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    • 6. 发明授权
    • Method and device for optically examining structured surfaces of objects
    • 用于光学检查物体的结构化表面的方法和装置
    • US06633375B1
    • 2003-10-14
    • US09647497
    • 2000-09-29
    • Michael VeithVolker KnorzEdgar Maehringer-Kunz
    • Michael VeithVolker KnorzEdgar Maehringer-Kunz
    • G01N2100
    • G02B21/125G01N21/9501H01L22/12
    • A method and an apparatus are described for the optical examination of structured surfaces of objects, especially of wafers and/or masks. The optical apparatus has an observation beam path (6) whose central axis (42) is directed vertically against the surface of the object (16), an illumination beam (2) whose central ray (40) falls vertically on the surface of the object, and an illumination beam (3) whose central ray (41) falls obliquely onto the surface of the object (16). In the observation beam path (6) the image of the surface of the object (6) is observed and/or detected. In the observation beam path (6) a filter device (38) and/or detector device (18) is disposed. The optical system has an illumination device (39) for the simultaneous production of a dark field illumination, a device for the coding (11) of the illumination beams (2, 3) being associated with the bright field (2) and/or the dark field illumination beam (3).
    • 描述了用于对物体,特别是晶片和/或掩模的结构化表面的光学检查的方法和装置。 该光学装置具有其中心轴( 42 )垂直指向的表面的观察光束路径( 6 ) 对象( 16 ),其中心射线( 40 > PDAT>)的照明光束( 2 / BOLD> )垂直地落在物体的表面上,并且其中心射线( 41 3 ) > )倾斜地落在对象的表面上( 16 )。 在观察光束路径( 6 )中观察到对象的表面( 6 )的图像和/或 检测到。 在观察光束路径( 6 )过滤装置( 38 )和/或检测装置( PDAT> 18 )。 光学系统具有用于同时产生暗场照明的照明装置( 39 ),用于编码的装置( 11 2 )相关联的照明光束( 2,3, )和/ 或暗场照明光束( 3 )。