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    • 7. 发明申请
    • CAPACITIVELY CONTROLLED FIELD EFFECT TRANSISTOR GAS SENSOR COMPRISING A HYDROPHOBIC LAYER
    • 含有疏水层的电容控制场效应气体传感器
    • WO2005012896A8
    • 2005-03-24
    • PCT/EP2004008309
    • 2004-07-24
    • MICRONAS GMBHUNIV ALBERT LUDWIGS FREIBURGRUEHE JUERGENSAMUEL J D JEYAPRAKASH SFRERICHS HEINZ-PETERLEHMANN MIRKO
    • RUEHE JUERGENSAMUEL J D JEYAPRAKASH SFRERICHS HEINZ-PETERLEHMANN MIRKO
    • G01N27/22G01N27/414
    • G01N33/0059G01N27/4143
    • The invention relates to a gas sensor (1) comprising a substrate (2) of a first charge carrier type whereon a drain (3) and a source (4) of a second charge carrier type are arranged. A channel area (8) is formed between the drain (3) and the source (4). The gas sensor (1) also comprises a gas sensitive layer (10) comprising poles (11, 12) between which a gas induced voltage is produced according to the concentration of a gas which is in contact with the layer (10). In order to measure said voltage, a pole (12) of the gas sensitive layer (10) is capacitatively coupled to the channel area (8) by means of an air gap (14) and the other pole (11) is connected to a counter-electrode (13) having a reference potential. A hydrophobic layer (19) is arranged on the surface of the gas sensor (1) between the gas sensitive layer (10) and the channel area (8) and/or on a sensor electrode which is connected to a gate electrode arranged on the channel area (8).
    • 一种气体传感器(1)包括衬底(2)上布置的漏极(3)和第二Ladungströgertyps源(4)的第一Ladungströgertyps的。 在排水管(3)和源(4)之间形成一个Kanolbereich(8)。 此外,气体传感器(1)具有一个气体敏感层(10),所述磁极(11,12),在它们之间发生在Abhöngigkeit气体感应电压位于接触气体中的层(10)的浓度,以测量电压 气体敏感层(10)经由Luftspolt其一个极(12)(14)被kopazitiv耦合到沟道区(8),并与连接到具有对置电极(13)的参考电势的另一极(11)。 在气体传感器的Oberflöche(1)的气体敏感层(10)和沟道区(8)和/或传感器电极,它们在所述栅电极电连接在所述沟道区域(8)布置成与一个之间,布置的疏水层(19) ,