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    • 2. 发明申请
    • Process for improvement of IBAD texturing on substrates in a continuous mode
    • 在连续模式下在基板上改进IBAD纹理的方法
    • US20070026136A1
    • 2007-02-01
    • US11191362
    • 2005-07-27
    • Paul ArendtRaymond DePaulaLiliana StanIgor UsovJames Groves
    • Paul ArendtRaymond DePaulaLiliana StanIgor UsovJames Groves
    • B05D5/12C23C16/00C23C14/00
    • C30B29/16C30B23/02
    • A process is disclosed of preparing a template layer of a biaxially oriented material by ion beam assisted deposition upon a length of a substrate within a vacuum deposition chamber, by passing a length of substrate across a cooling block within a vacuum deposition chamber, with the cooling block configured to contact the substrate and passing a cooled liquid or gas through said cooling block during deposition of said layer of biaxially oriented material by ion beam assisted deposition upon said length of substrate. Also, a process is disclosed of preparing a template layer of a biaxially oriented material by ion beam assisted deposition upon a length of a substrate within a vacuum deposition chamber, by contacting a substrate with a cooled gas from the group of argon, oxygen, nitrogen during the ion beam assisted deposition of the biaxially oriented material within the vacuum deposition chamber, the cooled gas exiting a series of openings in a cooling block within the vacuum deposition chamber, the cooling block configured to contact the substrate.
    • 公开了一种通过离子束辅助沉积在真空沉积室内的衬底长度上通过使一段衬底穿过真空沉积室内的冷却块而制备双轴取向材料的模板层的方法,其中冷却 块,其被配置成接触所述基底并且通过所述长度的衬底上的离子束辅助沉积在所述双轴取向材料层沉积期间使冷却的液体或气体通过所述冷却块。 此外,公开了一种通过离子束辅助沉积在真空沉积室内的衬底长度上制备双轴取向材料的模板层的方法,其通过使基底与来自氩,氧,氮的组的冷却气体接触 在双轴取向材料在真空沉积室内的离子束辅助沉积期间,冷却的气体离开真空沉积室内的冷却块中的一系列开口,冷却块构造成接触基板。