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    • 3. 发明申请
    • Method for fabricating quartz-based nanoresonators
    • 制造石英基纳米谐振器的方法
    • US20070205839A1
    • 2007-09-06
    • US11800294
    • 2007-05-04
    • Randall KubenaDavid ChangJinsoo Kim
    • Randall KubenaDavid ChangJinsoo Kim
    • H03B5/32
    • H03H9/19H03H3/04H03H2003/0414H03H2009/241Y10T29/42Y10T29/49005Y10T29/4908Y10T29/49128Y10T29/49165
    • A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned
    • 公开了一种用于制造可集成在基底上的石英纳米谐振器的方法以及其它电子器件。 在该方法中,将石英基板接合到基底基板。 石英衬底被金属化,使得偏置电压被施加到谐振器,从而使得石英衬底在大于100MHz的谐振频率下谐振。 石英衬底然后可用于以等于其谐振频率的频率驱动其它电气元件。 石英衬底还包含调谐垫以调节谐振器的谐振频率。 此外,提供了一种用于精确稀薄谐振器的石英衬底的方法。 该方法允许在石英衬底同时变薄的同时监测石英衬底的厚度
    • 4. 发明申请
    • DISC RESONATOR GYROSCOPES
    • DISC共振器GYROSCOPES
    • US20070017287A1
    • 2007-01-25
    • US11458911
    • 2006-07-20
    • Randall KubenaDavid Chang
    • Randall KubenaDavid Chang
    • G01P15/14
    • G01C19/5684
    • Embodiments of the present invention are directed to apparatuses and methods of making a micromachined resonator gyroscope, e.g. a disc resonator gyro (DRG), including one or more of the following novel features. Embodiments of the invention may comprise a triple-wafer stack gyroscope with an all fused quartz (or all silicon) construction for an electrical baseplate, resonator and vacuum cap. This can yield superior thermal stability over prior art designs. A typical resonator embodiment may include a centrally anchored disc with high aspect-ratio in-plane electrostatic drive and sense electrodes to create large capacitance. A silicon sacrificial layer may be employed for attaching a quartz resonator wafer to a quartz handle wafer for high aspect-ratio etching. In addition, embodiments of the invention may comprise a low thermal stress, wafer-level vacuum packaged gyroscope with on-chip getter. An ultra-thin conductive layer deposited on the quartz resonator may also be utilized for high Q.
    • 本发明的实施例涉及制造微加工谐振器陀螺仪的装置和方法,例如, 盘谐振器陀螺仪(DRG),其包括以下新颖特征中的一个或多个。 本发明的实施例可以包括具有用于电气基板,谐振器和真空盖的全熔融石英(或全硅)结构的三晶片堆叠陀螺仪。 这可以比现有技术的设计产生优异的热稳定性。 典型的谐振器实施例可以包括具有高纵横比面内静电驱动的中心锚定盘和感测电极以产生大的电容。 可以使用硅牺牲层将石英谐振器晶片连接到用于高纵横比蚀刻的石英处理晶片。 此外,本发明的实施例可以包括具有片上吸气剂的低热应力晶片级真空包装陀螺仪。 沉积在石英谐振器上的超薄导电层也可用于高Q值。
    • 7. 发明授权
    • Architecture for scalable virtual network services
    • 可扩展虚拟网络服务架构
    • US08730980B2
    • 2014-05-20
    • US13337379
    • 2011-12-27
    • Nagaraj BagepalliAbhijit PatraDavid Chang
    • Nagaraj BagepalliAbhijit PatraDavid Chang
    • H04L12/56
    • H04L49/356H04L49/70
    • Techniques are provided to start a virtual service node that is configured to provide network traffic services for one or more virtual machines. The virtual service node has at least one associated service profile comprising identifiers for corresponding service policies for network traffic services. The service policies identified in the at least one associated service profile are retrieved. A virtual machine is started with an associated virtual interface and a port profile is applied to the virtual interface, including information identifying the service profile. Information is provided to the virtual service node that informs the virtual service node of network parameters and assigned service profile of the virtual machine. Network traffic associated with the virtual machine is intercepted and redirected to the virtual service node. A virtual service data path is provided that enables dynamic service binding, virtual machine mobility support, and virtual service node chaining and/or clustering.
    • 提供技术来启动被配置为为一个或多个虚拟机提供网络流量服务的虚拟服务节点。 虚拟服务节点具有包括用于网络业务服务的相应服务策略的标识符的至少一个相关联的服务简档。 检索在至少一个关联服务简档中标识的服务策略。 启动一个虚拟机与一个关联的虚拟接口,端口配置文件应用于虚拟接口,包括标识服务配置文件的信息。 信息被提供给向虚拟服务节点通知虚拟机的网络参数和分配的服务简档的虚拟服务节点。 与虚拟机关联的网络流量被拦截并重定向到虚拟服务节点。 提供虚拟服务数据路径,其实现动态服务绑定,虚拟机移动性支持以及虚拟服务节点链接和/或聚类。
    • 10. 发明申请
    • LIGHT SOURCE AND FIBER OPTIC BRUSH FOR LIGHT DELIVERY
    • 光源和纤维光刷用于光交付
    • US20080172112A1
    • 2008-07-17
    • US12014450
    • 2008-01-15
    • Zafirios GourgouliatosDavid Chang
    • Zafirios GourgouliatosDavid Chang
    • A61N5/067
    • A61N5/0617A61N5/0616A61N2005/063A61N2005/0644A61N2005/0654A61N2005/0661
    • A phototherapy apparatus is disclosed including: a handpiece including a body member and a grip; a plurality of elongated light transmitting elements, each of the elements extending between a proximal end enclosed within the body member and a distal end located outside of and distal to the body member; an ultraviolet light source; a light collection element; and one or more optical coupling elements. The proximal ends of the light transmitting elements are located in close proximity to each other The light collection element is configured to collect at least a portion of the light emitted from the light source. The one or more optical coupling elements are configured to direct at least a portion of the collected light to the proximal ends of the light transmitting elements to couple at least portion of the collected light into the light transmitting elements The light coupled into each of the light transmitting elements is transmitted along the element and emitted from the distal end.
    • 公开了一种光疗装置,包括:手柄,其包括主体部件和手柄; 多个细长的光透射元件,每个元件在封闭在主体构件内的近端和位于本体构件外部和远端的远端之间延伸; 紫外光源; 光收集元件; 和一个或多个光耦合元件。 光传输元件的近端彼此靠近地定位。光收集元件被配置为收集从光源发射的光的至少一部分。 所述一个或多个光学耦合元件构造成将所收集的光的至少一部分引导到光透射元件的近端,以将至少部分收集的光耦合到光传输元件中。耦合到每个光中的光 发射元件沿着元件传输并从远端发射。