至少一个建议的动作被并入到所述分配决定中。

5. 发明授权

US07206652B2 Method and system for intelligent automated reticle management 有权
标题翻译：智能自动标线管理方法与系统
公开(公告)号：US07206652B2
公开(公告)日：2007-04-17
申请号：US10711079
申请日：2004-08-20
申请人： Richard G. Burda , Alfred Degbotse , Brian T Denton , Kenneth J. Fordyce , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
发明人： Richard G. Burda , Alfred Degbotse , Brian T Denton , Kenneth J. Fordyce , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
IPC分类号： G06F19/00
CPC分类号： G03F7/70741
摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
摘要翻译：一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站，在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具。根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

6. 发明授权

US07953507B2 Method and system for intelligent automated reticle managment 有权
标题翻译：智能自动光罩管理方法与系统
公开(公告)号：US07953507B2
公开(公告)日：2011-05-31
申请号：US11669179
申请日：2007-01-31
申请人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Sanjay Hegde , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
发明人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Sanjay Hegde , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
IPC分类号： G06F19/00
CPC分类号： G03F7/70741
摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
摘要翻译：一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站，在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具。根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

7. 发明授权

US07305276B2 Method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control 失效
标题翻译：方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中材料的流动
公开(公告)号：US07305276B2
公开(公告)日：2007-12-04
申请号：US11163793
申请日：2005-10-31
申请人： Richard G. Burda , Alfred T. Degbotse , Brian T. Denton , Kenneth J. Fordyce , Robert J. Milne
发明人： Richard G. Burda , Alfred T. Degbotse , Brian T. Denton , Kenneth J. Fordyce , Robert J. Milne
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： The present invention provides a method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control. A method in accordance to an embodiment of the present invention comprises establishing an extended zone of control including a high impact tool set and at least one other tool set, analyzing projected job arrivals at the high impact tool set, and adjusting a flow of material between the high impact tool set and the at least one other tool set based on the analysis of projected job arrivals at the high impact tool set.
摘要翻译：本发明提供一种方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中的材料的流动。根据本发明的实施例的方法包括建立包括高冲击工具组和至少一个其他工具组的扩展控制区域，分析在高冲击工具组上的投影作业到达，以及调整在高冲击工具组之间的材料流动高冲击工具组和至少一个其他工具组，其基于对高冲击工具组的预期工作到达的分析。

8. 发明授权

US07085614B1 Method, system, and computer program product for optimizing throughput of lots 失效
标题翻译：方法，系统和计算机程序产品，用于优化批量吞吐量
公开(公告)号：US07085614B1
公开(公告)日：2006-08-01
申请号：US11160704
申请日：2005-07-06
申请人： Karl E. Gartland , Richard G. Burda
发明人： Karl E. Gartland , Richard G. Burda
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32298 , G05B2219/45031 , Y02P90/20 , Y02P90/265
摘要： A method, system, and computer program product for optimizing throughput of lots in a production facility is provided. The method includes assigning lot subtypes to lots in the production facility. One of the lot subtypes is a designator for distinguishing lots selected for expedited handling. When the lots enter a production queue, the method includes identifying a lot having the designator, the lot awaiting at least one process. In response to identifying the lot having the designator, the method includes sending an inhibit signal to a machine for preventing dispatch of a lot in the production queue that is next in line for the machine and which does not have the designator. In response to receiving a signal that the machine is available, the method includes sending a signal to the machine for binding the machine to the lot having the designator.
摘要翻译：提供了一种用于优化生产设备中批量生产量的方法，系统和计算机程序产品。该方法包括将批次子类型分配给生产设备中的批次。许多亚型之一是用于区分选择加快处理的批次的指示符。当批量进入生产队列时，该方法包括识别具有指示符的批次，批量至少等待至少一个进程。响应于识别具有指示符的批次，该方法包括向机器发送禁止信号，以防止在生产队列中批量下一次在机器中排队并且不具有指示符。响应于接收到机器可用的信号，该方法包括向机器发送信号以将机器绑定到具有指示符的批次。

9. 发明授权

US08239053B2 Method and system for setting rates and targets in a range management system 失效
标题翻译：在范围管理系统中设定费率和目标的方法和系统
公开(公告)号：US08239053B2
公开(公告)日：2012-08-07
申请号：US12492373
申请日：2009-06-26
申请人： Richard G. Burda , Aseem K. Joshi , Sameer T. Shikalgar , Susan van Oss , Patrick R. Varekamp
发明人： Richard G. Burda , Aseem K. Joshi , Sameer T. Shikalgar , Susan van Oss , Patrick R. Varekamp
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , H01L21/67253 , H01L21/67276
摘要： A method and apparatus includes determining a number of planned starts of a product during a predetermined time period for future processing, averaging the number of planned starts for the predetermined time period, and setting a production rate for a first range based on the average number of planned starts.
摘要翻译：一种方法和装置，包括在预定时间段内确定产品的计划启动次数以供将来处理，对预定时间段的计划开始次数进行平均，并且基于平均数量设定第一范围的生产率计划开始

10. 发明授权

US07477957B2 Method and system of controlled movement of dynamic-route WIP 失效
标题翻译：动态路由WIP的受控移动方法和系统
公开(公告)号：US07477957B2
公开(公告)日：2009-01-13
申请号：US11393030
申请日：2006-03-30
申请人： Richard G. Burda , Aseem K. Joshi , Sameer T. Shikalgar , Susan Kangas van Oss , Patrick R. Varekamp
发明人： Richard G. Burda , Aseem K. Joshi , Sameer T. Shikalgar , Susan Kangas van Oss , Patrick R. Varekamp
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A system and method for driving new technology WIP at a controlled speed side-by-side with production WIP using a common range management infrastructure. The system and method allow new technology WIP and production WIP to be driven together in the same fabricator with the same degree of speed and predictability. The system and method may include at least one device configured to create a target based on a sum of active WIP targets for at least one route, find all lots of active WIP on the at least one route, tag each of the lots until a first occurrence of a sum of WIP of the tagged lots exceeds or equals the target, and assign a priority to each of the tagged lots based on a predetermined criteria.
摘要翻译：使用共同的范围管理基础设施，通过生产WIP并行地以受控的速度驱动新技术WIP的系统和方法。系统和方法允许新技术WIP和生产WIP以相同的速度和可预测性在相同的制造商中一起驱动。所述系统和方法可以包括至少一个设备，其被配置为基于至少一个路由的活动WIP目标的总和来创建目标，在所述至少一个路由上找到所有大量的活动WIP，将每个批次标记，直到第一个标签批次的WIP总和的发生超过或等于目标，并且基于预定标准为每个标记批次分配优先级。

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