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    • 3. 发明授权
    • Air-guage nozzle probe structure for microlithographic image focusing
    • 用于微光刻图像聚焦的气流探头结构
    • US6029361A
    • 2000-02-29
    • US47422
    • 1998-03-25
    • Thomas H. Newman
    • Thomas H. Newman
    • G01B13/00G01B13/12G01B21/16
    • G01B13/00Y10S33/02
    • An air-probe structure of an air-gauge nozzle that defines an air-probe bore having an elongated, relatively small-area output tip (e.g., 0.3.times.1.3 millimeters) situated at the air-probe structure's output end. Such an air-gauge nozzle is useful in controlling the distance between the bore's output tip and a rowbar workpiece (employed in an optical microlithographic pole trimming step of the fabrication process for thin-film heads) in accordance with the air pressure measured by the air gauge. The air-probe structure's output end preferably also comprises a relatively large-area protective manifold (e.g., 6.times.7 millimeters) surrounding the elongated, relatively small-area output tip. This manifold, which protects the bore's output tip from damage which would otherwise result from inadvertent contact between the rowbar and the bore's elongated, small-area output tip, includes a set of interconnected channels to provide an escape route for air emerging from the bore's output tip and thereby prevent back pressure from being produced in the air-probe bore in response to the output end of said air-probe structure being situated in close proximity to the rowbar. A protective manifold Is also useful in protecting a conventional circular, small-area air-probe bore output tip of an air-probe structure from this type of damage. Also disclosed are air-gauge nozzles comprising a single block that, alternatively, has either two or three spaced-apart, functionally-independent air-probe structures extending from the output end of the single block.
    • 空气规管喷嘴的空气探针结构,其限定空气探针孔,其具有位于空气探针结构的输出端处的细长的相对小面积的输出尖端(例如,0.3×1.3毫米)。 这样的空气喷嘴可用于根据由空气测量的空气压力来控制孔的输出端和行栏工件之间的距离(在薄膜头的制造工艺的光学微光刻极化修整步骤中使用) 测量。 空气探针结构的输出端优选地还包括围绕细长的相对小面积的输出尖端的相对大面积的保护性歧管(例如,6×7毫米)。 该歧管保护孔的输出尖端不会由于排列与孔的细长的小面积输出端之间的无意接触而造成的损伤,包括一组相互连接的通道,以提供从孔的输出中排出的空气的排出路径 从而防止响应于所述空气探针结构的输出端位于靠近行栏而在空气探针孔中产生背压。 保护性歧管也可用于保护传统的圆形,小面积的空气探针孔输出尖端的空气探针结构免受此类损坏。 还公开了包括单个块的空气计量喷嘴,或者具有从单个块的输出端延伸的具有两个或三个隔开的功能上独立的空气探针结构的单个块。
    • 7. 发明授权
    • Method and apparatus for rotary cutter blade adjustment
    • 旋转刀片调整方法和装置
    • US06449864B1
    • 2002-09-17
    • US09624981
    • 2000-07-25
    • Thomas H. Newman
    • Thomas H. Newman
    • B23B100
    • B27G13/04B26D7/2628
    • A longitudinal gage fixture extends the entire length of the cutting blade and provides positively locked, parallel surfaces that uniformly and reliably set the proper height of the gage blade along its length while in a blade holder, In use, the device requires no frictional movement of the gage along the length of the blade, and adjustment of the blade may be achieved in an accurate, single-step process. The entire blade and holder assembly is positioned within the gage fixture and adjusting screwy at the base of the holder are accessed through apertures in a base plate of the gage fixture so that all necessary adjustments of the blade may be made with the holder insitu without any movement of the holder. Only movement of the blade within the holder is required during adjustment. Once properly adjusted, the tightening down of the blade may also be accomplished with the blade and holder still within the gage fixture.
    • 纵向量具固定装置延伸切割刀片的整个长度,并提供可靠地锁定的平行表面,其在刀片保持器中均匀且可靠地设定其规格尺寸的适当高度。在使用中,该装置不需要摩擦运动 沿着刀片长度的量具和刀片的调节可以以准确的单步过程实现。 整个刀片和保持器组件定位在量规夹具内,并且在保持器的底部处的调节螺纹通过量具固定装置的底板中的孔进入,使得刀片的所有必要的调整可以在保持器本体上进行而没有任何 持有人的运动。 在调整过程中只需要刀片在支架内的运动。 一旦适当调整,也可以通过刀片和保持器仍在量规夹具内来实现叶片的紧固。
    • 8. 发明授权
    • Process for the preparation of arylcyclobutene terminated condensation
polymers
    • 制备ARYLCYCLOBUTENE终止凝聚聚合物的方法
    • US5171824A
    • 1992-12-15
    • US632868
    • 1990-12-24
    • Maurice J. MarksAlan K. SchrockThomas H. Newman
    • Maurice J. MarksAlan K. SchrockThomas H. Newman
    • C08G63/00C08G63/20C08G63/64C08G64/00C08G64/14C08G64/20C08G64/22C08G64/26C08G64/30C08G85/00
    • C08G63/64C08G63/20C08G64/14
    • In an improved process condensation polymers having terminal arylcyclobutene moieties are prepared. Such polymers are prepared by adding to a condensation polymerization process one or more arylcyclobutene chain terminating compounds along with the multi-hydric compounds and condensation polymer precursors that are typically employed in such a process. Desirably the condensation polymers have an average degree of polymerization of at least about 2, preferably at least about 3 based on multi-hydric compound. This process can be used to prepare a range of condensation polymers including polycarbonates, polyesters and polyester-carbonates. The resulting products can be easily processed and shaped into various forms and structures according to the known techniques. During or subsequent to the processing, the polymers can be crosslinked, by exposure to heat or radiation, for example, to provide crosslinked polymer compositions. These compositions have a good combination of properties, including for example, processability into shaped articles having unexpectedly good combinations of toughness, solvent resistance, ignition resistance, modulus and resistance to thermal linear expansion.
    • 在改进的方法中,制备具有末端芳基环丁烯部分的缩合聚合物。 这样的聚合物通过在缩合反应过程中加入一种或多种芳基环丁烯链终止化合物以及通常用于这种方法中的多羟基化合物和缩聚物前体而制备。 理想地,缩合聚合物的平均聚合度基于多羟基化合物至少约2,优选至少约3。 该方法可用于制备一系列缩合聚合物,包括聚碳酸酯,聚酯和聚酯 - 碳酸酯。 所得产品可以根据已知技术容易地加工成各种形式和结构。 在加工期间或之后,聚合物可以通过暴露于热或辐射而交联,例如提供交联的聚合物组合物。 这些组合物具有良好的性能组合,包括例如具有出乎意料的良好的韧性,耐溶剂性,耐点火性,模量和耐热线性膨胀组合的成型制品的加工性能。