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    • 1. 发明授权
    • Multilayer substrate
    • 多层基板
    • US07781328B2
    • 2010-08-24
    • US11868898
    • 2007-10-08
    • Rajiv ShahShaun PendoEdward B. Babiricki
    • Rajiv ShahShaun PendoEdward B. Babiricki
    • H01L21/4763
    • H01L21/4857H01L2924/0002H05K1/092H05K3/4061H05K3/4647H05K3/4667H05K3/467H05K2201/0179H05K2203/0278H01L2924/00
    • A multilayer substrate device formed from a base substrate and alternating metalization layers and dielectric layers. Each layer is formed without firing. Vias may extend through one of the dielectric layers such that two metalization layers surrounding the dielectric layers make contact with each other. The vias may be formed by placing pillars on top of a metalization layer, forming a dielectric layer on top of the metalization layer and surrounding the pillars, and removing the pillars. Dielectric layers may be followed by other dielectric layers and metalization layers may be followed by other metalization layers. Vias in the substrate may be filled by forming an assembly around the substrate, the assembly including printing sheets containing a conductive ink and pressure plates for applying pressure. A vacuum may be applied to remove air in the ink. Pressure may then be applied to the printing sheets through the pressure plates. The conductive ink in the printing sheets is pushed through the vias when pressure is applied by the pressure plates.
    • 由基底基板和交替的金属化层和电介质层形成的多层衬底器件。 每层形成而不烧制。 通孔可以延伸穿过介电层之一,使得围绕电介质层的两个金属化层彼此接触。 可以通过将金属化层顶部放置柱子形成通孔,在金属化层的顶部上形成电介质层并围绕柱子,并移除支柱。 电介质层之后可以是其它电介质层,金属化层之后可以是其它金属化层。 可以通过在基板周围形成组件来填充基板中的通孔,该组件包括含有导电油墨的印刷纸和用于施加压力的压力板。 可以施加真空以除去油墨中的空气。 然后可以通过压力板将压力施加到印刷纸上。 当通过压力板施加压力时,打印纸中的导电油墨被推过通孔。