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    • 10. 发明授权
    • Semiconductor device with a cooling element
    • 具有冷却元件的半导体器件
    • US07567597B2
    • 2009-07-28
    • US10522518
    • 2003-06-10
    • Stefan Groetsch
    • Stefan Groetsch
    • H01S3/04H01S5/00
    • H01S5/4025H01L23/473H01L2924/0002H01S5/02272H01S5/02423H01S5/02484H01L2924/00
    • A semiconductor device comprising a semiconductor component, particularly a power laser diode bar, disposed on a cooling element, wherein the cooling element contains in its interior a cooling channel for conducting a coolant. The coolant channel comprises in at least one region microstructures for effective heat transfer to the coolant. The semiconductor component substantially completely overlaps the region of the cooling channel comprising the microstructures. Disposed between the semiconductor component and the cooling element is an intermediate support so arranged and configured that it compensates for mechanical stresses between the semiconductor component and the cooling element occurring as a result of differing thermal expansions of the semiconductor component and the cooling element. The material of the cooling element particularly preferably has a high modulus of elasticity such that the compensation takes place substantially within the elastic strain regime.
    • 一种半导体器件,包括设置在冷却元件上的半导体部件,特别是功率激光二极管条,其中冷却元件在其内部包含用于引导冷却剂的冷却通道。 冷却剂通道包括至少一个区域微结构,用于有效地传递给冷却剂。 半导体部件与包括微结构的冷却通道的区域基本上完全重叠。 设置在半导体部件和冷却元件之间的是中间支撑件,其被布置和构造成补偿由于半导体部件和冷却元件的不同的热膨胀而导致的半导体部件和冷却元件之间的机械应力。 冷却元件的材料特别优选具有高弹性模量,使得补偿基本上在弹性应变状态内发生。