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1. 发明申请

US20100145513A1 METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT 审中-公开
标题翻译：用于监测半导体加工机器人的位置的方法
公开(公告)号：US20100145513A1
公开(公告)日：2010-06-10
申请号：US12712091
申请日：2010-02-24
申请人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
发明人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
IPC分类号： G05B15/00 , G06F19/00 , H01L21/67
CPC分类号： H01L21/67259 , H01L21/67766 , H01L21/681
摘要： A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.
摘要翻译：提供了与传感系统配合以校正机器人运动的机器人定位系统。感测系统与常规用于控制机器人运动的传感器分离，从而提供机器人真实位置的可重复检测。在一个实施例中，定位系统包括机器人，控制器，马达传感器和去耦传感器。机器人具有至少一个用于操纵联动装置的电动机，控制联接到其上的衬底支架的位移。马达传感器为控制器提供用于移动基板支架的马达驱动信息。解耦传感器提供指示可用于校正机器人运动的基板支撑件的真实位置的信息。

2. 发明授权

US07107125B2 Method and apparatus for monitoring the position of a semiconductor processing robot 失效
标题翻译：用于监测半导体处理机器人的位置的方法和装置
公开(公告)号：US07107125B2
公开(公告)日：2006-09-12
申请号：US10697731
申请日：2003-10-29
申请人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
发明人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
IPC分类号： G05B15/00 , G05B19/00
CPC分类号： H01L21/67259 , H01L21/67766 , H01L21/681
摘要： A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.
摘要翻译：提供了与传感系统配合以校正机器人运动的机器人定位系统。感测系统与常规用于控制机器人运动的传感器分离，从而提供机器人真实位置的可重复检测。在一个实施例中，定位系统包括机器人，控制器，马达传感器和去耦传感器。机器人具有至少一个用于操纵联动装置的电动机，控制联接到其上的衬底支架的位移。马达传感器为控制器提供用于移动基板支架的马达驱动信息。解耦传感器提供指示可用于校正机器人运动的基板支撑件的真实位置的信息。

3. 发明申请

US20050096794A1 Method and apparatus for monitoring the position of a semiconductor processing robot 失效
标题翻译：用于监测半导体处理机器人的位置的方法和装置
公开(公告)号：US20050096794A1
公开(公告)日：2005-05-05
申请号：US10697731
申请日：2003-10-29
申请人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
发明人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
IPC分类号： G06F19/00 , H01L21/00 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67259 , H01L21/67766 , H01L21/681
摘要： A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.
摘要翻译：提供了与传感系统配合以校正机器人运动的机器人定位系统。感测系统与常规用于控制机器人运动的传感器分离，从而提供机器人真实位置的可重复检测。在一个实施例中，定位系统包括机器人，控制器，马达传感器和去耦传感器。机器人具有至少一个用于操纵联动装置的电动机，控制联接到其上的衬底支架的位移。马达传感器为控制器提供用于移动基板支架的马达驱动信息。解耦传感器提供指示可用于校正机器人运动的基板支撑件的真实位置的信息。

4. 发明申请

US20060224276A1 METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT 审中-公开
标题翻译：用于监测半导体加工机器人的位置的方法
公开(公告)号：US20060224276A1
公开(公告)日：2006-10-05
申请号：US11424377
申请日：2006-06-15
申请人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
发明人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
IPC分类号： G06F19/00 , H01L21/306 , C23C16/00
CPC分类号： H01L21/67259 , H01L21/67766 , H01L21/681
摘要： A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.
摘要翻译：提供了与传感系统配合以校正机器人运动的机器人定位系统。感测系统与常规用于控制机器人运动的传感器解耦，从而提供机器人真实位置的可重复检测。在一个实施例中，定位系统包括机器人，控制器，马达传感器和去耦传感器。机器人具有至少一个用于操纵联动装置的电动机，控制联接到其上的衬底支架的位移。马达传感器为控制器提供用于移动基板支架的马达驱动信息。解耦传感器提供指示可用于校正机器人运动的基板支撑件的真实位置的信息。

5. 发明授权

US08527080B2 Method and system for managing process jobs in a semiconductor fabrication facility 有权
标题翻译：用于管理半导体制造设备中的工艺工作的方法和系统
公开(公告)号：US08527080B2
公开(公告)日：2013-09-03
申请号：US12244735
申请日：2008-10-02
申请人： Shay Assaf , Venkatesh Babu , Robert D. Flores , Brendan Hickey , Krishna Kuttannair , Song J. Park , Adrian Rhee , Chongyang Chris Wang
发明人： Shay Assaf , Venkatesh Babu , Robert D. Flores , Brendan Hickey , Krishna Kuttannair , Song J. Park , Adrian Rhee , Chongyang Chris Wang
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.
摘要翻译：描述了用于管理半导体制造设备中的处理作业的方法和系统。在一个实施例中，该方法包括接收与一个或多个优先级相关联的多个处理作业。该方法还包括以反映优先级的顺序执行多个处理作业。在接收到具有高于多个处理作业的优先级的优先级的新的处理作业时，该顺序可以实时地修改。

6. 发明授权

US07484127B2 Method and system for preserving crash dump in a diskless system 有权
标题翻译：在无盘系统中保护故障转储的方法和系统
公开(公告)号：US07484127B2
公开(公告)日：2009-01-27
申请号：US11034247
申请日：2005-01-13
申请人： Venkatesh Babu
发明人： Venkatesh Babu
IPC分类号： G06F11/00
CPC分类号： G06F11/1441 , G06F11/0742 , G06F11/0778
摘要： The invention discloses a method for preserving crash dump data in case of operating system crash in a diskless device. The method and the system according to the invention uses two stage booting where in a primary and a secondary kernel are loaded. The primary kernel is a compact kernel that comprises a limited set of functionality and the secondary kernel is a fully functional kernel used for running applications. In case of a crash of the secondary kernel, the kernel prepares a jump back to the primary kernel. Then the primary kernel preserves the crash dump support data and secondary kernel's RAM contents by sending it to a remote system which can store it on a nonvolatile memory.
摘要翻译：本发明公开了一种用于在无盘设备中操作系统崩溃的情况下保存故障转储数据的方法。根据本发明的方法和系统使用两级引导，其中加载了主核和辅核。主内核是一个紧凑的内核，包含一组有限的功能，第二个内核是用于运行应用程序的全功能内核。在二级内核崩溃的情况下，内核准备跳转到主内核。然后，主内核通过将其发送到可将其存储在非易失性存储器上的远程系统来保留故障转储支持数据和辅助内核的RAM内容。

7. 发明申请

US20100087941A1 METHOD AND SYSTEM FOR MANAGING PROCESS JOBS IN A SEMICONDUCTOR FABRICATION FACILITY 有权
标题翻译：用于管理半导体制造设备中的工艺流程的方法和系统
公开(公告)号：US20100087941A1
公开(公告)日：2010-04-08
申请号：US12244735
申请日：2008-10-02
申请人： Shay Assaf , Venkatesh Babu , Robert D. Flores , Brendan Hickey , Krishna Kuttannair , Song J. Park , Adrian Rhee , Chongyang Chris Wang
发明人： Shay Assaf , Venkatesh Babu , Robert D. Flores , Brendan Hickey , Krishna Kuttannair , Song J. Park , Adrian Rhee , Chongyang Chris Wang
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.
摘要翻译：描述了用于管理半导体制造设备中的处理作业的方法和系统。在一个实施例中，该方法包括接收与一个或多个优先级相关联的多个处理作业。该方法还包括以反映优先级的顺序执行多个处理作业。在接收到具有高于多个处理作业的优先级的优先级的新的处理作业时，该顺序可以实时地修改。

8. 发明申请

US20060241813A1 Optimized cluster tool transfer process and collision avoidance design 审中-公开
标题翻译：优化集群工具传输过程和避免碰撞设计
公开(公告)号：US20060241813A1
公开(公告)日：2006-10-26
申请号：US11338323
申请日：2006-01-23
申请人： Venkatesh Babu , Russell Kaplan , Tetsuya Ishikawa
发明人： Venkatesh Babu , Russell Kaplan , Tetsuya Ishikawa
IPC分类号： G05B19/04
CPC分类号： G05B19/41825 , G03B27/32 , G03D13/006 , G03F7/40 , G05B2219/40476 , G05B2219/45031 , G05B2219/49137 , H01L21/67109 , H01L21/6715 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67225 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/6831 , H01L21/6838 , H01L21/68707 , H01L22/26 , Y02P90/087
摘要： The present invention relates to apparatus and method of collision avoidance in a cluster tool having a plurality of processing stations and at least two robots. In one embodiment of the invention, the system is configured such that each of the processing stations is accessible by only one of the at least two robots. For each of the at least two robots, a set of trajectories is determined so that each robot is capable of transferring substrates among the corresponding processing stations, wherein the envelope formed by the set of trajectories of each robot does not overlap.
摘要翻译：本发明涉及具有多个处理站和至少两个机器人的群集工具中的防碰撞装置和方法。在本发明的一个实施例中，系统被配置为使得每个处理站仅由至少两个机器人中的一个可访问。对于至少两个机器人中的每一个，确定一组轨迹，使得每个机器人能够在相应的处理站之间传送基板，其中由每个机器人的一组轨迹形成的包络不重叠。

9. 发明申请

US20060156057A1 Method and system for preserving crash dump in a diskless system 有权
公开(公告)号：US20060156057A1
公开(公告)日：2006-07-13
申请号：US11034247
申请日：2005-01-13
申请人： Venkatesh Babu
发明人： Venkatesh Babu
IPC分类号： G06F11/00
CPC分类号： G06F11/1441 , G06F11/0742 , G06F11/0778
摘要： The invention discloses a method for preserving crash dump data in case of operating system crash in a diskless device. The method and the system according to the invention uses two stage booting where in a primary and a secondary kernel are loaded. The primary kernel is a compact kernel that comprises a limited set of functionality and the secondary kernel is a fully functional kernel used for running applications. In case of a crash of the secondary kernel, the kernel prepares a jump back to the primary kernel. Then the primary kernel preserves the crash dump support data and secondary kernel's RAM contents by sending it to a remote system which can store it on a nonvolatile memory.

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