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1. 发明授权

US07093207B1 Data analysis flow engine 有权
标题翻译：数据分析流引擎
公开(公告)号：US07093207B1
公开(公告)日：2006-08-15
申请号：US10715082
申请日：2003-11-17
申请人： Po-Shou Liao , Benny Huang , Charles Lai , Jimmy Liao , Bing Li , Ilya Languev , Peter Eldredge , Leslie F. Smith , Felix Lai , Sino Ho , Ellis E-Li Chang , Sandeep Bhagwat , Anthony Cheung , Michael J. Bellon
发明人： Po-Shou Liao , Benny Huang , Charles Lai , Jimmy Liao , Bing Li , Ilya Languev , Peter Eldredge , Leslie F. Smith , Felix Lai , Sino Ho , Ellis E-Li Chang , Sandeep Bhagwat , Anthony Cheung , Michael J. Bellon
IPC分类号： G06F17/50 , G06F12/00 , G06F19/00
CPC分类号： G06Q10/06 , Y10S707/99953 , Y10S707/99954
摘要： An extensible data analysis system for analyzing integrated circuit fabrication data produced during integrated circuit fabrication, including an application tier that selectively runs analysis nodes. The application tier has an architecture for optionally including and excluding a desired selection of the analysis nodes. The application tier architecture allows the selection of the analysis nodes to be dynamically added by a user. A data access tier selectively runs data reader nodes. The data access tier has an architecture for optionally including and excluding a desired selection of the data reader nodes. The data reader nodes interpret a desired variety of data source files containing the integrated circuit fabrication data having different formats for access by the application tier. The data access tier architecture allows the selection of the data reader nodes to be dynamically added by the user.
摘要翻译：一种用于分析集成电路制造过程中生成的集成电路制造数据的可扩展数据分析系统，包括选择性地运行分析节点的应用层。应用层具有用于可选地包括和排除所需分析节点选择的架构。应用层架构允许用户动态添加分析节点的选择。数据访问层选择性地运行数据读取器节点。数据访问层具有用于可选地包括和排除数据读取器节点的期望选择的架构。数据读取器节点解读包含具有用于应用层访问的不同格式的集成电路制造数据的所需种类的数据源文件。数据访问层架构允许用户动态地添加数据读取器节点的选择。

2. 发明授权

US06718526B1 Spatial signature analysis 有权
标题翻译：空间签名分析
公开(公告)号：US06718526B1
公开(公告)日：2004-04-06
申请号：US10360433
申请日：2003-02-07
申请人： Peter Eldredge , Patrick Y. Huet , Robinson Piramuthu , Sandeep Bhagwat , Kai Chi , Kai Liu , Martin Plihal , Shaio Roan , Maruti Shanbhag
发明人： Peter Eldredge , Patrick Y. Huet , Robinson Piramuthu , Sandeep Bhagwat , Kai Chi , Kai Liu , Martin Plihal , Shaio Roan , Maruti Shanbhag
IPC分类号： G06F1750
CPC分类号： G06T7/001
摘要： A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.
摘要翻译：一种用于确定衬底上一组物理事件的分配分类的系统。传感器感测衬底上的物理事件并产生事件数据。插入规则模块管理器接收并管理任意数量的插入规则模块。每个插入规则模块都有输入，本地过滤器，分析器和输出。输入从前面插入规则模块接收事件数据和置信度值。本地过滤器分析来自先前插入规则模块的接收到的置信度值，并且通过至少部分地基于从先前插入到规则模块中得到的置信度值来选择性地传递插件规则模块。鉴于与插入规则模块相关联的给定分类，分析器分析事件数据，并且至少部分地基于事件数据符合给定分类的方式来分配置信度值。输出为后续插入规则模块提供置信度值。后处理器接收由插入规则模块提供的置信度值，并且至少部分地基于所产生的置信度值的比较，从所述给定分类中选择与所述一组物理事件相关联的所分配的分类通过所有插入规则模块。

3. 发明授权

US4555798A Automatic system and method for inspecting hole quality 失效
标题翻译：自动检测孔质量的系统和方法
公开(公告)号：US4555798A
公开(公告)日：1985-11-26
申请号：US505848
申请日：1983-06-20
申请人： William H. Broadbent, Jr. , Steve Buchholz , Peter Eldredge , Mark J. Wihl
发明人： William H. Broadbent, Jr. , Steve Buchholz , Peter Eldredge , Mark J. Wihl
IPC分类号： G01N21/956 , G06T7/00 , G06K9/60
CPC分类号： G06T7/0008 , G01N21/95607 , G06T7/604 , G06T2207/10056 , G06T2207/30148
摘要： An automatic inspection system for inspecting holes in a mask including carriage means 30, illumination means 44, optical means 48, photosensitive detector means 46, and signal processing means 56. The mask 34 to be inspected is positioned by the carriage means in a horizontal plane. The optical means projects a focused image of a portion of the mask onto the photosensitive detector means. Photodiodes in the detector means are responsive to light from the illumination means that is transmitted through the holes in the mask. The signal processing means scans the outputs of the photodiodes and stores in memory a digital representation of the mask. The signal processing means performs inspection measurements and comparison tests. A smoothness checker circuit 240 measures the local radius of curvature of each hole at several places and compares the measurements to predetermined curvature limits to detect nicks and sharp protrusion defects. An area check circuit 246 measures the area of the hole and compares it to predetermined area limits. A diameter check circuit 244 measures the diameter of the hole in two dimensions and compares it to predetermined diameter limits. If either the hole area or the hole diameter is outside their respective limits, a hole size defect is indicated. Means are also provided for locating completely blocked, mispositioned or unintended holes by comparing detected information to a data base.
摘要翻译：用于检查掩模中的孔的自动检查系统，包括托架装置30，照明装置44，光学装置48，光敏检测装置46和信号处理装置56.待检查的掩模34由托架装置定位在水平面。光学装置将一部分掩模的聚焦图像投射到光敏检测器装置上。检测器装置中的光电二极管响应来自照射装置的光，透射通过掩模中的孔。信号处理装置扫描光电二极管的输出并在存储器中存储掩模的数字表示。信号处理装置执行检查测量和比较测试。平滑度检查器电路240测量几个位置处的每个孔的局部曲率半径，并将测量值与预定的曲率极限进行比较，以检测刻痕和尖锐的突出缺陷。区域检查电路246测量孔的面积并将其与预定面积限制进行比较。直径检查电路244测量孔的直径，并将其与预定的直径限制进行比较。如果孔面积或孔径都在其各自的极限之外，则表示孔尺寸缺陷。还提供了用于通过将检测到的信息与数据库进行比较来定位完全阻塞，错位或非预期的孔的手段。

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