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    • 7. 发明授权
    • Method of making ceramic microwave electronic package
    • 陶瓷微波电子封装方法
    • US5448826A
    • 1995-09-12
    • US231492
    • 1994-04-22
    • Martin GoetzJoseph Babiarz
    • Martin GoetzJoseph Babiarz
    • H01L21/00H01L23/66H05K13/00
    • H01L21/67121H01L23/66H01L2924/0002H01L2924/09701H01L2924/3011Y10T29/49121Y10T29/49126Y10T29/49158
    • A ceramic microelectronic package suitable for high-frequency microelectronic devices includes a base which is at least partially conductive attached either by seal glass or by solder to a ceramic RF substrate with a cavity formed at its center and a pattern of conductive paths for providing interconnection from the inside to the outside of the package. The base may be metal or ceramic with a metal layer deposited thereon. A ceramic seal ring with a second cavity corresponding to that of the RF substrate, but slightly larger, is attached to the RF substrate by seal glass which is patterned to generally match the dimensions of the seal ring. A ceramic lid is attached to the top of the seal ring by a non-conductive adhesive, such as a polymer adhesive or low temperature seal glass, to seal the package once the microelectronic device has been mounted inside.
    • 适用于高频微电子器件的陶瓷微电子封装包括至少部分导电的基底,其通过密封玻璃或通过焊料附着到具有形成在其中心的空腔的陶瓷RF基板,以及用于提供从 内到外包装。 基底可以是金属或陶瓷,其上沉积有金属层。 具有对应于RF衬底的第二腔但稍大的陶瓷密封环通过被图案化以与密封环的尺寸大体匹配的密封玻璃附接到RF衬底。 陶瓷盖通过非导电粘合剂(例如聚合物粘合剂或低温密封玻璃)附接到密封环的顶部,以在微电子装置安装在内部之后密封包装。