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    • 2. 发明申请
    • THERMAL MASS FLOW SENSOR
    • 热流量传感器
    • US20060048568A1
    • 2006-03-09
    • US10936122
    • 2004-09-08
    • Oleg KorniyenkoDavid Chandu-LallDaesik Park
    • Oleg KorniyenkoDavid Chandu-LallDaesik Park
    • G01F1/68
    • G01F1/692G01F1/6842G01F1/698
    • A thermal mass flow sensor is disclosed that includes a housing (16) having a first sensor region and a second sensor region, a first thin film temperature sensor (39) formed at the first sensor region and a second thin film temperature sensor (58) formed at the second sensor region. A heating element (40) is arranged to heat the first temperature sensor (39) and a controller (46) is operably connected to the first temperature sensor (39), the second temperature sensor (58) and the heating element (40), and controls a power level to the heating element (40) to maintaining a temperature difference between the first temperature sensor (39) and the second temperature sensor (58). A thin film temperature sensor and a method of using the thermal mass flow sensor are also disclosed.
    • 公开了一种热质量流量传感器,其包括具有第一传感器区域和第二传感器区域的壳体(16),形成在第一传感器区域处的第一薄膜温度传感器(39)和第二薄膜温度传感器(58) 形成在第二传感器区域。 加热元件(40)被布置成加热第一温度传感器(39),并且控制器(46)可操作地连接到第一温度传感器(39),第二温度传感器(58)和加热元件(40) 并且控制到所述加热元件(40)的功率水平以维持所述第一温度传感器(39)和所述第二温度传感器(58)之间的温度差。 还公开了薄膜温度传感器和使用热质量流量传感器的方法。