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    • 1. 发明申请
    • METROLOGICAL APPARATUS AND METHOD USING POLARISATION MODULATION
    • 使用极化调制的计量装置和方法
    • WO1987004257A1
    • 1987-07-16
    • PCT/GB1987000001
    • 1987-01-06
    • RANK TAYLOR HOBSON LIMITED
    • RANK TAYLOR HOBSON LIMITEDFROOME, Keith, Davy
    • G01S17/08
    • G01S7/4812G01S7/4972G01S7/499G01S17/08
    • In a distance measuring system, polarised light is projected from a main unit (8) to a target reflector (46) and is reflected back. The polarisation is modulated by an electro-optical Pockels crystal (20) in the projected and returned paths, and a variable light path (42, 44) is adjusted to obtain a null at a photodetector (50) after the returned light has passed through a polarising filter (18). In order to enable a single filter (18) to be used for polarising the projected beam and filtering the returned beam, a relative retardation of about one quarter wavelength may be introduced into the projected and returned beams by a rhomb (38). In order to obviate the need to align the filter (18) direction with the axes of the crystal transverse to the beam, the rhomb may be placed before the crystal (20) in the projected beam so that the crystal receives generally circularly polarised light. In order to adjust the quality of the null obtainable at the photodetector, the orientation of the rhomb may be adjustable. In order to enable the null to be resolved more acurately, the modulation wavelength, the length of the light path, or a time delay in the light path may be ''wobbled''. In order to take measurements of a structure corrected to a datum temperature, the modulation wavelength may be defined with respect to a reference resonator (72) of the same material as the structure and placed in contact with the structure.
    • 2. 发明申请
    • IN SITU METHOD AND APPARATUS FOR BLOCKING LENSES
    • 用于阻挡镜片的现场方法和装置
    • WO1996012590A1
    • 1996-05-02
    • PCT/GB1995002464
    • 1995-10-18
    • RANK TAYLOR HOBSON LIMITED
    • RANK TAYLOR HOBSON LIMITEDCHALOUX, Leonard, Edwin
    • B24B13/005
    • B24B13/005B24B13/0025Y10T82/10
    • A blocking technique and apparatus are used to mount a partially finished lens (20a) or other component to an arbor (30), which is useable to hold the partially finished lens (20a) for subsequent machining or mechanical operations. The blocking of the partially finished lens (20a) occurs on the same axes of the multi-axis machining device (10) that were used to generate the partially finished lens (20a). The blocking of the partially finished lens (20a) occurs without removing the partially finished lens (20a) from the workpiece holder (28) which held the partially finished lens (20a) during the machining operation. Accurate and repeatable blocking is achieved using the axes of the lens generating equipment.
    • 使用阻挡技术和装置将部分成品的镜片(20a)或其他部件安装到心轴(30)上,该心轴可用于保持部分成品的镜片(20a)用于随后的加工或机械操作。 部分完成的透镜(20a)的阻挡发生在用于产生部分完成的透镜(20a)的多轴加工装置(10)的相同的轴上。 在加工操作期间,没有从保持部分完成的镜片(20a)的工件保持器(28)中移除部分完成的镜片(20a)而发生部分完成的镜片(20a)的阻挡。 使用透镜发生设备的轴实现精确和可重复的遮挡。
    • 4. 发明申请
    • ANGLE DETECTION
    • 角度检测
    • WO1993021496A1
    • 1993-10-28
    • PCT/GB1993000790
    • 1993-04-15
    • RANK TAYLOR HOBSON LIMITEDSEE, Chung, Wah
    • RANK TAYLOR HOBSON LIMITED
    • G01B11/26
    • G01S17/48G01B11/26G01D5/30G01S17/06
    • A system for measuring the angle of a beam of light is arranged so that a periodically varying pattern is formed on a photodetector (11), with a waveform property such as wavelength or phase of the pattern varying with the angle of the light. This may be done by creating interference between the light beam to be measured and a reference light beam having a fixed angle, or by forming a shadow on the detector array (11) of one or more masks (23, 25) having a periodically varying transmission characteristic. One convenient way of processing the output of the photodetector array is to perform a fast Fourier transform, obtain therefrom one or more spatial frequency components, and extract therefrom a part which provides a measure of the angle of the light beam. The use of a periodically varying pattern on the photodetector array (11) enables a substantial length of the array to be used in any particular measurement operation, and averages out individual performance differences between different elements of the photodetector array (11). The use of waveform properties enables convenient signal processing to be carried out, for example using well known fast Fourier transform techniques.
    • 5. 发明申请
    • METROLOGICAL APPARATUS
    • WO1993014367A2
    • 1993-07-22
    • PCT/GB1993000037
    • 1993-01-08
    • RANK TAYLOR HOBSON LIMITEDBARNABY, Anthony, Bruce
    • RANK TAYLOR HOBSON LIMITED
    • G01B05/00
    • G01B5/0009
    • A metrological apparatus has a movable arm which (15) moves up and down between two bearing members (13), both of which define datum positions for the arm (15). The arm (15) has air bearings on the bearing members (13), so that it adopts a position equidistant between the bearing members (13). In this way, the position of the arm (15) contains the average of the errors in the two datum positions defined by the bearing members (13). Where the bearing members (13) have symmetric errors, these will be cancelled. Since the path of maximum straightness of movement of the arm (15) is spaced from the bearing members (13), it is possible to put a workpiece (3) in this path and a turntable (5) for supporting the workpiece (3) is arranged to have its rotational axis in line with the path of maximum straightness. The vertical positon of each end of the arm (15) is measured using a respective grating (25) and the average of the measurements is taken to provide an accurate measurement of the height of the centre point of the arm (15) over the workpiece (3), substantially free of Abbe errors.
    • 计量装置包括在两个支撑件(13)之间上下移动的可移动臂(15),这些限定了臂(15)的参考位置。 臂(15)在支撑件(13)上具有空气轴承,使得它在支撑件(13)之间采用等距离的位置。 这样,臂(15)的位置受到由支撑件(13)限定的两个参考位置的平均误差的影响。 当支撑件(13)具有对称的错误时,它们被取消。 由于最大直线路径在其运动,接着在臂(15)隔开的支撑(13),有可能放置的工件(3)在该方向上和用于支撑所述工件的旋转台(5) (3)布置成使得其旋转轴线与最大直线度路径对齐。 所述臂(15)的每个端部的垂直位置是由网格(25)和测量的各自的平均来测量被认为是获得该臂的中央点的高度的精确测量(15) (3)上,几乎没有阿贝误差。
    • 7. 发明申请
    • STYLUS ATTACHMENT FOR A METROLOGICAL INSTRUMENT
    • 用于仪表仪器的STYLUS附件
    • WO1996012929A1
    • 1996-05-02
    • PCT/GB1995002450
    • 1995-10-17
    • RANK TAYLOR HOBSON LIMITEDNETTLETON, David, John
    • RANK TAYLOR HOBSON LIMITED
    • G01B05/012
    • G01B5/012G01B5/28
    • An arrangement for mounting a stylus (9) on a stylus support (19) for a metrological instrument includes a camming pin (65) on a mounting disc (21) of the stylus support (19), which passes through a mounting hole (53) in a mounting disc (45) of the stylus (9). A spring (51) applies a sideway force to a sloping cam surface (71) of the camming pin (65), which is converted into a force pulling the camming pin (65) through the mounting hole (53) and thus holding the mounting discs (45, 21) together. An operator can deform the spring (51) so that it releases the camming pin (65), allowing the stylus (9) to be mounted or dismounted without applying significant force to the pivot bearing of the stylus support (19). If excessive radial force is applied to the stylus arm (43), the spring (51) will ride up the cam surface (71) allowing the stylus (9) to be released from the stylus support (19), thereby avoiding applying extreme forces to the pivot bearing.
    • 用于将测针(9)安装在用于计量仪器的触针支架(19)上的布置包括在触针支架(19)的安装盘(21)上的凸轮销(65),其穿过安装孔(53 )在触针(9)的安装盘(45)中。 弹簧(51)向凸轮销(65)的倾斜凸轮表面(71)施加侧向力,其转换成通过安装孔(53)拉动凸轮销(65)的力,从而保持安装 光盘(45,21)在一起。 操作者可以使弹簧(51)变形,使得其释放凸轮销(65),从而允许触针(9)被安装或拆卸,而不会对触针支撑件(19)的枢转轴承施加显着的力。 如果向触针臂(43)施加过大的径向力,则弹簧(51)将骑行凸轮表面(71),从而允许触针(9)从触针支架(19)释放,从而避免施加极大的力 到枢轴轴承。
    • 8. 发明申请
    • ROUNDNESS MEASURING
    • 圆度测量
    • WO1996012162A1
    • 1996-04-25
    • PCT/GB1995002460
    • 1995-10-18
    • RANK TAYLOR HOBSON LIMITEDSCOTT, Paul, James
    • RANK TAYLOR HOBSON LIMITED
    • G01B21/20
    • G01B21/20
    • A roundness measuring machine measures the position of the surface of an object (23) as the object is rotated on a turntable (7). The machine determines the circle (51) which is the best fit to the measured points (P) and converts the measurements (x) to distances (m) from the best fit circle. An improved algorithm for determining the best fit circle is used in place of the limacon fit. Calculated differences (1) between the measured surface position and the best fit circle are corrected for the effect of measuring the difference in the direction towards the centre (S) of rotation of the turntable (7) instead of in the direction towards the centre (W) of the circle (51). Data values are calculated representing points at equal angles ( theta ) around the centre (W) of the best fit circle rather than equal angles ( alpha ) around the centre (S) of rotation of the turntable. The improved accuracy of correction allows the machine to tolerate greater eccentricity of the workpiece (23) relative to the turntable (7), reducing the necessity for accurate centering of the workpiece.
    • 当物体在转台(7)上旋转时,圆度测量机测量物体(23)的表面的位置。 机器确定与测量点(P)最佳拟合的圆(51),并将测量值(x)从最佳拟合圆转换为距离(m)。 使用用于确定最佳拟合圆的改进的算法来代替limacon拟合。 校正测量的表面位置和最佳拟合圆之间的计算差异(1),用于测量朝向转台(7)的旋转中心(S)的方向上的差异的效果,而不是沿朝向中心的方向 W)。 计算数据值,代表最佳拟合圆周围中心(W)的相等角度(θ)的点,而不是围绕转盘旋转中心(S)的等角度(α)。 改进的校正精度允许机器相对于转台(7)容忍工件(23)更大的偏心度,从而减少了精确对准工件的必要性。
    • 9. 发明申请
    • METROLOGICAL STYLUS ASSEMBLY
    • 计量学大纲
    • WO1995025940A2
    • 1995-09-28
    • PCT/GB1995000559
    • 1995-03-15
    • RANK TAYLOR HOBSON LIMITEDMORRISON, Euan
    • RANK TAYLOR HOBSON LIMITED
    • G01B07/34
    • G01B7/34G01B5/28
    • A metrological instrument usable for scanning a small area (for example 0.5 mm x 0.5 mm) of the surface of a workpiece to detect roughness features has a stylus assembly in which a short (10 mm) lightweight (5 mg) stylus arm (9) is loaded with a hairspring (17) which provides most of the static stylus force (100 mg force). This construction provides a high acceleration for the stylus tip (13), allowing the stylus to track features of an amplitude over 0.1 mu m with data points 1 mu m apart and a stylus traverse speed of at least 5 mm s . The stylus assembly (7) is supported and driven by a two dimensional traverse unit (5) having two one dimensional stages. Each stage has a balanced compound rectilinear spring mounting using flexure springs arranged to resist gravity through their resistance to bending within the plane of the spring.
    • 可用于扫描工件表面的小面积(例如0.5mm×0.5mm)以检测粗糙度特征的计量仪器具有触针组件,其中短(10mm)轻量(5mg)触针臂(9) 装有游丝(17),其提供大部分静态触针力(100mg力)。 这种结构为触针尖端(13)提供了高加速度,使得触针能够跟踪超过0.1微米的幅度的特征,数据点相差1微米,而触针横切速度至少为5mm·s -1。 触针组件(7)由具有两个一维级的二维横移单元(5)支撑和驱动。 每个阶段都有一个平衡的复合直线弹簧安装,使用弯曲弹簧,弹簧布置成通过弹簧的平面内的弯曲抵抗重力。