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    • 1. 发明授权
    • Self aligning electron beam gun having enhanced thermal and mechanical
stability
    • 自对准电子束枪具有增强的热和机械稳定性
    • US5416381A
    • 1995-05-16
    • US101161
    • 1993-08-03
    • Raymond D. Scarpetti, Jr.Clarence D. ParkisonVernon A. SwitzerYoung J. LeeWilliam C. Sawyer
    • Raymond D. Scarpetti, Jr.Clarence D. ParkisonVernon A. SwitzerYoung J. LeeWilliam C. Sawyer
    • H01J3/02H01J37/065H01J29/46
    • H01J37/065H01J3/027H01J2237/062
    • A compact, high power electron gun having enhanced thermal and mechanical stability which incorporates a mechanically coupled, self aligning structure for the anode and cathode. The enhanced stability, and reduced need for realignment of the cathode to the anode and downstream optics during operation are achieved by use of a common support structure for the cathode and anode which requires no adjustment screws or spacers. The electron gun of the present invention also incorporates a modular design for the cathode, in which the electron emitter, its support structure, and the hardware required to attach the emitter assembly to the rest of the gun are a single element. This modular design makes replacement of the emitter simpler and requires no realignment after a new emitter has been installed. Compactness and a reduction in the possibility of high voltage breakdown are achieved by shielding the "triple point" where the electrode, insulator, and vacuum meet. The use of electric discharge machining (EDM) for fabricating the emitter allows for the accurate machining of the emitter into intricate shapes without encountering the normal stresses developed by standard emitter fabrication techniques.
    • 具有增强的热和机械稳定性的紧凑型高功率电子枪,其结合用于阳极和阴极的机械耦合的自对准结构。 通过使用阴极和阳极的公共支撑结构,不需要调节螺钉或间隔件,可以实现增强的稳定性和减少阴极重新对准阳极和下游光学器件的需要。 本发明的电子枪还包括用于阴极的模块化设计,其中电子发射器,其支撑结构以及将发射器组件附接到枪的其余部分所需的硬件是单个元件。 这种模块化设计使得更简单的发射器更换,并且在安装新的发射器后不需要重新对准。 通过屏蔽电极,绝缘体和真空相遇的“三点”来实现紧凑性和降低高压击穿可能性。 使用放电加工(EDM)制造发射极允许将发射极精确地加工成复杂的形状,而不会遇到由标准发射极制造技术产生的法向应力。